Abstract: The invention relates to an apparatus and a method for characterizing a microlithographic mask. According to one aspect, an apparatus according to the invention comprises at least one light source which emits coherent light, an illumination optical unit which produces a diffraction-limited light spot on the mask from the coherent light of the at least one light source, a scanning device, by use of which it is possible to implement a scanning movement of the diffraction-limited light spot relative to the mask, a sensor unit, and an evaluation unit for evaluating the light that is incident on the sensor unit and has come from the mask, an output coupling element for coupling out a portion of the coherent light emitted by the at least one light source, and an intensity sensor for capturing the intensity of this output coupled portion.

Abstract: The invention relates to an apparatus and a method for characterizing a microlithographic mask. According to one aspect, an apparatus according to the invention comprises at least one light source which emits coherent light, an illumination optical unit which produces a diffraction-limited light spot on the mask from the coherent light of the at least one light source, a scanning device, by use of which it is possible to implement a scanning movement of the diffraction-limited light spot relative to the mask, a sensor unit, and an evaluation unit for evaluating the light that is incident on the sensor unit and has come from the mask, an output coupling element for coupling out a portion of the coherent light emitted by the at least one light source, and an intensity sensor for capturing the intensity of this output coupled portion.

Abstract: A device for characterizing particles of exhaled air. The device comprises an inlet line directed towards an outer environment with a filter for filtering particles. The inlet line is fluidly connected to a breathing line which comprises an interface through which air is breathable. A measurement line is fluidly connected to the breathing line and is fluidly connected to a particle measurement device for determining a parameter corresponding to the particles of the exhaled air. An inventive method comprises the following steps: Directing ex- haled air to a particle measurement device and determining a parameter corresponding to the particles of exhaled air, the parameter being at least one of the following parameters: Particle number, particle concentration (density), particle diameter, particle mass, particle size distribution, particle mass distribution, particle mass concentration, particle number concentration.

Abstract: A method for determining a source-dependent particle size distribution of an aerosol by an aerosol measuring device. First, a fraction parameter is determined that corresponds to a fraction of a source-dependent aerosol part of the aerosol. In addition, a particle size distribution of the aerosol particles is determined such that the source-dependent particle size distribution of the aerosol is determined from the fraction parameter and the particle size distribution. In terms of the device, the invention comprises an aerosol measuring device for determining a source-dependent particle size distribution of an aerosol, by means of which aerosol measuring device a fraction parameter can be determined that corresponds to a fraction of a source-dependent aerosol part of the aerosol. A particle size distribution of the aerosol particles can be determined such that the source-dependent particle size distribution of the aerosol can be determined from the fraction parameter and the particle size distribution.

Abstract: In order to achieve improved determination of fine dust particles, a method is provided for determining particles of an aerosol whereby, in a first measuring step, aerosol is fed to an optical aerosol measuring device without being influenced by a controllable centrifugal separator, at least in a further measuring step aerosol is guided to the optical measuring device while being influenced by the centrifugal separator rotating at least at a speed deviating from the speed 0, and properties of the particles of the aerosol are determined from the received measurement signals of the optical measuring device in the first and in at least one further measuring step. A device is also provided, which has an optical sensor unit forming the measuring volume for recording particles, and is designed such that a separator for size- and/or mass-sensitive separation of particles is arranged upstream of the sensor unit.

Abstract: A method for determining a particle velocity of an aerosol by means of an aerosol measuring device. Aerosol particles flow through a measuring cell and are illuminated with an electromagnetic beam. The scattered light is registered and detected by a sensor. The temporal signal durations of the scattered light signals are determined, and the particle velocity of the aerosol is determined on the basis of the signal durations. Furthermore, the invention provides an aerosol measuring device designed to carry out the steps of the method according to the invention for determining the particle velocity of an aerosol. In addition, a computer program having program code means is provided, which computer program is configured to carry out the steps of the method according to the invention.

Abstract: The invention relates to a method for determining the particle size distribution of an aerosol by means of an aerosol measuring device and to an aerosol measuring device. Aerosol particles of the aerosol flowing through the measuring cell are illuminated in the measuring cell by a light beam. The scattered light is picked up by a detector, so that light signals of the aerosol particles can be detected spectroscopically in terms of intensity. From this, a size distribution of the light signals that is representative of a particle size distribution is produced. A known standard particle size distribution of dry aerosol particles is adapted to the measured particle size distribution, so that moisture influences are eliminated from the measured particle size distribution in this way.