Abstract: A vacuum processor includes: a chamber; a pump which keeps the inside of the chamber in a vacuum state by; a connection part which connects the chamber with the pump and is formed with a gas passage therein. An inner wall of the connection part is provided with a capturing part capturing particles in the passage. The capturing part has a fibrous substance facing the passage and disposed along the passage. The fibrous substance is provided to capture particles. A peripheral part of the woven cloth of the fibrous substance is folded to a back side of the unwoven cloth and the front end of the peripheral part of the woven cloth is interfolded to the back side of the unwoven cloth.

Abstract: In an internal combustion engine having an exhaust gas recirculation circuit, the efficiency of a turbocharger is raised in a wide engine rotational speed area and, even when a pressure in an intake circuit is higher than that in an exhaust circuit, an exhaust gas can be circulated. For this purpose, an openable intake throttle valve (12e) is provided on the more upstream side than an exhaust gas circulation position of the intake circuit (12), or a narrow portion (12b) is formed on the exhaust gas circulation position of the intake circuit and an intake bypass circuit (12c) for bypassing the narrow portion is provided. Further, an intake and exhaust bypass circuit (20) for connecting the intake circuit to the exhaust circuit (16) is provided.

Abstract: In an internal combustion engine having an exhaust gas recirculation circuit, the efficiency of a turbocharger is raised in a wide engine rotational speed area and, even when a pressure in an intake circuit is higher than that in an exhaust circuit, an exhaust gas can be circulated. For this purpose, an openable intake throttle valve (12e) is provided on the more upstream side than an exhaust gas circulation position of the intake circuit (12), or a narrow portion (12b) is formed on the exhaust gas circulation position of the intake circuit and an intake bypass circuit (12c) for bypassing the narrow portion is provided. Further, an intake and exhaust bypass circuit (20) for connecting the intake circuit to the exhaust circuit (16) is provided.

Abstract: In an internal combustion engine having an exhaust gas recirculation circuit, the efficiency of a turbocharger is raised in a wide engine rotational speed area and, even when a pressure in an intake circuit is higher than that in an exhaust circuit, an exhaust gas can be circulated. For this purpose, an openable intake throttle valve (12e) is provided on the more upstream side than an exhaust gas circulation position of the intake circuit (12), or a narrow portion (12b) is formed on the exhaust gas circulation position of the intake circuit and an intake bypass circuit (12c) for bypassing the narrow portion is provided. Further, an intake and exhaust bypass circuit (20) for connecting the intake circuit to the exhaust circuit (16) is provided.

Abstract: A life estimation device which numerically measures the damage to a machine such as an engine accurately to estimate, the life of the machine accurately without requiring skill. A load map (B) of the two-dimensional distribution of the operation parameters of an engine is made. In accordance with the weighted integration time &agr;i·ki at each level (Bi) of the load map (B), the actual damage &dgr;=&Sgr;&agr;i·ki to the engine for a certain lapse of time &tgr; is calculated. By operating the engine beforehand, a correspondence relation L2 between the magnitude of the damage &dgr; and the life H is predetermined. The life H1 corresponding to the calculated actual damage &dgr;1 is determined in accordance with the predetermined correspondence relation L2 and the H1 is outputted as the estimated life of the engine.

Abstract: A Roots blower driven by a direct-current motor provided to a recirculation duct for connecting an exhaust duct and an intake duct to extract a part of exhaust gas of a diesel engine to recirculate to an intake side. Accordingly, even when a differential pressure between an exhaust side and the intake side, or even when a pressure on the intake side is higher than the exhaust side fluctuates, the exhaust gas flowing to the recirculation duct can be forcibly pumped by the Roots blower while appropriately controlling flow rate thereof, so that an optimum recirculation amount of exhaust gas in accordance with operation condition of the diesel engine can be recirculated to the intake side.

Abstract: In a method of manufacturing a semiconductor device in which a capacitor having a storage electrode is formed on a semiconductor substrate, silicon films are formed on the semiconductor substrate and at the same time first and second endpoint marker layers for dividing the silicon films into three parts in the direction of thickness are formed by using a material different from the material of the silicon films. The silicon films including the first and second endpoint marker layers are etched. The etching depth of the silicon films is controlled based on the type of etched material, thereby forming the storage electrode.

Abstract: An apparatus and method for predicting a lubricating oil replacement time for an engine by precisely predicting a total acid value and/or an amount of soot in a lubricating oil and by displaying an accurate time which will elapse before a required lubricating oil replacement. Accurate prediction of lubricating oil replacement prevents engine seizing and other damage and avoids wasteful replacement of otherwise useful lubricating oil.

