Abstract: A method for thermally conditioning an optical element includes irradiating the optical element with radiation, not-irradiating the optical element with the radiation, allowing heat flow between the optical element and a conditioning fluid that is held in a conditioning fluid reservoir, and providing a fluid flow of the conditioning fluid, to supply thermally conditioned fluid to the reservoir. A flow rate of the fluid during the irradiating of the optical element is lower than a flow rate of the fluid when the optical element is not-irradiated.

Abstract: A pressure sensor includes a flexible membrane deformable in response to pressure. The flexible membrane covers a cavity and includes a strain gauge that produces signals corresponding to deformation of the flexible membrane. The flexible membrane is a flexible monolithic integrated circuit foil.

Abstract: An evaporator for evaporating a liquid containing fluid, having an inlet and an outlet connected to an evaporation volume with an internal structure, the inlet and the outlet defining a main flow path there between and the cross-section of the evaporation volume is substantially constant along the main flow path is described. A method method for evaporating a liquid containing fluid by providing an evaporator supplying a liquid containing feed stream to the inlet; exerting heat; choosing the operating conditions so that an annular flow is created.

Abstract: A method for thermally conditioning an optical element includes irradiating the optical element with radiation, not-irradiating the optical element with the radiation, allowing heat flow between the optical element and a conditioning fluid that is held in a conditioning fluid reservoir, and providing a fluid flow of the conditioning fluid, to supply thermally conditioned fluid to the reservoir. A flow rate of the fluid during the irradiating of the optical element is lower than a flow rate of the fluid when the optical element is not-irradiated.

Abstract: The invention relates to a pressure sensor comprising a flexible membrane deformable in response to a pressure, which covers a cavity (2) and which comprises a strain gauge (21) that produces signals corresponding to the deformation of the flexible membrane, wherein the flexible membrane is a flexible monolithic integrated circuit foil (10). In this way the semiconductor integrated circuit itself serves as the flexible membrane, leading to a less complex fabrication process.

Abstract: The invention relates to an evaporator for evaporating a liquid containing fluid, having an inlet and an outlet connected to a evaporation volume, the inlet and the outlet defining a main flow path there between, wherein the evaporation volume is equipped with an internal structure and the cross-section of the evaporation volume is substantially constant along the main flow path. The invention further relates to a method for evaporating a liquid containing fluid comprising the steps of: providing an evaporator according to the invention; supplying a liquid containing feed stream to the inlet of the evaporator; exerting heat to the evaporator volume; choosing the operating conditions of the evaporator thus that an annular flow is created within the evaporator volume.

Abstract: A thermopile on an electrically insulating substrate. A pattern is arranged on this substrate of parts which consist of a first conductive material, to which a second conductive material is applied, and parts which consist only of the first conductive material. The second material is better electrically conducting than the first and, connected as thermopile, can thereby generate a certain thermo-voltage. The second material is applied to the first, starting from a layer of the first material on the substrate, by etching stripes therein via the so-called “blind-hole etching” technique and applying the second material in these stripes.

Abstract: Method for manufacturing a thermopile on an electrically insulating substrate. A pattern is arranged on this substrate of parts which consist of a first conductive material, to which a second conductive material is applied, and parts which consist only of the first conductive material.

Abstract: Method for manufacturing a thermopile on an electrically insulating substrate. A pattern is arranged on this substrate of parts which consist of a first conductive material, to which a second conductive material is applied, and parts which consist only of the first conductive material. The second material is better electrically conducting than the first and, connected as thermopile, can thereby generate a certain thermo-voltage. The second material is applied to the first, starting from a layer of the first material on the substrate, by etching stripes therein via the so-called “blind-hole etching” technique and applying the second material in these stripes.

Abstract: Method and device for measuring flows of fluids, such as liquids and gases, flowing through a tube (16). The tube is heat-conducting and is heated at a certain location (18), with the heat on the one hand moving by way of the tube wall (17) in a direction contrary to the fluid flow (15) and on the other hand flowing off into a heat-conducting body (20) which preferably extends substantially parallel to the tube. The temperature difference between the tube wall (17) and the conducting body (20) is measured, e.g., by a thermopile (19) and is a measure of the flow gone past. The device preferably includes a thermopile (19) for carrying out the measurement.