Patents by Inventor Frederik Westergaard Østerberg

Frederik Westergaard Østerberg has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Probe for testing an electrical property of a test sample
    Patent number: 11693028
    Abstract: A probe for direct nano- and micro-scale electrical characterization of materials and semi conductor wafers. The probe comprises a probe body, a first cantilever extending from the probe body, and a first thermal detector extending from the probe body. The thermal detector is used to position the cantilever with respect to a test sample.
    Type: Grant
    Filed: November 15, 2018
    Date of Patent: July 4, 2023
    Assignee: KLA CORPORATION
    Inventors: Frederik Westergaard Østerberg, Dirch Hjorth Petersen, Henrik Hartmann Henrichsen, Alberto Cagliani, Ole Hansen, Peter Folmer Nielsen
  • Method for measuring an electric property of a test sample
    Patent number: 11307245
    Abstract: The method may be used for measuring an electric property of a magnetic tunnel junction used in an embedded MRAM memory for example. The method uses a multi point probe with a plurality of probe tips for contacting a designated area of the test sample, which is electrically insulated from the part of the test sample which is to be tested. Electrically connections are placed underneath the magnetic tunnel junction and goes to the designated area.
    Type: Grant
    Filed: March 18, 2020
    Date of Patent: April 19, 2022
    Assignee: KLA CORPORATION
    Inventors: Alberto Cagliani, Frederik Westergaard Østerberg, Chia-Hung Wei
  • Method for Measuring An Electric Property of a Test Sample
    Publication number: 20210231731
    Abstract: The method may be used for measuring an electric property of a magnetic tunnel junction used in an embedded MRAM memory for example. The method uses a multi point probe with a plurality of probe tips for contacting a designated area of the test sample, which is electrically insulated from the part of the test sample which is to be tested. Electrically connections are placed underneath the magnetic tunnel junction and goes to the designated area.
    Type: Application
    Filed: March 18, 2020
    Publication date: July 29, 2021
    Inventors: Alberto Cagliani, Frederik Westergaard Østerberg, Chia-Hung Wei
  • PROBE FOR TESTING AN ELECTRICAL PROPERTY OF A TEST SAMPLE
    Publication number: 20200278380
    Abstract: A probe for direct nano- and micro-scale electrical characterization of materials and semi conductor wafers. The probe comprises a probe body, a first cantilever extending from the probe body, and a first thermal detector extending from the probe body. The thermal detector is used to position the cantilever with respect to a test sample.
    Type: Application
    Filed: November 15, 2018
    Publication date: September 3, 2020
    Inventors: Frederik Westergaard Østerberg, Dirch Hjorth Petersen, Henrik Hartmann Henrichsen, Alberto Cagliani, Ole Hansen, Peter Folmer Nielsen