Patents by Inventor Fujihiko Toyomasu
Fujihiko Toyomasu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11890652Abstract: A cleaning chemical liquid supply device includes: first and second mixers respectively mixing first chemical liquid with dilution water and respectively supplying to first and second nozzles respectively supplying the first chemical liquid adjusted to desired flow rates and concentrations to a first position and a second, different position of the substrate in the cleaning device; a first dilution water control box controlling flow rates of the dilution water supplied to the first and second mixers; third and fourth mixers respectively mixing second, different chemical liquid with the dilution water and respectively supplying to third and fourth nozzles for respectively supplying the second chemical liquid adjusted to desired flow rates and concentrations to a third position and a fourth, different position of the substrate in the cleaning device; and a second dilution water control box controlling flow rates of the dilution water supplied to the third and fourth mixers.Type: GrantFiled: November 25, 2021Date of Patent: February 6, 2024Assignee: EBARA CORPORATIONInventors: Fujihiko Toyomasu, Junji Kunisawa
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Publication number: 20230249145Abstract: The present disclosure provides a chemical supply apparatus, a cleaning system, and a chemical supply method that can supply a cleaning chemical to two nozzles and also supply the cleaning chemical at a set flow rate to one of the nozzles.Type: ApplicationFiled: February 7, 2023Publication date: August 10, 2023Inventors: Fujihiko TOYOMASU, Junji KUNISAWA, Kenichiro SAITO
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Publication number: 20220266417Abstract: A cleaning liquid supply device for supplying a cleaning device with cleaning liquid includes a chemical liquid inlet portion and a dilution water inlet portion, a first chemical liquid control unit fluidically connected to the chemical liquid inlet portion and the dilution water inlet portion, and a second chemical liquid control unit fluidically connected to the chemical liquid inlet portion and the dilution water inlet portion. The first chemical liquid control unit includes a first chemical-liquid-flow-rate control unit, a first dilution-water-flow-rate control unit, and a first mixing portion. The second chemical liquid control unit includes a second chemical-liquid-flow-rate control unit, a second dilution-water-flow-rate control unit, and a second mixing portion.Type: ApplicationFiled: May 9, 2022Publication date: August 25, 2022Inventors: Haiyang Xu, Fujihiko Toyomasu
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Publication number: 20220187856Abstract: There is provided an apparatus for supplying liquid, comprising a flow controller configured to measure a flow rate of a liquid and control the flow rate based on a measurement value; a first valve connected with the flow controller to control supply of a first liquid to the flow controller; a second valve connected with the flow controller to control supply of a second liquid to the flow controller; and a control device configured to control the first valve and the second valve, wherein the control device switches over the first valve and the second valve with providing a delay time between an open/closed switchover time of the first valve and an open/closed switchover time of the second valve.Type: ApplicationFiled: March 25, 2020Publication date: June 16, 2022Inventors: Fujihiko Toyomasu, Junji Kunisawa
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Patent number: 11358253Abstract: A cleaning liquid supply device for supplying a cleaning device with cleaning liquid includes a chemical liquid inlet portion and a dilution water inlet portion, a first chemical liquid control unit fluidically connected to the chemical liquid inlet portion and the dilution water inlet portion, and a second chemical liquid control unit fluidically connected to the chemical liquid inlet portion and the dilution water inlet portion. The first chemical liquid control unit includes a first chemical-liquid-flow-rate control unit, a first dilution-water-flow-rate control unit, and a first mixing portion. The second chemical liquid control unit includes a second chemical-liquid-flow-rate control unit, a second dilution-water-flow-rate control unit, and a second mixing portion.Type: GrantFiled: December 14, 2017Date of Patent: June 14, 2022Assignee: EBARA CORPORATIONInventors: Haiyang Xu, Fujihiko Toyomasu
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Publication number: 20220168783Abstract: A cleaning chemical liquid supply device includes: first and second mixers respectively mixing first chemical liquid with dilution water and respectively supplying to first and second nozzles respectively supplying the first chemical liquid adjusted to desired flow rates and concentrations to a first position and a second, different position of the substrate in the cleaning device; a first dilution water control box controlling flow rates of the dilution water supplied to the first and second mixers; third and fourth mixers respectively mixing second, different chemical liquid with the dilution water and respectively supplying to third and fourth nozzles for respectively supplying the second chemical liquid adjusted to desired flow rates and concentrations to a third position and a fourth, different position of the substrate in the cleaning device; and a second dilution water control box controlling flow rates of the dilution water supplied to the third and fourth mixers.Type: ApplicationFiled: November 25, 2021Publication date: June 2, 2022Applicant: EBARA CORPORATIONInventors: FUJIHIKO TOYOMASU, JUNJI KUNISAWA
