Abstract: A monolithic waveguide/MEMS switch is disclosed that has a waveguide portion and a MEMS mirror portion fabricated on a single substrate, such as a as a silicon-on-insulator wafer. The monolithic waveguide/MEMS switch adjusts the phase of an optical signal by varying the position of one or more moveable mirrors. The mirror portion includes a mirror having a reflective surface that is attached to at least one MEMS actuator to achieve in-plane motion of the mirror (moves parallel to a plane of said at least one waveguide). In one implementation, the MEMS actuator is embodied as a known comb drive actuator. The phase adjustment techniques of the present invention may be employed in various optical devices, including wavelength selective optical switches that support multiple optical channels.

Abstract: An optical device has at least one waveguide with at least one adjacent resonator, where the distance between the resonator and the waveguide can be controllably adjusted to change the optical coupling between the resonator and the waveguide. When implemented as part of an interferometer, the ability to adjust the waveguide/resonator distance—and thereby the optical coupling between them—provides a mechanically tunable interferometer.