Patents by Inventor Fredrick D. Fishburn
Fredrick D. Fishburn has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11626406Abstract: Some embodiments include an assembly having a stack of first and second alternating levels. The first levels are insulative levels. The second levels are device levels having integrated devices. Each of the integrated devices has a transistor coupled with an associated capacitor, and the capacitor is horizontally offset from the transistor. The transistors have semiconductor channel material, and have transistor gates along the semiconductor channel material. Each of the transistors has a first source/drain region along one side of the semiconductor channel material and coupled with the associated capacitor, and has a second source/drain region. Wordlines extend horizontally along the device levels and are coupled with the transistor gates. Digit lines extend vertically through the device levels and are coupled with the second source/drain regions. Some embodiments include methods of forming integrated structures.Type: GrantFiled: July 16, 2021Date of Patent: April 11, 2023Assignee: Micron Technology, Inc.Inventor: Fredrick D. Fishburn
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Patent number: 11501804Abstract: A microelectronic device comprises a semiconductive pillar structure comprising a central portion, a first end portion, and a second end portion on a side of the central portion opposite the first end portion, the first end portion oriented at an angle with respect to the central portion and extending substantially parallel to the second end portion, a digit line contact on the central portion of the semiconductive pillar structure, a first storage node contact on the first end portion, and a second storage node contact on the second end portion. Related microelectronic devices, electronic systems, and methods are also described.Type: GrantFiled: August 13, 2020Date of Patent: November 15, 2022Assignee: Micron Technology, Inc.Inventors: Fredrick D. Fishburn, Si-Woo Lee, Scott L. Light, Song Guo
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Publication number: 20220051699Abstract: A microelectronic device comprises semiconductive pillar structure comprising a central portion, a first end portion, and a second end portion on a side of the central portion opposite the first end portion, the first end portion oriented at an angle with respect to the central portion and extending substantially parallel to the second end portion, a digit line contact on the central portion of the semiconductive pillar structure, a first storage node contact on the first end portion, and a second storage node contact on the second end portion. Related microelectronic devices, electronic systems, and methods are also described.Type: ApplicationFiled: August 13, 2020Publication date: February 17, 2022Inventors: Fredrick D. Fishburn, Si-Woo Lee, Scott L. Light, Song Guo
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Publication number: 20210343719Abstract: Some embodiments include an assembly having a stack of first and second alternating levels. The first levels are insulative levels. The second levels are device levels having integrated devices. Each of the integrated devices has a transistor coupled with an associated capacitor, and the capacitor is horizontally offset from the transistor. The transistors have semiconductor channel material, and have transistor gates along the semiconductor channel material. Each of the transistors has a first source/drain region along one side of the semiconductor channel material and coupled with the associated capacitor, and has a second source/drain region. Wordlines extend horizontally along the device levels and are coupled with the transistor gates. Digit lines extend vertically through the device levels and are coupled with the second source/drain regions. Some embodiments include methods of forming integrated structures.Type: ApplicationFiled: July 16, 2021Publication date: November 4, 2021Applicant: Micron Technology, Inc.Inventor: Fredrick D. Fishburn
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Patent number: 11081487Abstract: Some embodiments include an assembly having a stack of first and second alternating levels. The first levels are insulative levels. The second levels are device levels having integrated devices. Each of the integrated devices has a transistor coupled with an associated capacitor, and the capacitor is horizontally offset from the transistor. The transistors have semiconductor channel material, and have transistor gates along the semiconductor channel material. Each of the transistors has a first source/drain region along one side of the semiconductor channel material and coupled with the associated capacitor, and has a second source/drain region. Wordlines extend horizontally along the device levels and are coupled with the transistor gates. Digit lines extend vertically through the device levels and are coupled with the second source/drain regions. Some embodiments include methods of forming integrated structures.Type: GrantFiled: May 29, 2020Date of Patent: August 3, 2021Assignee: Micron Technology, Inc.Inventor: Fredrick D. Fishburn
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Patent number: 11004494Abstract: Some embodiments include an assembly having active material structures arranged in an array having rows and columns. Each of the active material structures has a first side which includes a bit contact region, and has a second side which includes a cell contact region. Each of the bit contact regions is coupled with a first redistribution pad. Each of the cell contact regions is coupled with a second redistribution pad. The first redistribution pads are coupled with bitlines, and the second redistribution pads are coupled with programmable devices. Some embodiments include methods of forming memory arrays.Type: GrantFiled: February 4, 2019Date of Patent: May 11, 2021Assignee: Micron Technology, Inc.Inventors: Sanh D. Tang, Kuo-Chen Wang, Martin C. Roberts, Diem Thy N. Tran, Hideki Gomi, Fredrick D. Fishburn, Srinivas Pulugurtha, Michel Koopmans, Eiji Hasunuma
