Abstract: A system for a semiconductor fabrication facility comprises a transporting tool configured to move a carrier, a first manufacturing tool configured to accept the carrier facing in a first direction, a second manufacturing tool configured to accept the carrier facing in the second direction, and an orientation tool. The carrier is moved to the orientation tool by the transporting tool prior to being moved to the first manufacturing tool or the second manufacturing tool by the transporting tool. The orientation tool rotates the carrier so that the carrier is accepted by the first manufacturing tool or the second manufacturing tool. The transporting tool, the first manufacturing tool, the second manufacturing tool and the orientation tool are physically separated from each other.

Abstract: A polycarbonate diol is provided, including three kinds of repeating diol units, wherein one of the repeating diol units is chosen from an alkoxylated diol monomer.

Abstract: A polycarbonate diol is provided, including three kinds of repeating diol units, wherein one of the repeating diol units is chosen from an alkoxylated diol monomer.

Abstract: A polycarbonate diol is provided, including three kinds of repeating diol units, wherein one of the repeating diol units is chosen from an alkoxylated diol monomer.

Abstract: A polycarbonate diol is provided, including three kinds of repeating diol units, wherein one of the repeating diol units is chosen from an alkoxylated diol monomer.

Abstract: This invention relates to a catalyst which comprises palladium metal as the main catalyst, tin metal or a mixture of tin and additional metals as the promoter, in combination with an alkali or alkaline earth metal compound, supported on the outer surface of a porous carrier. The catalyst is used in the process for producing allyl acetate through the oxacylation of propylene, acetic acid and oxygen in a vapor phase. The catalyst of the present invention exhibits high catalytic activity, high catalytic selectivity and high catalytic life, which greatly increases the economic utility of the oxacylation process.

Abstract: This invention relates to a catalyst which comprises palladium metal as the main catalyst, tin metal or a mixture of tin and additional metals as the promoter, in combination with an alkali or alkaline earth metal compound, supported on the outer surface of a porous carrier. The catalyst is used in the process for producing allyl acetate through the oxacylation of propylene, acetic acid and oxygen in a vapor phase. The catalyst of the present invention exhibits high catalytic activity, high catalytic selectivity and high catalytic life, which greatly increases the economic utility of the oxacylation process.

Abstract: This invention relates to a catalyst which comprises palladium metal as the main catalyst, tin metal or a mixture of tin and additional metals as the promoter, in combination with an alkali or alkaline earth metal compound, supported on the outer surface of a porous carrier. The catalyst is used in the process for producing allyl acetate through the oxacylation of propylene, acetic acid and oxygen in a vapor phase. The catalyst of the present invention exhibits high catalytic activity, high catalytic selectivity and high catalytic life, which greatly increases the economic utility of the oxacylation process.

Abstract: The present invention is related to a method for preparing lactam represented by the following formula: 1

Abstract: The present invention is related to a method for preparing lactam represented by the following formula: wherein R is C2-10 alkylene which may be optionally substituted with C1-6 alkyl or phenyl; R′ is a hydrogen atom, C1-6 alkyl, C1-6 hydroxyalkyl or phenyl. The method for preparing lactam comprises an amination reaction using crystalline aluminosilicate zeolites as catalysts under the condition of gas phase in the presence of (a) lactone, (b) amine and/or ammonia and (c) water.

Abstract: The present invention relates to a catalyst for preparing a lactone, which is prepared by supporting a cupric compound, a zinc compound and at least one alkaline earth metal compound on the supporter. The present invention also relates to a method for preparing a lactone, which comprises a dehydrocyclization reaction of a diol under a gas phase in the presence of the aforementioned catalyst after activating said catalyst. The catalyst for preparing lactone of the present invention is quite economic because of its high activity, long lifetime and high selectivity of products.

Abstract: The present invention is related to a method for preparing polyether polyol or copolymerized polyether polyol, which uses an acid catalyst consisting of heteropoly acidic salts and oxides and/or binders. It allows tetrahydrofuran and/or cyclic ether compounds to carry out the ring-opening polymerization or ring-opening copolymerization with/without telogen, and obtains polyether polyol or copolymerized polyether polyol. An acid catalyst is used in the present invention because of its low solubility in organic solvent, so its process is simpler and the catalyst is easy to recycle for repeated use. As well, its preparation process is highly advantageous.

Abstract: This invention relates to a preparation process of a catalyst which comprises a noble metal and a metal as catalysis promoter in combination with an alkali or alkaline earth metal compound, supported on the outer surface of a carrier. The preparation process comprises impregnating the carrier with a solution containing an oxidative state noble metal as the main catalyst and an oxidative state metal as catalysis promoter, reducing the oxidative state metals into the metallic state in gaseous phase with a gaseous reducing agent under certain temperature, pressure, moisture and gas concentration, then impregnating the reduced carrier with a solution of an alkali or alkaline earth metal compound. The metal components-supporting catalyst prepared by the process according to the present invention has a high surface area and exhibits high catalytic activity, which leads to increase the catalytic efficiency and life of this heterogeneous catalyst.

Abstract: The present invention relates to a catalyst for preparing a lactone, which is prepared by supporting a cupric compound, a zinc compound and at least one alkaline earth metal compound on the supporter. The present invention also relates to a method for preparing a lactone, which comprises a dehydrocyclization reaction of a diol under a gas phase in the presence of the aforementioned catalyst after activating said catalyst. The catalyst for preparing lactone of the present invention is quite economic because of its high activity, long lifetime and high selectivity of products.

Abstract: This invention is directed to a process for producing cyclic ethers by liquid phase reaction, which comprises using a crystalline aluminosilicate zeolite as the catalyst, and subjecting an alkanediol to cyclodehydration at a temperature less than the boiling point of the alkanediol to obtain the corresponding cyclic ether.

Abstract: This invention relates to a process for producing polyester fibers with enhanced dyeability, lesser elongation and greater strength, which comprises combining 2-methyl-1,3-propanediol into a mixture containing terephthalic acid, or an alkyl ester thereof, and a (C.sub.2-6)alkanediol, and carrying out polymerization. The resultant polyester copolymer is then spun to produce polyester fibers. This invention also relates to the polyester fibers produced by this process. These polyester fibers exhibit enhanced dyeability, lesser elongation and greater strength than un-improved polyester fibers.

Abstract: A process for the preparation of methyl formate by the vapor phase dehydrogenation of methanol in the presence of a catalyst composed of copper oxide, a chromium oxide and a sodium compound is described.

Abstract: A process is disclosed for the preparation of high purity carbon monoxide by heating methyl formate in the presence of a catalyst of a precious metal compound with or without a promoter of alkali or alkaline earth metal compound.