Patents by Inventor Fritz Y. F. Su

Fritz Y. F. Su has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • MEMS processing
    Patent number: 7816164
    Abstract: Methods for forming a MEMS display device are provided. In one embodiment, a transparent substrate comprising an array of MEMS devices (e.g., interferometric modulators) formed thereon is annealed following removal of a sacrificial silicon layer. The array is subsequently encapsulated with a backplate comprising a desiccant. MEMS devices disposed below the desiccant have an offset voltage substantially equal to zero.
    Type: Grant
    Filed: December 1, 2006
    Date of Patent: October 19, 2010
    Assignee: QUALCOMM MEMS Technologies, Inc.
    Inventors: Manish Kothari, Fritz Y. F. Su, Bangalore Natarajan, Nassim Khonsari
  • MEMS PROCESSING
    Publication number: 20080130082
    Abstract: Methods for forming a MEMS display device are provided. In one embodiment, a transparent substrate comprising an array of MEMS devices (e.g., interferometric modulators) formed thereon is annealed following removal of a sacrificial silicon layer. The array is subsequently encapsulated with a backplate comprising a desiccant. MEMS devices disposed below the desiccant have an offset voltage substantially equal to zero.
    Type: Application
    Filed: December 1, 2006
    Publication date: June 5, 2008
    Applicant: QUALCOMM MEMS TECHNOLOGIES, INC.
    Inventors: Manish Kothari, Fritz Y.F. Su, Bangalore Natarajan, Nassim Khonsari