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Patent number: 10926301Abstract: The present invention provides a liquid supplying device that can determine whether a CLC can be used appropriately. A liquid supplying device for supplying a liquid from a liquid source to a cleaning device is provided. The liquid supplying device includes a flow rate control device that measures a flow rate of a liquid from the liquid source and controls the flow rate based on the measured value, an IN-side pressure gauge provided between the liquid source and the flow rate control device and an OUT-side pressure gauge provided between the flow rate control device and the cleaning device.Type: GrantFiled: May 22, 2019Date of Patent: February 23, 2021Assignee: Ebara CorporationInventors: Fujihiko Toyomasu, Junji Kunisawa
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Publication number: 20200398318Abstract: To improve liquid draining of a liquid supplying device. A method for draining a liquid of a pipe of a liquid supplying device including a step for drying an inside of the pipe by circulating an inert gas in the pipe without dividing the pipe, wherein the step for drying includes a step for protecting a pressure sensor from static electricity, through a pressure sensor that has a sensor covered portion electrically connected with a housing of the liquid supplying device, the sensor covered portion is exposed to the inside of the pipe or exposed to a flow path communicating with the inside of the pipe.Type: ApplicationFiled: June 18, 2020Publication date: December 24, 2020Applicant: EBARA CORPORATIONInventors: FUJIHIKO TOYOMASU, JUNJI KUNISAWA
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Patent number: 10573509Abstract: The cleaning apparatus includes multiple kinds of cleaning modules each configured to perform a cleaning processing of a substrate, a first accommodating section configured to accommodate the multiple kinds of cleaning modules therein, and a fluid supply section configured to supply a fluid to the cleaning modules accommodated in the first accommodating section through a pipe. Each of the multiple kinds of cleaning modules includes a pipe connection portion having a common connection position to be connected with the pipe.Type: GrantFiled: June 23, 2017Date of Patent: February 25, 2020Assignee: Ebara CorporationInventors: Koji Maeda, Hiroshi Shimomoto, Kuniaki Yamaguchi, Hiroshi Aono, Tetsuya Yashima, Hidetatsu Isokawa, Kenji Shinkai, Mitsuhiko Inaba, Koichi Hashimoto, Junji Kunisawa, Mitsuru Miyazaki, Fujihiko Toyomasu
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Publication number: 20190314951Abstract: A cleaning liquid supply device for supplying a cleaning device with cleaning liquid includes a chemical liquid inlet portion and a dilution water inlet portion, a first chemical liquid control unit fluidically connected to the chemical liquid inlet portion and the dilution water inlet portion, and a second chemical liquid control unit fluidically connected to the chemical liquid inlet portion and the dilution water inlet portion. The first chemical liquid control unit includes a first chemical-liquid-flow-rate control unit, a first dilution-water-flow-rate control unit, and a first mixing portion. The second chemical liquid control unit includes a second chemical-liquid-flow-rate control unit, a second dilution-water-flow-rate control unit, and a second mixing portion.Type: ApplicationFiled: December 14, 2017Publication date: October 17, 2019Inventors: Haiyang Xu, Fujihiko Toyomasu
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Patent number: 10438818Abstract: The present invention relates to a substrate processing apparatus for processing a substrate, such as a wafer, while supplying a cleaning liquid (e.g. pure water and a liquid chemical) to the substrate, and also relates to a pipe cleaning method for the substrate processing apparatus. The substrate processing apparatus includes: a first cleaning lane including first cleaning units (52), (54) each for cleaning a substrate while supplying pure water to the substrate; a second cleaning lane including second cleaning units (60), (62) each for cleaning a substrate while supplying pure water to the substrate; a first pure-water supply pipe (120) for supplying the pure water to the first cleaning lane; and a second pure-water supply pipe (180) for supplying the pure water to the second cleaning lane.Type: GrantFiled: March 17, 2015Date of Patent: October 8, 2019Assignee: EBARA CORPORATIONInventors: Junji Kunisawa, Toru Maruyama, Masayoshi Imai, Koji Maeda, Mitsuru Miyazaki, Teruaki Hombo, Fujihiko Toyomasu
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Publication number: 20190270125Abstract: The present invention provides a liquid supplying device that can determine whether a CLC can be used appropriately. A liquid supplying device for supplying a liquid from a liquid source to a cleaning device is provided. The liquid supplying device includes a flow rate control device that measures a flow rate of a liquid from the liquid source and controls the flow rate based on the measured value, an IN-side pressure gauge provided between the liquid source and the flow rate control device and an OUT-side pressure gauge provided between the flow rate control device and the cleaning device.Type: ApplicationFiled: May 22, 2019Publication date: September 5, 2019Applicant: Ebara CorporationInventors: Fujihiko TOYOMASU, Junji KUNISAWA
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Patent number: 10373845Abstract: A substrate cleaning apparatus includes: a pure water supply line provided with a pure water flow regulator and a pure water supply valve; chemical supply lines each provided with a chemical flow regulator and a chemical supply valve; a merging line where pure water and a plurality of liquid chemicals meet to form a cleaning liquid; a cleaning liquid supply line configured to supply the cleaning liquid to a substrate; and a controller configured to control the pure water flow regulator, the pure water supply valve, the chemical flow regulators, and the chemical supply valves such that the pure water and the plurality of liquid chemicals are present at a predetermined ratio at a meeting point.Type: GrantFiled: November 14, 2013Date of Patent: August 6, 2019Assignee: EBARA CORPORATIONInventors: Fujihiko Toyomasu, Toru Maruyama, Mitsunori Komatsu
