Patents by Inventor Fujio Murai

Fujio Murai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Probe apparatus manufacturing method thereof and substrate inspecting method using the same
    Patent number: 6859053
    Abstract: In a probe apparatus comprising an inspecting device, an intermediate substrate and a probe substrate, in which the inspecting device is electrically connected to a proximal end of the intermediate substrate, and the intermediate substrate has a distal end electrically connected to a proximal end of the probe substrate, and the probe substrate has a distal end electrically connectable to a substrate under inspection, a plurality of probe substrates are electrically connected to the single intermediate substrate. When a particular probe substrate 4 is damaged, only the particular probe substrate 4 may be changed, the other probe substrates 4 continuing to be used, thereby achieving economy.
    Type: Grant
    Filed: November 13, 2000
    Date of Patent: February 22, 2005
    Assignee: Toray Engineering Co., Ltd.
    Inventors: Kenji Sato, Hiromitu Wada, Fujio Murai, Koichi Mimura, Masanori Akita