Abstract: A MEMS microphone and a manufacturing method thereof. The method comprises: sequentially forming a first isolation layer, a diaphragm, and a second isolation layer on a substrate; sequentially forming a first protective layer, a backplate electrode, and a second protective layer on the second isolation layer; forming a release hole penetrating through the first protective layer, the backplate electrode, and the second protective layer; forming an acoustic cavity penetrating through the substrate; releasing the diaphragm through the acoustic cavity and the release hole; and forming a groove on a surface of the first isolation layer, wherein the diaphragm conformally covers the surface of the first isolation layer, thereby forming a spring structure at a position of the groove.

Abstract: A MEMS microphone and a manufacturing method thereof. The method comprises: sequentially forming a first isolation layer, a diaphragm, and a second isolation layer on a substrate; sequentially forming a first protective layer, a backplate electrode, and a second protective layer on the second isolation layer; forming a release hole penetrating through the first protective layer, the backplate electrode, and the second protective layer; forming an acoustic cavity penetrating through the substrate; releasing the diaphragm through the acoustic cavity and the release hole; and forming a groove on a surface of the first isolation layer, wherein the diaphragm conformally covers the surface of the first isolation layer, thereby forming a spring structure at a position of the groove.

Abstract: A high-sensitivity terahertz micro-fluidic channel sensor and a preparation method thereof. The sensor includes a substrate and a cover layer, respectively provided with a metal plane reflector and a metal microstructure layer; a micro-fluidic channel is formed between the metal plane reflector and the metal microstructure layer; and when the micro-fluidic channel tests liquid, a composite structure formed of the metal microstructure layer, the test liquid and the metal plane reflector shows good absorption properties. The method includes forming a metal plane reflector and a metal microstructure layer on a substrate and a cover layer, respectively; fixedly connecting the substrate to the cover layer, and forming a closed micro-fluidic channel between the substrate and the cover layer; and forming a through via, communicated to the micro-fluidic channel, on the substrate and/or the cover layer, to form a flow channel for transferring liquid to be tested to or from the sensor.

Abstract: A high-sensitivity terahertz micro-fluidic channel sensor and a preparation method thereof. The sensor includes a substrate and a cover layer, respectively provided with a metal plane reflector and a metal microstructure layer; a micro-fluidic channel is formed between the metal plane reflector and the metal microstructure layer; and when the micro-fluidic channel tests liquid, a composite structure formed of the metal microstructure layer, the test liquid and the metal plane reflector shows good absorption properties. The method includes forming a metal plane reflector and a metal microstructure layer on a substrate and a cover layer, respectively; fixedly connecting the substrate to the cover layer, and forming a closed micro-fluidic channel between the substrate and the cover layer; and forming a through via, communicated to the micro-fluidic channel, on the substrate and/or the cover layer, to form a flow channel for transferring liquid to be tested to or from the sensor.