Abstract: An alignment system configured to be substantially insensitive to thermal variations in its system during alignment measurements. The alignment system includes a sensor system, a support structure, a sensing element, a position measurement system, and an athermal interface between the sensing element and the support structure. The sensor system is configured to determine a position of an alignment mark on a substrate and the support structure is configured to support the sensor system. The sensing element is configured to detect an unintentional displacement of the support structure and the position measurement system is configured to measure the unintentional displacement relative to a reference element based on the detected unintentional displacement. The athermal interface is configured to prevent detection of temperature induced displacement of the support structure by the sensing element.

Abstract: An alignment system configured to be substantially insensitive to thermal variations in its system during alignment measurements. The alignment system includes a sensor system, a support structure, a sensing element, a position measurement system, and an athermal interface between the sensing element and the support structure. The sensor system is configured to determine a in position of an alignment mark on a substrate and the support structure is configured to support the sensor system. The sensing element is configured to detect an unintentional displacement of the support structure and the position measurement system is configured to measure the unintentional displacement relative to a reference element based on the detected unintentional displacement. The athermal interface is configured to prevent detection of temperature induced displacement of the support structure by the sensing element.

Abstract: An immersion lithographic apparatus includes a projection system, a first table with a first planar surface and a second table with a second planar surface, the first and second planar surfaces being substantially coplanar, a liquid confinement system configured to spatially confine an immersion liquid to a volume with a first surface area that is coplanar with the first and second planar surfaces, and is substantially smaller than a second surface area of the top surface of the substrate, and a swap bridge member attached to the first table, the swap bridge member having an upper surface that is substantially coplanar with the first and second planar surfaces, wherein the upper surface of the swap bridge member is configured to serve as part of the liquid confinement system and to deform when the swap bridge member collides with the second table and to remain attached to the first table.

Abstract: An immersion lithographic apparatus includes a projection system, a first table with a first planar surface and a second table with a second planar surface, the first and second planar surfaces being substantially coplanar, a liquid confinement system configured to spatially confine an immersion liquid to a volume with a first surface area that is coplanar with the first and second planar surfaces, and is substantially smaller than a second surface area of the top surface of the substrate, and a swap bridge member attached to the first table, the swap bridge member having an upper surface that is substantially coplanar with the first and second planar surfaces, wherein the upper surface of the swap bridge member is configured to serve as part of the liquid confinement system and to deform when the swap bridge member collides with the second table and to remain attached to the first table

Abstract: The invention relates to an apparatus for ejecting droplets of a fluid material, comprising: a reservoir for storing the material, a channel connected with the reservoir, which is provided with at least one outflow opening from which, in use, flows a jet of the material breaking up into droplets, a pump for pressurizing the fluid material in the reservoir, so as to pass the material under pressure through the channel in the direction of the outflow opening, and a movable member provided in the reservoir, the member formed by a plurality of surfaces shaped to induce a pressure variation in the fluid material upstream of the outflow opening, for the purpose of obtaining the jet breaking up into droplets; the movable member mounted to have each opposed surface receiving identical hydrostatic pressure, to generate a net resulting zero force exerted on the movable member by the hydrostatic pressure. Accordingly, a simple mechanism is provided for providing multiple printing nozzles.

Abstract: The invention relates to an apparatus for ejecting droplets of a fluid material, comprising: a reservoir for storing the material, a channel connected with the reservoir, which is provided with at least one outflow opening from which, in use, flows a jet of the material breaking up into droplets, a pump for pressurizing the fluid material in the reservoir, so as to pass the material under pressure through the channel in the direction of the outflow opening, and a movable member provided in the reservoir, the member formed by a plurality of surfaces shaped to induce a pressure variation in the fluid material upstream of the outflow opening, for the purpose of obtaining the jet breaking up into droplets; the movable member mounted to have each opposed surface receiving identical hydrostatic pressure, to generate a net resulting zero force exerted on the movable member by the hydrostatic pressure. Accordingly, a simple mechanism is provided for providing multiple printing nozzles.

Abstract: The invention relates to a highly automated puncture system for inserting a cannula or a needle into a blood vessel of a person or an animal. The puncture system has an acquisition module that allows for determining at least a location of a blood vessel underneath of the surface of a skin and is further enabled to determine an optimal puncture location that is potentially suitable for inserting a cannula into the blood vessel. Further, the puncture system has tissue analysis means to analyse the skin surface in the proximity of the puncture location to check whether the skin is suitable for punctuation. This prevents puncturing the skin at locations where scars, wound and the like can be found.

Abstract: The present invention provides a highly automated puncture system for inserting a cannula or a needle into a blood vessel of a person or an animal. The puncture system has an acquisition module that allows for determining at least a location of a blood vessel underneath of the surface of a skin and is further enabled to determine an optimal puncture location that is well suitable for inserting a cannula into the blood vessel. Further, the puncture system has an actuator for moving and aligning the cannula to a determined position. The system is further adapted to autonomously insert the cannula into the blood vessel for multiple purposes, such as blood withdrawal, venous medication and infusions.

Abstract: The invention relates to a system for guiding a probe over the surface of the skin of a patient. Performing measurements with ultrasound techniques for small structures such as blood vessels need well-defined spatial relationship between the measuring probe and the tissue which has to be examined. The invention seeks to ensure a movement of the measuring probe in a controlled and precise way over the skin. Therefore, a system 1 is suggested which comprises a probe holder 2 to which a probe 4 is rigidly attachable. The probe holder 2 is moveable along at least one rail 5, 5?. The rail can be wrapped around the patient 3 or a body part 7 of the patient or the animal.

Abstract: The present application relates to a puncture system for inserting a cannula or a needle into a blood vessel of a person or an animal. The puncture system (100) has location determination means (108) for determining at least one location of the blood vessel. The location determination means are mechanically flexible such that their shape is adaptable to the shape of a body part of the person or animal. Furthermore, the system comprises processing means (112) for determining a puncture location (124) of the blood vessel depending on the output of the location determination means.