Abstract: An optical channel waveguide is manufactured by forming an optical isolation pedestal or ridge on a substrate and coating the substrate and pedestal with an optical channel layer. The optical channel waveguide is that portion of the optical channel layer which overlies the pedestal. Cladding layers may be added overlying the optical channel film or the cladding function may be performed by air. The disclosed process requires no high temperature diffusion steps and is thus suitable for manufacturing optical channel waveguides integrated on a semiconductor substrate with semiconductor devices. In addition, the entire process for manufacturing the optical channel waveguide may be carried out during a single pumpdown of a vacuum system.

Abstract: Wafer probing apparatus especially adapted to probing surface acoustic wave (SAW) device die such as delay lines is disclosed; the apparatus includes a probe card especially suited to the radio frequency and multiple output nature of a SAW delay line together with a computer-aided electronic system for exciting the delay line and evaluating its output.

Abstract: A method is disclosed for using a combination of electron beam and photo lithography in making a acoustic wave device. The process is preformed by first using a positive photoresist and electron beam writing to designate the fine lines required in acoustic wave devices. Next, a second photoresist and optical lithography are used to delineate the pad areas.

Abstract: A thick film device conductor arrangement suitable for making connections between a resiliently mounted element such as a surface acoustic delay line and adjacent thick film conductors and then with the device connecting pins. The thick film conductors include a double layer structure of differing noble metals each selected for desirable properties in designated areas of the device.

Abstract: Compound surface acoustic wave matched filters comprise chirp-biphase and biphase code multiplex transducer pairs on piezoelectric substrates. Both alternatives offer significantly improved processing gain when compared with conventional biphase filters. The advantage is realized by convolving the correlation peak of the chirp or biphase input transducer on the response of the conventional biphase output transducer, thus achieving a large processing gain with a minimum number of transducer electrodes.

Abstract: Passivated and low scatter acoustic wave devices comprise surface acoustic wave (SAW) and shallow bulk acoustic wave (SBAW) devices having transducers composed of oxidizable metal and layers of metal oxide on conventional acoustic wave substrates. Passivated transducers are achieved by forming a layer of oxide on an existing transducer. The method may be used to passivate a device packaged in a non-oxidizable package with oxidizable wire leads, thus combining complete protection with efficient manufacturing operations. Low scatter SAW transducers are achieved by forming the transducer and the interstitial insulating layer from a single layer of oxidizable metal by means of masking and oxidation operations.

Abstract: A temperature stable surface acoustic wave device utilizes a known variation in the power flow angle characteristic of the substrate over a temperature range to vary the response of the device at one or more output transducers in a way which compensates for temperature dependent phase shifts common to prior art devices.

Abstract: Temperature stable cuts of quartz comprise the families of doubly rotated cuts defined by (YXwlt) 0/27/138, 7/27/135.5, 15/40/40, 15/30/38, 12.5/35/130 and rotational equivalents thereof. It is found that SAW devices may be fabricated on these cuts which demonstrate a very high degree of temperature stability and which have other characteristics consistent with practical usage. The sensitivity of the stability to variations in the propagation direction, corresponding to the angle psi, is such that it is advantageous to fabricate several input-output transducer pairs, each slightly rotated with respect to the others, and to chose the most stable for actual use.

Abstract: Apparatus and method for phase-encoding electro-acoustic electro-acoustic elements, elements of an acoustic surface wave device to provide preselected transducer characteristics. By altering the position of a transducer element or portions of a transducer element, the phase of the acoustic wave propagated from, or the phase of the electrical signal received by the transducer element can be varied by an amount determined by the velocity of propagation of the acoustic wave.By altering the location of the electro-elements, or portions thereof, from a position determined for example by amplitude-encoding techniques, a resultant signal produced by a plurality of electro-acoustic elements, element portions, or combination of elements and element portions can provide the preselected transducer characteristics.