Patents by Inventor Fu-Shiang Yang
Fu-Shiang Yang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8717677Abstract: An optical device is provided. The optical device comprises a substrate having a coating region and a non-coating region. A first film is on the coating region, wherein the first film has a band edge structure extending to a portion of the non-coating region with an angle between a surface of the band edge structure and a surface of the first film to diminish the attenuation of an incident light beam.Type: GrantFiled: April 3, 2008Date of Patent: May 6, 2014Assignee: Industrial Technology Research InstituteInventors: Yu-Shan Chang, Fu-Shiang Yang, Hau-Wei Wang
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Patent number: 8223335Abstract: A system for alignment measurement for a rolling embossed double-sided optical film, the system comprising: a first roller with a first brightness enhancement film pattern and a first alignment pattern thereon, a second roller with a second brightness enhancement film pattern and a second alignment pattern thereon; a measuring unit for measuring diffraction patterns in the first alignment region and the second alignment region, respectively; and a control unit electrically connected to the first roller, the second roller and the measuring unit to adjust the relative position between the first roller and the second roller according to the diffraction patterns measured by the measuring unit.Type: GrantFiled: October 1, 2009Date of Patent: July 17, 2012Assignee: Industrial Technology Research InstituteInventors: Shu-Ping Dong, Hung-Ming Tai, Fu-Shiang Yang
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Patent number: 8154725Abstract: A line scanning measurement system includes an illumination apparatus, a support, a telecentric optical element and a processor. The illumination apparatus is utilized for providing an extended polarized light beam. The support is utilized for mounting a sample, and the extended polarized light beam is directed at the sample. The telecentric optical element is utilized for directing a measurement light beam that has interacted with the sample toward a line scanning detector. The processor is utilized for obtaining the characteristic information of the sample in accordance with the signal measured by the line scanning detector.Type: GrantFiled: November 20, 2009Date of Patent: April 10, 2012Assignee: Industrial Technology Research InstituteInventor: Fu Shiang Yang
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Patent number: 8130378Abstract: A phase retardance inspection instrument, comprising: a light source module for generating a single-wavelength light beam; a circularly polarized light generating module, comprising a polarizer and a first phase retarder, for receiving the single-wavelength light beam as it is guided to pass through the polarizer and the first phase retarder in order; and a detecting module, comprising a second phase retarder, a polarizing beam splitter, a first image sensor and a second image sensor, for receiving and guiding a circularly polarized light beam to travel through the second phase retarder and the polarizing beam splitter in order after it passes through a substrate under inspection, wherein the polarizing beam splitter splits an elliptically polarized light beam into intensity vector components of a left-hand circularly polarized light beam and a right-hand circularly polarized light beam, which are to be emitted into the first image sensor and the second image sensor, respectively.Type: GrantFiled: February 6, 2009Date of Patent: March 6, 2012Assignee: Industrial Technology Research InstituteInventors: Chun-I Wu, Kai-Ping Chuang, Wan-Yi Lin, Yi-Chen Hsieh, Fu-Shiang Yang
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Patent number: 8059282Abstract: A reflective film thickness measurement method includes reading an original spectral image of a thin film measured by a broadband light source passing through a measurement system, transforming the original spectral image into a broadband reflectance wavelength function and then into a broadband frequency-domain function, dividing the broadband frequency-domain function by a single-wavelength frequency-domain function to obtain an ideal frequency-domain function, inverse-transforming the ideal frequency-domain function into an ideal reflectance wavelength function, and performing a curve fitting on the ideal reflectance wavelength function and a reflectance wavelength thickness general expression, so as to obtain a thickness of the thin film. A spectral image spatial axis direction processing method is performed to eliminate optical aberration in a deconvolution manner, so as to obtain spectral images of high spatial resolution.Type: GrantFiled: August 27, 2008Date of Patent: November 15, 2011Assignee: Industrial Technology Research InstituteInventor: Fu-Shiang Yang
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Publication number: 20110122409Abstract: The present invention provides a method for measuring object characteristics, wherein the method is capable of overcoming the interference induced bye the phase difference of the background with respect to the measuring system so as to measure the tiny characteristics such as the retardance or azimuth angle of an object accurately. The method is capable of obtaining two sets of light intensity images having retardance of background and the object respectively by simultaneously rotating the retarding elements and analyzer in various rotating angle combinations, and analyzing and calculating upon the polarized light intensities of the images associated with the background and the object so as to obtain actual retardance and azimuth angle of the object without the affect of the background retardance.Type: ApplicationFiled: February 26, 2010Publication date: May 26, 2011Applicant: Industrial Technology Research InstituteInventors: YI-CHEN HSIEH, Fu-Shiang Yang
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Publication number: 20110058169Abstract: A line scanning measurement system includes an illumination apparatus, a support, a telecentric optical element and a processor. The illumination apparatus is utilized for providing an extended polarized light beam. The support is utilized for mounting a sample, and the extended polarized light beam is directed at the sample. The telecentric optical element is utilized for directing a measurement light beam that has interacted with the sample toward a line scanning detector. The processor is utilized for obtaining the characteristic information of the sample in accordance with the signal measured by the line scanning detector.Type: ApplicationFiled: November 20, 2009Publication date: March 10, 2011Applicant: INDUSTRIAL TECHONOLGY RESEARCH INSTITUTEInventor: Fu Shiang YANG
