Abstract: An imprint apparatus cures an imprint material supplied onto a substrate held by a substrate holder by bringing a mold held by a mold holder into contact with the imprint material. The imprint apparatus includes an adjuster to adjust a distance between the substrate holder and the mold holder for contact and separation between the imprint material and the mold, an energy supply tool to supply, to the imprint material, energy for curing the imprint material supplied onto the substrate held by the substrate holder, and a controller to control the adjuster and the energy supply tool. The controller controls the adjuster so as to start separation between the imprint material and the mold in a period during which the energy supply tool supplies the energy to the imprint material that is in contact with the mold.

Abstract: An imprint device that can simply detect an abnormality such as dirt of a mold chuck is provided. The imprint device includes a holding mechanism configured to hold a mold, a mold shape correcting mechanism configured to modify a shape of the mold, a mold shape measuring unit configured to measure the shape of the mold, and a determination unit configured to determine whether there is dirt on a mold holding surface of the holding mechanism or the mold based on mold modification characteristics which are measured by the mold shape measuring unit with respect to target mold modification values in the mold shape correcting mechanism.

Abstract: An imprint apparatus cures an imprint material supplied onto a substrate held by a substrate holder by bringing a mold held by a mold holder into contact with the imprint material. The imprint apparatus includes an adjuster to adjust a distance between the substrate holder and the mold holder for contact and separation between the imprint material and the mold, an energy supply tool to supply, to the imprint material, energy for curing the imprint material supplied onto the substrate held by the substrate holder, and a controller to control the adjuster and the energy supply tool. The controller controls the adjuster so as to start separation between the imprint material and the mold in a period during which the energy supply tool supplies the energy to the imprint material that is in contact with the mold.

Abstract: A positioning apparatus for positioning a substrate. The positioning apparatus includes a setting system which selectively sets one of a center of the substrate and a specific portion of an edge of the substrate as a positioning reference in accordance with information inputted to the positioning apparatus, and a positioning system which positions the substrate based on a position of the positioning reference set by the setting system.

Abstract: A positioning apparatus for positioning a substrate is disclosed. The apparatus includes a setting system which sets a positioning reference as a portion of the substrate, and a positioning system which positions the substrate based on a position of the positioning reference set by the setting system.

Abstract: An apparatus for fabricating a device includes a stage for holding a substrate to be treated, a hand for carrying the substrate to the stage, and a mark detecting system for detecting a mark formed on the substrate, before the substrate is transferred to the stage, in order to roughly position the substrate. The hand is provided with a reference mark which can be detected by the mark detecting system, and the mark detecting system detects a mark of the substrate and the reference mark of the hand. Also, the hand can carry the substrate to the stage after rotating the stage in a rotational direction in response to a value detected by the mark detecting system.