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Patent number: 10985239Abstract: Methods, apparatuses, and systems related to trim a semiconductor structure using oxygen are described. An example method includes forming a support structure for a semiconductor structure having a first silicate material on a working surface. The method further includes forming a first nitride material on the first silicate material. The method further includes forming a second silicate material on the first nitride material. The method further includes forming a second nitride material on the second silicate material. The method further includes forming an opening through the semiconductor structure. The method further includes depositing an electrode material within the opening. The method further includes removing portions of the support structure. The method further includes performing a controlled oxidative trim to an upper portion of the electrode material.Type: GrantFiled: August 16, 2019Date of Patent: April 20, 2021Assignee: Micron Technology, Inc.Inventors: Matthew N. Rocklein, An-Jen B. Cheng, Fredrick D. Fishburn, Sevim Korkmaz, Paul A. Paduano
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Publication number: 20210050409Abstract: Methods, apparatuses, and systems related to trim a semiconductor structure using oxygen are described. An example method includes forming a support structure for a semiconductor structure having a first silicate material on a working surface. The method further includes forming a first nitride material on the first silicate material. The method further includes forming a second silicate material on the first nitride material. The method further includes forming a second nitride material on the second silicate material. The method further includes forming an opening through the semiconductor structure. The method further includes depositing an electrode material within the opening. The method further includes removing portions of the support structure. The method further includes performing a controlled oxidative trim to an upper portion of the electrode material.Type: ApplicationFiled: August 16, 2019Publication date: February 18, 2021Inventors: Matthew N. Rocklein, An-Jen B. Cheng, Fredrick D. Fishburn, Sevim Korkmaz, Paul A. Paduano
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Patent number: 10833087Abstract: A semiconductor device comprises a memory storage component and a transistor in operable communication with the memory storage element. The transistor comprises a source region, a drain region, a gate electrode between the source region and the drain region, a charge trapping material surrounding at least an upper portion of the gate electrode, and an oxide material on sides of the charge trapping material. Related systems and methods are also disclosed.Type: GrantFiled: August 21, 2018Date of Patent: November 10, 2020Assignee: Micron Technology, Inc.Inventors: Fredrick D. Fishburn, Haitao Liu, Soichi Sugiura, Oscar O. Enomoto, Mark A. Zaleski, Keisuke Hirofuji, Makoto Morino, Ichiro Abe, Yoshiyuki Nanjo, Atsuko Otsuka
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Publication number: 20200295007Abstract: Some embodiments include an assembly having a stack of first and second alternating levels. The first levels are insulative levels. The second levels are device levels having integrated devices. Each of the integrated devices has a transistor coupled with an associated capacitor, and the capacitor is horizontally offset from the transistor. The transistors have semiconductor channel material, and have transistor gates along the semiconductor channel material. Each of the transistors has a first source/drain region along one side of the semiconductor channel material and coupled with the associated capacitor, and has a second source/drain region. Wordlines extend horizontally along the device levels and are coupled with the transistor gates. Digit lines extend vertically through the device levels and are coupled with the second source/drain regions. Some embodiments include methods of forming integrated structures.Type: ApplicationFiled: May 29, 2020Publication date: September 17, 2020Applicant: Micron Technology, Inc.Inventor: Fredrick D. Fishburn
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Patent number: 10707210Abstract: Some embodiments include an assembly having a stack of first and second alternating levels. The first levels are insulative levels. The second levels are device levels having integrated devices. Each of the integrated devices has a transistor coupled with an associated capacitor, and the capacitor is horizontally offset from the transistor. The transistors have semiconductor channel material, and have transistor gates along the semiconductor channel material. Each of the transistors has a first source/drain region along one side of the semiconductor channel material and coupled with the associated capacitor, and has a second source/drain region. Wordlines extend horizontally along the device levels and are coupled with the transistor gates. Digit lines extend vertically through the device levels and are coupled with the second source/drain regions. Some embodiments include methods of forming integrated structures.Type: GrantFiled: October 3, 2018Date of Patent: July 7, 2020Assignee: Micron Technology, Inc.Inventor: Fredrick D. Fishburn
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Publication number: 20200066726Abstract: A semiconductor device comprises a memory storage component and a transistor in operable communication with the memory storage element. The transistor comprises a source region, a drain region, a gate electrode between the source region and the drain region, a charge trapping material surrounding at least an upper portion of the gate electrode, and an oxide material on sides of the charge trapping material. Related systems and methods are also disclosed.Type: ApplicationFiled: August 21, 2018Publication date: February 27, 2020Inventors: Fredrick D. Fishburn, Haitao Liu, Soichi Sugiura, Oscar O. Enomoto, Mark A. Zaleski, Keisuke Hirofuji, Makoto Morino, Ichiro Abe, Yoshiyuki Nanjo, Atsuko Otsuka