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Patent number: 10343192Abstract: The present invention provides a liquid supplying device that can determine whether a CLC can be used appropriately. A liquid supplying device for supplying a liquid from a liquid source to a cleaning device is provided. The liquid supplying device includes a flow rate control device that measures a flow rate of a liquid from the liquid source and controls the flow rate based on the measured value, an IN-side pressure gauge provided between the liquid source and the flow rate control device and an OUT-side pressure gauge provided between the flow rate control device and the cleaning device.Type: GrantFiled: April 2, 2018Date of Patent: July 9, 2019Assignee: Ebara CorporationInventors: Fujihiko Toyomasu, Junji Kunisawa
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Patent number: 10340159Abstract: A cleaning chemical supplying device, a cleaning chemical supplying method, and a cleaning unit capable of flexibly handling a change of a dilution ratio and suppression of an increase of a device size are provided. A cleaning chemical supplying device has a first in-line mixer, a second in-line mixer, a first chemical CLC box, a second chemical CLC box, and a DIWCLC box.Type: GrantFiled: June 4, 2015Date of Patent: July 2, 2019Assignee: EBARA CORPORATIONInventors: Fujihiko Toyomasu, Toru Maruyama, Junji Kunisawa
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Publication number: 20180281026Abstract: The present invention provides a liquid supplying device that can determine whether a CLC can be used appropriately. A liquid supplying device for supplying a liquid from a liquid source to a cleaning device is provided. The liquid supplying device includes a flow rate control device that measures a flow rate of a liquid from the liquid source and controls the flow rate based on the measured value, an IN-side pressure gauge provided between the liquid source and the flow rate control device and an OUT-side pressure gauge provided between the flow rate control device and the cleaning device.Type: ApplicationFiled: April 2, 2018Publication date: October 4, 2018Applicant: Ebara CorporationInventors: Fujihiko TOYOMASU, Junji KUNISAWA
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Publication number: 20170372893Abstract: The cleaning apparatus includes multiple kinds of cleaning modules each configured to perform a cleaning processing of a substrate, a first accommodating section configured to accommodate the multiple kinds of cleaning modules therein, and a fluid supply section configured to supply a fluid to the cleaning modules accommodated in the first accommodating section through a pipe. Each of the multiple kinds of cleaning modules includes a pipe connection portion having a common connection position to be connected with the pipe.Type: ApplicationFiled: June 23, 2017Publication date: December 28, 2017Inventors: Koji Maeda, Hiroshi Shimomoto, Kuniaki Yamaguchi, Hiroshi Aono, Tetsuya Yashima, Hidetatsu Isokawa, Kenji Shinkai, Mitsuhiko Inaba, Koichi Hashimoto, Junji Kunisawa, Mitsuru Miyazaki, Fujihiko Toyomasu
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Publication number: 20170117165Abstract: The present invention relates to a substrate processing apparatus for processing a substrate, such as a wafer, while supplying a cleaning liquid (e.g. pure water and a liquid chemical) to the substrate, and also relates to a pipe cleaning method for the substrate processing apparatus. The substrate processing apparatus includes: a first cleaning lane including first cleaning units (52), (54) each for cleaning a substrate while supplying pure water to the substrate; a second cleaning lane including second cleaning units (60), (62) each for cleaning a substrate while supplying pure water to the substrate; a first pure-water supply pipe (120) for supplying the pure water to the first cleaning lane; and a second pure-water supply pipe (180) for supplying the pure water to the second cleaning lane.Type: ApplicationFiled: March 17, 2015Publication date: April 27, 2017Inventors: Junji KUNISAWA, Toru MARUYAMA, Masayoshi IMAI, Koji MAEDA, Mitsuru MIYAZAKI, Teruaki HOMBO, Fujihiko TOYOMASU
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Publication number: 20150357208Abstract: A cleaning chemical supplying device, a cleaning chemical supplying method, and a cleaning unit capable of flexibly handling a change of a dilution ratio and suppression of an increase of a device size are provided.Type: ApplicationFiled: June 4, 2015Publication date: December 10, 2015Inventors: Fujihiko TOYOMASU, Toru MARUYAMA, Junji KUNISAWA
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Publication number: 20140216505Abstract: A substrate cleaning apparatus includes: a pure water supply line provided with a pure water flow regulator and a pure water supply valve; chemical supply lines each provided with a chemical flow regulator and a chemical supply valve; a merging line where pure water and a plurality of liquid chemicals meet to form a cleaning liquid; a cleaning liquid supply line configured to supply the cleaning liquid to a substrate; and a controller configured to control the pure water flow regulator, the pure water supply valve, the chemical flow regulators, and the chemical supply valves such that the pure water and the plurality of liquid chemicals are present at a predetermined ratio at a meeting point.Type: ApplicationFiled: November 14, 2013Publication date: August 7, 2014Inventors: Fujihiko TOYOMASU, Toru MARUYAMA, Mitsunori KOMATSU