Abstract: A process to manufacture stepped mold inserts and stepped microstructural bodies molded with the mold inserts. Stepped mold inserts are manufactured using structured irradiation masks with regionally different absorption for x-radiation; to this end, extensive calculations are necessary. Furthermore, several masks can be used in succession and for each irradiation step the penetration depth of the x-radiation can be changed. These masks must be positioned with high precision. With the present process stepped mold inserts are manufactured by a simple procedure. Several layers of varying thickness are applied on a metal plate alternating with non-conductive and conductive material. The layered stack is prestructured by precision mechanical machining at depths that vary from region to region, filled with a resist material and irradiated preferably through a single structured mask.