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Publication number: 20190181142Abstract: Some embodiments include an assembly having a stack of first and second alternating levels. The first levels are insulative levels. The second levels are device levels having integrated devices. Each of the integrated devices has a transistor coupled with an associated capacitor, and the capacitor is horizontally offset from the transistor. The transistors have semiconductor channel material, and have transistor gates along the semiconductor channel material. Each of the transistors has a first source/drain region along one side of the semiconductor channel material and coupled with the associated capacitor, and has a second source/drain region. Wordlines extend horizontally along the device levels and are coupled with the transistor gates. Digit lines extend vertically through the device levels and are coupled with the second source/drain regions. Some embodiments include methods of forming integrated structures.Type: ApplicationFiled: October 3, 2018Publication date: June 13, 2019Applicant: Micron Technology, Inc.Inventor: Fredrick D. Fishburn
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Publication number: 20190172517Abstract: Some embodiments include an assembly having active material structures arranged in an array having rows and columns. Each of the active material structures has a first side which includes a bit contact region, and has a second side which includes a cell contact region. Each of the bit contact regions is coupled with a first redistribution pad. Each of the cell contact regions is coupled with a second redistribution pad. The first redistribution pads are coupled with bitlines, and the second redistribution pads are coupled with programmable devices. Some embodiments include methods of forming memory arrays.Type: ApplicationFiled: February 4, 2019Publication date: June 6, 2019Applicant: Micron Technology, Inc.Inventors: Sanh D. Tang, Kuo-Chen Wang, Martin C. Roberts, Diem Thy N. Tran, Hideki Gomi, Fredrick D. Fishburn, Srinivas Pulugurtha, Michel Koopmans, Eiji Hasunuma
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Patent number: 10242726Abstract: Some embodiments include an assembly having active material structures arranged in an array having rows and columns. Each of the active material structures has a first side which includes a bit contact region, and has a second side which includes a cell contact region. Each of the bit contact regions is coupled with a first redistribution pad. Each of the cell contact regions is coupled with a second redistribution pad. The first redistribution pads are coupled with bitlines, and the second redistribution pads are coupled with programmable devices. Some embodiments include methods of forming memory arrays.Type: GrantFiled: November 5, 2018Date of Patent: March 26, 2019Assignee: Micron Technology, Inc.Inventors: Sanh D. Tang, Kuo-Chen Wang, Martin C. Roberts, Diem Thy N. Tran, Hideki Gomi, Fredrick D. Fishburn, Srinivas Pulugurtha, Michel Koopmans, Eiji Hasunuma
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Patent number: 10153027Abstract: Some embodiments include an assembly having active material structures arranged in an array having rows and columns. Each of the active material structures has a first side which includes a bit contact region, and has a second side which includes a cell contact region. Each of the bit contact regions is coupled with a first redistribution pad. Each of the cell contact regions is coupled with a second redistribution pad. The first redistribution pads are coupled with bitlines, and the second redistribution pads are coupled with programmable devices. Some embodiments include methods of forming memory arrays.Type: GrantFiled: August 21, 2018Date of Patent: December 11, 2018Assignee: Micron Technology, Inc.Inventors: Sanh D. Tang, Kuo-Chen Wang, Martin C. Roberts, Diem Thy N. Tran, Hideki Gomi, Fredrick D. Fishburn, Srinivas Pulugurtha, Michel Koopmans, Eiji Hasunuma
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Patent number: 10083734Abstract: Some embodiments include an assembly having active material structures arranged in an array having rows and columns. Each of the active material structures has a first side which includes a bit contact region, and has a second side which includes a cell contact region. Each of the bit contact regions is coupled with a first redistribution pad. Each of the cell contact regions is coupled with a second redistribution pad. The first redistribution pads are coupled with bitlines, and the second redistribution pads are coupled with programmable devices. Some embodiments include methods of forming memory arrays.Type: GrantFiled: November 6, 2017Date of Patent: September 25, 2018Assignee: Micron Technology, Inc.Inventors: Sanh D. Tang, Kuo-Chen Wang, Martin C. Roberts, Diem Thy N. Tran, Hideki Gomi, Fredrick D. Fishburn, Srinivas Pulugurtha, Michel Koopmans, Eiji Hasunuma
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Patent number: 7501672Abstract: A method used to form a semiconductor device provides a silicide layer on a plurality of transistor word lines and on a plurality of conductive plugs. In one embodiment, the word lines, one or more sacrificial dielectric layers on the word lines, conductive plugs, and a conductive enhancement layer are formed through the use of a single mask. An in-process semiconductor device which may be formed using one embodiment of the inventive method is also described.Type: GrantFiled: October 10, 2006Date of Patent: March 10, 2009Assignee: Micron Technology, Inc.Inventors: Fredrick D. Fishburn, Terrence B. McDaniel, Richard H. Lane
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Patent number: 7119024Abstract: A method used to form a semiconductor device provides a silicide layer on a plurality of transistor word lines and on a plurality of conductive plugs. In one embodiment, the word lines, one or more sacrificial dielectric layers on the word lines, conductive plugs, and a conductive enhancement layer are formed through the use of a single mask. An in-process semiconductor device which can be formed using one embodiment of the inventive method is also described.Type: GrantFiled: July 10, 2003Date of Patent: October 10, 2006Assignee: Micron Technology, Inc.Inventors: Fredrick D. Fishburn, Terrence B. McDaniel, Richard H. Lane