Abstract: In order to cyclically implement isotropical and anisotropical etching of an interlayer insulator provided in a semiconductor wafer, two variable capacitors are provided for applying RF bias (power) to a triode type dry etching apparatus. The two variable capacitors are controlled such that cyclically, as one of the two capacitors exhibits maximum capacitance thereof, the other capacitor exhibits minimum capacitance thereof. As an alternative to the above, a wafer supporting table provided in a reactive chamber of an electron cyclotron resonance type apparatus, is cyclically supplied with a radio frequency (RF) bias and the ground potential. This cyclic application of the RF bias and the ground potential is controlled by a combination of a pulse generator and an amplitude modulation circuit both coupled to an RF signal generator. The via hole is effectively formed using the cyclic operations of the isotropic and anisotropic etching.

Abstract: In order to cyclically implement isotropical and anisotropical etching of an interlayer insulator provided in a semiconductor wafer, two variable capacitors are provided for applying RF bias (power) to a triode type dry etching apparatus. The two variable capacitors are controlled such that cyclically, as one of the two capacitors exhibits maximum capacitance thereof, the other capacitor exhibits minimum capacitance thereof. As an alternative to the above, a wafer supporting table provided in a reactive chamber of an electron cyclotron resonance type apparatus, is cyclically supplied with a radio frequency (RF) bias and the ground potential. This cyclic application of the RF bias and the ground potential is controlled by a combination of a pulse generator and an amplitude modulation circuit both coupled to an RF signal generator. The via hole is effectively formed using the cyclic operations of the isotropic and anisotropic etching.

Abstract: Disclosed is an improved method of leveling the laminated surface of a semiconductor substrate, which method permits the exact controlling of the etching of the lamination on the semiconductor substrate by detecting the sudden change of the amount of the gas resulting from the chemical reaction of the materials of the different layers with particular selected elements of surrounding plasma gas, thus assuring the reproducibility of leveled semiconductor substrate surface.

Abstract: A sea water cooling apparatus for a marine diesel engine with a supercharger is provided with a thermostat to recycle at least part of the cooling water through a first bypass line to the inlet of the sea water pump until the warming up operation has been accomplished. A second bypass line containing a valve is provided between the inlet of the thermostat and the water outlet to the sea, in order to achieve a satisfactory large output if a rapid accelerating operation is performed after the warming up operation has been performed or in case of an operation under a large load. The valve in the second bypass line can be operated responsive to the sea water pump discharge pressure, or the discharge pressure of the supercharger, and/or the engine revolution speed. A fuel cooler can be included in the outlet conduit of the sea water pump, with the fuel cooler, the engine and a fuel tank being connected to one another by fuel conduits.

Abstract: A method of imaging an object by the ultrasonic or electromagnetic wave by mechanically or electronically scanning the ultrasonic or electromagnetic wave transmitting/receiving system to transmit the ultrasonic or electromagnetic wave beam spreading in space of the object and using the trace (TOF locus) from the transmission to the reception while receiving the reflected wave from the object, and sequentially reproducing the line image at the central line of the synthetic aperture range using the received signal group from the scanning points in the synthetic aperture range to sequentially image the area to be imaged while scanning the ultrasonic or electromagnetic wave transmitting/receiving system. An imaging apparatus applied with the method has a relatively simple hardware structure for reproducing the image and is also able to perform the operation in real time.

Abstract: A fuel injection timing control apparatus is disclosed, which comprises a fuel injection timing control mechanism including an input and an output shaft respectively with a first and a fourth gear, at least one of these gears being a helical gear, and an axially movable shaft with a second and a third gear respectively in mesh with the first and fourth gears, a piston-cylinder assembly with a piston rod coupled to the axially movable shaft, and a piston-cylinder assembly control mechanism having detector means for detecting the phases of the first and fourth gears. The phase relation between the first and fourth gears is varied with displacement of the second and third gears caused through control of the piston-cylinder assembly according to the difference between a reference phase angle and a detected phase angle.

Abstract: A fuel injection system for an internal combustion engine employing a rotary valve for delivering fuel to fuel injectors in which fuel injection timing is precisely controlled to an optimum range by automatically controlling the rotary valve in response to the number of revolutions of the engine. The system includes a high pressure accumulator connected to a fuel pump and a low pressure accumulator connected to a tank through a variable restrictor valve. The rotary valve functions to selectively connect each injector to the high and low pressure accumulators as it rotates whereby metered amount of fuel can be fed into a plunger chamber of each injector when a piston chamber of the injector is connected to the low pressure accumulator and the fuel can be injected through nozzle orifices when the piston chamber is connected to the high pressure accumulator.