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Patent number: 7869034Abstract: A multi-angle and multi-channel detecting device for detecting one or more than one samples is provided. The device has a light collector and a multi-channel kernel module. The light collector has a plurality of fiber probes arranged perpendicular to and/or inclined to the sample(s) so as to collect light signals. The kernel module is coupled to the light collector for detecting the sample(s).Type: GrantFiled: April 13, 2007Date of Patent: January 11, 2011Assignee: Industrial Technology Research InstituteInventors: Hau-Wei Wang, Fu-Shiang Yang, Yu-Shan Chang
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Publication number: 20100140312Abstract: A system for alignment measurement for a rolling embossed double-sided optical film, the system comprising: a first roller with a first brightness enhancement film pattern and a first alignment pattern thereon, a second roller with a second brightness enhancement film pattern and a second alignment pattern thereon; a measuring unit for measuring diffraction patterns in the first alignment region and the second alignment region, respectively; and a control unit electrically connected to the first roller, the second roller and the measuring unit to adjust the relative position between the first roller and the second roller according to the diffraction patterns measured by the measuring unit.Type: ApplicationFiled: October 1, 2009Publication date: June 10, 2010Applicant: Industrial Technology Research InstituteInventors: Shu-Ping Dong, Hung-Ming Tai, Fu-Shiang Yang
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Publication number: 20100118293Abstract: A phase retardance inspection instrument, comprising: a light source module for generating a single-wavelength light beam; a circularly polarized light generating module, comprising a polarizer and a first phase retarder, for receiving the single-wavelength light beam as it is guided to passe through the polarizer and the first phase retarder in order; and a detecting module, comprising a second phase retarder, a polarizing beam splitter, a first image sensor and a second image sensor, for receiving and guiding a circularly polarized light beam to travel through the second phase retarder and the polarizing beam splitter in order after it passes through a substrate under inspection, wherein the polarizing beam splitter splits an elliptically polarized light beam into intensity vector components of a left-hand circularly polarized light beam and a right-hand circularly polarized light beam, which are to be emitted into the first image sensor and the second image sensor, respectively.Type: ApplicationFiled: February 6, 2009Publication date: May 13, 2010Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTEInventors: Chun-I WU, Kai-Ping CHUANG, Wan-Yi LIN, Yi-Chen HSIEH, Fu-Shiang YANG
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Publication number: 20100085637Abstract: A differential interference contrast microscope (DIC microscope) suitable for inspecting a specimen inside a measurement area comprises a light source, a beam splitter, a first and second polarizer, a first and second DIC prism, a wave plate, and an image sensor, wherein the beam splitter reflects the beam generated from the light source to the measurement area, and the beam be reflected from the measurement area passes through the beam splitter to the image sensor. The first polarizer is located between the light source and the beam splitter, and the second polarizer is located between the beam splitter and the image sensor. The first DIC prism, the wave-plate and the second DIC prism are located between the beam splitter and the measurement area in order. The included angle between the principal axis of the first DIC prism and the principal axis of the second DIC prism is 90 degree.Type: ApplicationFiled: January 27, 2009Publication date: April 8, 2010Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTEInventors: DING-KUN LIU, FU-SHIANG YANG, CHUN-CHIEH WANG
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Publication number: 20090168079Abstract: A reflective film thickness measurement method includes reading an original spectral image of a thin film measured by a broadband light source passing through a measurement system, transforming the original spectral image into a broadband reflectance wavelength function and then into a broadband frequency-domain function, dividing the broadband frequency-domain function by a single-wavelength frequency-domain function to obtain an ideal frequency-domain function, inverse-transforming the ideal frequency-domain function into an ideal reflectance wavelength function, and performing a curve fitting on the ideal reflectance wavelength function and a reflectance wavelength thickness general expression, so as to obtain a thickness of the thin film. A spectral image spatial axis direction processing method is performed to eliminate optical aberration in a deconvolution manner, so as to obtain spectral images of high spatial resolution.Type: ApplicationFiled: August 27, 2008Publication date: July 2, 2009Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTEInventor: Fu-Shiang Yang
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Publication number: 20090168182Abstract: An optical device is provided. The optical device comprises a substrate having a coating region and a non-coating region. A first film is on the coating region, wherein the first film has a band edge structure extending to a portion of the non-coating region with an angle between a surface of the band edge structure and a surface of the first film to diminish the attenuation of an incident light beam.Type: ApplicationFiled: April 3, 2008Publication date: July 2, 2009Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTEInventors: Yu-Shan Chang, Fu-Shiang Yang, Hau-Wei Wang
