Publication number: 20100128090
Abstract: A MEMS vapor bubble generator includes a chamber for holding liquid; and a heater positioned in the chamber, the heater being formed using a sputtering technique. The heater is formed from a superalloy material. The superalloy material of the heater is in direct contact with the liquid, without any intervening protective coating. The superalloy has a crystalline structure with a grain size less than 100 nano-metres. The superalloy is MCrAlX, where M is one or more of Ni, Co, Fe with M contributing at least 50% by weight, Cr contributing between 8% and 35% by weight, Al contributing more than zero but less than 8% by weight, and X contributing less than 25% by weight, with X consisting of zero or more other elements, preferably including but not limited to Mo, Re, Ru, Ti, Ta, V, W, Nb, Zr, B, C, Si, Y, Hf.
Type:
Application
Filed:
December 20, 2009
Publication date:
May 27, 2010
Inventors:
Kia Silverbrook, Roger Mervyn Lloyd Foote, Angus John North, Jennifer Mia Fishburn, Paul David Lunsmann, Alexandra Artemis Papadakis, Channarayapatna Shankar Lakshmi, Frederik Jacobus Crous, Matthew Stewart Walker, Samuel George Mallinson, Paul Justin Reichl