Abstract: A head holder includes a first and second blocks connected each other with a predetermined gap between the blocks by a flexible coupling portion. The second block supports the first block swingably by increasing a width of either one of spaces of the predetermined gap on opposite sides of the coupling portion and narrowing the other space by bending the coupling portion by a piezo actuator. A magnetic head is dynamically moved in a direction crossing a track by swinging a head assembly fixed to the first block.

Abstract: In the present invention, through a provision of a relay stand including a first relaying point, a second relaying point and a plurality of work mounting bases, a discharge/feed process of works between the relay stand and the work feed container and the work accommodation container is performed at the first relaying point and a load/unload process of works between the relay stand and the plurality of work inspection machines is performed at the second relaying point.

Abstract: A disk chucking mechanism constructed with first, second and third link members forms a slider crank mechanism and the third link member is rotated by a drive of a forward/rearward actuator such as an air cylinder and chucking nails are provided which protrude perpendicularly to a longitudinal direction of the first or second link member. A rotation of the chucking nail protruded perpendicularly is stopped by engagement with a disk and a spring member is bent by further forward or rearward movement of the second link member to energize a first chucking nail in a direction for maintaining an engagement with the disk. The disk is chucked with a predetermined force by only the drive of the forward/rearward actuator.

Abstract: In the present invention, through a provision of a relay stand including a first relaying point, a second relaying point and a plurality of work mounting bases, a discharge/feed process of works between the relay stand and the work feed container and the work accommodation container is performed at the first relaying point and a load/unload process of works between the relay stand and the plurality of work inspection machines is performed at the second relaying point.

Abstract: A link mechanism constructed with a first, second and third link members forms a slider crank mechanism and the third link member is rotated by a drive of a forward/rearward actuator such as an air cylinder and chucking nails provided in them are protruded perpendicularly to a longitudinal direction of the first or second link member. A rotation of the chucking nail protruded perpendicularly is stopped by engaging with a disk and a spring member is bent by further forward or rearward movement of the second link member to energize the first chucking nail in a direction for maintaining an engagement with the disk. Thus, it becomes possible to chuck the disk with a predetermined force by only drive of the forward/rearward actuator.

Abstract: A head holder includes a first and second blocks connected each other with a predetermined gap between the blocks by a flexible coupling portion. The second block supports the first block swingably by increasing a width of either one of spaces of the predetermined gap on opposite sides of the coupling portion and narrowing the other space by bending the coupling portion by a piezo actuator. A magnetic head is dynamically moved in a direction crossing a track by swinging a head assembly fixed to the first block.

Abstract: Pressing means is provided to press a movable base to a surface of a reference base to make the movable base in contact with the surface of the reference base to thereby lock-down the movable base on the surface of the reference base. The movable base is moved while slightly floating with respect to the reference base. A movable floating mechanism is provided to float the movable base from the reference base against pressing force of the pressing means exerted on the movable base to thereby relieve the locking. A floating amount of the movable base from the reference base may be small enough to reduce or substantially remove sliding friction between the movable base and the reference base. For example, the floating amount may be as small as ten to several hundreds microns.

Abstract: An XY stage includes a movable frame having a rectangular space inside thereof and movable on a reference base along one of X and Y axes, a first drive source provided in the reference base for moving the movable frame, a rectangular movable base mounted in the rectangular space of the movable frame, which is movable on the reference base along the other of the X and Y axes and stopped on the reference base, and a second drive source provided in the movable frame, for moving the movable base.

Abstract: An XY stage includes a movable frame having a rectangular space inside thereof and movable on a reference base along one of X and Y axes, a first drive source provided in the reference base for moving the movable frame, a rectangular movable base mounted in the rectangular space of the movable frame, which is movable on the reference base along the other of the X and Y axes and stopped on the reference base, and a second drive source provided in the movable frame, for moving the movable base.

Abstract: Pressing means is provided to press a movable base to a surface of a reference base to make the movable base in contact with the surface of the reference base to thereby lock-down the movable base on the surface of the reference base. The movable base is moved while slightly floating with respect to the reference base. A movable floating mechanism is provided to float the movable base from the reference base against pressing force of the pressing means exerted on the movable base to thereby relieve the locking. A floating amount of the movable base from the reference base may be small enough to reduce or substantially remove sliding friction between the movable base and the reference base. For example, the floating amount may be as small as ten to several hundreds microns.