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Patent number: 7495762Abstract: A high-density channels detecting device for detecting a sample is provided. The high density detecting-device has a light source for emitting a light beam, a collimator, a beam splitter, and a high-density channels imaging device. The collimator arranged on the beam path is used for collimating the emitted light beam. The beam splitter reflects the light beam incident from the collimator to the sample, and the light beam reflected by the sample passes through the beam splitter. The imaging device receives the light beam passing through the beam splitter, and has a light collector and a multi-channel kernel module for receiving the light beam from the light collector. By using the light collector, the light beam incident to the kernel module is parallel to the optical axis of the kernel module.Type: GrantFiled: September 5, 2006Date of Patent: February 24, 2009Assignee: Industrial Technology Research InstituteInventors: Hau-Wei Wang, Fu-Shiang Yang, Ding-Hsiang Pan
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Patent number: 7450230Abstract: A multi-channel imaging spectrometer, comprising an image acquiring unit, an optical detection element, a dispersion element and a lens module comprising a collimating lens module and a focusing lens module. The design of the lens module achieves elimination of primary aberrations such as coma and distortion through separating the collimating lens module and the focusing lens module, having identical structures with the collimating lens module, by a distance that is defined between a rear principle point of the collimating lens module and a front principle point of the focusing lens module and is twice of a front focal length of the focusing lens module. In addition, the lens module is also designed to exhibit linear dispersion for applied spectrum such that focus for each wavelength of the spectrum is linearly distributed on the imaging plane of the spectrometer so as to reduce the dispersion aberration.Type: GrantFiled: August 3, 2007Date of Patent: November 11, 2008Assignee: Industrial Technology Research InstituteInventors: Kai-Ping Chuang, Fu-Shiang Yang, Hau-Wei Wang
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Patent number: 7414718Abstract: The present invention discloses an apparatus for measuring spectrum and image with high spatial resolution and spectral resolution. The apparatus comprises an imaging side telecentric lens for collecting light from an object, an optical slit positioned behind the imaging side telecentric lens, an aspheric lens for collimating lights from the optical slits, a dispersing device for separating the lights of different wavelengths into a plurality of sub-rays of different entrance angle, an achromatic lens for focusing the sub-rays, and an optical sensor for detecting the optical intensity of the sub-rays. The dispersing device can be a transmission or reflection diffraction grating, and the optical sensor may consist of a plurality of photo-detectors positioned in a two dimensional array.Type: GrantFiled: June 8, 2005Date of Patent: August 19, 2008Assignee: Industrial Technology Rsearch InstituteInventors: Hau Wei Wang, Fu Shiang Yang
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Publication number: 20080144030Abstract: A multi-channel imaging spectrometer, comprising an image acquiring unit, an optical detection element, a dispersion element and a lens module comprising a collimating lens module and a focusing lens module. The design of the lens module achieves elimination of primary aberrations such as coma and distortion through separating the collimating lens module and the focusing lens module, having identical structures with the collimating lens module, by a distance that is defined between a rear principle point of the collimating lens module and a front principle point of the focusing lens module and is twice of a front focal length of the focusing lens module. In addition, the lens module is also designed to exhibit linear dispersion for applied spectrum such that focus for each wavelength of the spectrum is linearly distributed on the imaging plane of the spectrometer so as to reduce the dispersion aberration.Type: ApplicationFiled: August 3, 2007Publication date: June 19, 2008Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTEInventors: Kai-Ping Chuang, Fu-Shiang Yang, Hau-Wei Wang
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Publication number: 20080043232Abstract: A multi-angle and multi-channel detecting device for detecting one or more than one samples is provided. The device has a light collector and a multi-channel kernel module. The light collector has a plurality of fiber probes arranged perpendicular to and/or inclined to the sample(s) so as to collect light signals. The kernel module is coupled to the light collector for detecting the sample(s).Type: ApplicationFiled: April 13, 2007Publication date: February 21, 2008Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTEInventors: Hau-Wei Wang, Fu-Shiang Yang, Yu-Shan Chang
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Publication number: 20070165210Abstract: A high-density channels detecting device for detecting a sample is provided. The high density detecting-device has a light source for emitting a light beam, a collimator, a beam splitter, and a high-density channels imaging device. The collimator arranged on the beam path is used for collimating the emitted light beam. The beam splitter reflects the light beam incident from the collimator to the sample, and the light beam reflected by the sample passes through the beam splitter. The imaging device receives the light beam passing through the beam splitter, and has a light collector and a multi-channel kernel module for receiving the light beam from the light collector. By using the light collector, the light beam incident to the kernel module is parallel to the optical axis of the kernel module.Type: ApplicationFiled: September 5, 2006Publication date: July 19, 2007Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTEInventors: Hau-Wei Wang, Fu-Shiang Yang, Ding-Hsiang Pan
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Patent number: 7167322Abstract: A beam shaping apparatus including an optical lens is provided. The optical lens includes a diverging surface and a cylindrical surface. The diverging surface expands the input laser beam into a uniform line in one plane. The cylindrical surface converges the laser beam in another plane. Therefore, the output laser line has the desired width and the uniform density along its length.Type: GrantFiled: May 3, 2005Date of Patent: January 23, 2007Assignee: Industrial Technology Research InstituteInventors: Jyh-Long Chern, Chia-Yu Liu, Hau-Wei Wang, Fu-Shiang Yang