Abstract: Concentrations are determined based on a measurement of a composition (X) by Laser Induced Breakdown Spectroscopy (LIBS). The LIBS spectrum (Sx) comprises resonance peaks (Rk,Rca,Rna) corresponding to the constituents (K,Ca,Na) in the composition (X). The resonance peaks comprise spectral amplitudes (Pk,Pca,Dna,Pna) indicative of the unknown concentrations (Cna,Ck,Cca) of the constituents (K,Ca,Na). A first spectral amplitude (Pk,Pca,Dna) in the LIBS spectrum (Sx) corresponds to the unknown concentration (Ck,Cca,Cna) of a first constituent (K,Ca,Na) to be determined. A second spectral amplitude (Pna) corresponds to a maximum value of a self-reversed resonance peak (Rna) of the first or another constituent (Na) in the LIBS spectrum (Sx). An amplitude ratio (Pk/Pna, Pca/Pna, Dna/Pna) is calculated between the first spectral amplitude (Pk,Pca,Dna) and the second spectral amplitude (Pna) and the ratio is matched with calibration data to determine concentrations.

Abstract: A monolithic spectrometer (10) for spectrally resolving light (L), comprises a body (2) of solid material having optical surfaces (3,4,5,6a-6c,8) configured to guide the light (L) along an optical path (E1,E2,E3,E4) inside the body (2). The optical surfaces of the body (2) comprise a segmented focusing surface (6a,6b) comprising first and second continuously functional optical shapes (Ca,Cb) to focus received parts of respective beams (La,Lb) onto respective focal position (fa,fb) in an imaging plane (P) outside the body (2). The second continuously functional optical shape (Cb) is separated from the first continuously functional optical shape (Ca) by an optical discontinuity (Dab) there between.

Abstract: A multi-beam laser cavity unit (10) comprises a laser crystal (13) and lens array (14) disposed in the laser cavity (LC). The lens array comprises an integral piece formed by a plurality of interconnected lenses. Each lens (14a) is configured to form a respective closed optical path (OPa) along the length (Z) of the laser cavity (LC) between the cavity mirrors (11,12) through the laser crystal (13) corresponding to a cavity mode for generating one (LBa) of the plurality of parallel laser beams (LB). The cavity unit (10) can be comprised in a laser system receiving pump light (PL) from a plurality of light sources. For example, the system can be used in a maskless patterning device.

Abstract: A monolithic spectrometer (10) for spectrally resolving light (L), comprises a body (2) of solid material having optical surfaces (3,4,5,6a-6c,8) configured to guide the light (L) along an optical path (E1,E2,E3,E4) inside the body (2). The optical surfaces of the body (2) comprise a segmented focusing surface (6a,6b) comprising first and second continuously functional optical shapes (Ca,Cb) to focus received parts of respective beams (La,Lb) onto respective focal position (fa,fb) in an imaging plane (P) outside the body (2). The second continuously functional optical shape (Cb) is separated from the first continuously functional optical shape (Ca) by an optical discontinuity (Dab) there between.

Abstract: A multi-beam laser cavity unit (10) comprises a laser crystal (13) and lens array (14) disposed in the laser cavity (LC). The lens array comprises an integral piece formed by a plurality of interconnected lenses. Each lens (14a) is configured to form a respective closed optical path (OPa) along the length (Z) of the laser cavity (LC) between the cavity mirrors (11,12) through the laser crystal (13) corresponding to a cavity mode for generating one (LBa) of the plurality of parallel laser beams (LB). The cavity unit (10) can be comprised in a laser system receiving pump light (PL) from a plurality of light sources. For example, the system can be used in a maskless patterning device.