Patents by Inventor FUMIHIKO HAKODA

FUMIHIKO HAKODA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • X-ray apparatus and structure manufacturing method
    Patent number: 9953799
    Abstract: Provided is an X-ray apparatus including: a target configured to generate an X-ray by collision of electrons or transmission of electrons; a filament configured to release the electrons to the target; a housing that has the filament therein; and a first holding member configured to hold a portion of the target disposed on an outer side of the housing on the outer side of the housing.
    Type: Grant
    Filed: March 25, 2015
    Date of Patent: April 24, 2018
    Assignees: NIKON CORPORATION, NIKON METROLOGY NV
    Inventors: Fumihiko Hakoda, Satoshi Takahashi, Jim Smith
  • X-RAY APPARATUS AND STRUCTURE MANUFACTURING METHOD
    Publication number: 20150294832
    Abstract: Provided is an X-ray apparatus including: a target configured to generate an X-ray by collision of electrons or transmission of electrons; a filament configured to release the electrons to the target; a housing that has the filament therein; and a first holding member configured to hold a portion of the target disposed on an outer side of the housing on the outer side of the housing.
    Type: Application
    Filed: March 25, 2015
    Publication date: October 15, 2015
    Inventors: FUMIHIKO HAKODA, Satoshi Takahashi, Jim Smith