Abstract: This image acquisition apparatus includes a bottom surface position detection apparatus, and acquires an image of biological cells disposed in wells of a vessel. The bottom surface position detection apparatus includes a holder, a light irradiator, a detector, and a controller. The holder horizontally holds a vessel. The light irradiator irradiates a bottom portion of the vessel with a light beam. The detector detects a first reflected light beam reflected from a first bottom surface that is a bottom surface of the vessel and a second reflected light beam reflected from a second bottom surface that is a bottom surface of the wells. The controller calculates the position of the second bottom surface, based on a first peak position of the first reflected light beam and a second peak position of the second reflected light beam both detected by the detector.

Abstract: A drawing method is to draw a pattern on a substrate. First, cumulative exposure amount distribution data containing a cumulative exposure amount to be applied to each position on the substrate is read. Next, a region R11 and a region R12 on the substrate are specified based on the cumulative exposure amount distribution data. The region R11 is a region where the cumulative exposure amount does not exceed Ma corresponding to a maximum exposure amount capable of being applied to the substrate in one exposure scanning by an exposure apparatus. The region R22 is a region where the cumulative exposure amount exceeds Ma. Then, pattern data containing information about an exposure amount for each position in a region including the region R11 is generated. Further, pattern data containing information about an exposure amount for each position in a region including the region R12 is generated.