Abstract: A light source unit includes: elemental light sources each including light emitting elements and drive circuits; an integrated control circuit that controls the drive circuits; and band optical characteristic acquisition sections that receive light of an amount correlated with a total light amount of output luminous fluxes to acquire light emitting intensity indicating values and wavelength deviation indicating values. The integrated control circuit at least intermittently acquires band optical characteristic acquisition data to generate the light emitting intensity indicating values and the wavelength deviation indicating values.

Abstract: A light source unit includes: elemental light sources each including light emitting elements and drive circuits; an integrated control circuit that controls the drive circuits; and band optical characteristic acquisition sections that receive light of an amount correlated with a total light amount of output luminous fluxes to acquire light emitting intensity indicating values and wavelength deviation indicating values. The integrated control circuit at least intermittently acquires band optical characteristic acquisition data to generate the light emitting intensity indicating values and the wavelength deviation indicating values.

Abstract: A light source apparatus comprises a beam flux conversion optical system for making all the light emitting areas conjugate to one geometrical-optical output image, all the solid light emitting elements being in series connected to each other and fixed to a heat sink to be insulated to one another, circuits on the input and output sides of an electric supply circuit being not insulated, the electric supply circuit including an interface circuit for receiving a modulation amount specifying signal from a host circuit, wherein a ratio of ON time to a switching cycle of the switch element is controlled in a feedback manner so that a difference between current values indicated by the output current signal and a target current signal may become small, and the interface circuit generating analog quantity correlated to the amount of modulation specified by a modulation amount specifying signal through a data insulation transmission unit.

Abstract: The light source device is provided with a plurality of light emitting elements including light emitting elements whose emission wavelength belongs to a plurality of types of different wavelength bands, band light characteristics acquisition means generating band light characteristics acquisition data for each wavelength band, and an integrating control circuit generating a color phase instruction value and performing feedback control of a drive circuit of the light emitting element such that a difference between the color phase instruction value and the target value thereof is reduced. The integrating control circuit obtains, through an interface section, color phase correlation data correlated with a color phase instruction value with respect to the result of applying the output luminous flux to an external apparatus using the light source device and updates a target value of the color phase instruction value with the use of the color phase correlation data.

Abstract: To avoid accelerated progression of deterioration of a semiconductor laser, an LED, and the like to extend their lives while adjusting a balance of a plurality of colors, such as R, G, and B, by feedback control, a deterioration controllable monochromatic light source module is configured to: calculate a substantial upper limit Iu, determine an operation coefficient hx based on a deterioration coefficient dx, perform feedback control of the output current Ix of each drive circuit, and output a light intensity detection signal to the outside. An integrating control circuit calculates a monochromatic light intensity sum ? by a sum of light intensity detection signals from the monochromatic light source modules belonging to the same wavelength band and determines a light intensity target signal so that a ratio of the monochromatic light intensity sum ? to the monochromatic light source modules in different wavelength bands is a predetermined ratio.

Abstract: To avoid accelerated progression of deterioration of a semiconductor laser, an LED, and the like to extend their lives while adjusting a balance of a plurality of colors, such as R, G, and B, by feedback control, a deterioration controllable monochromatic light source module is configured to: calculate a substantial upper limit Iu, determine an operation coefficient hx based on a deterioration coefficient dx, perform feedback control of the output current Ix of each drive circuit, and output a light intensity detection signal to the outside. An integrating control circuit calculates a monochromatic light intensity sum ? by a sum of light intensity detection signals from the monochromatic light source modules belonging to the same wavelength band and determines a light intensity target signal so that a ratio of the monochromatic light intensity sum ? to the monochromatic light source modules in different wavelength bands is a predetermined ratio.

Abstract: A light source apparatus comprises a beam flux conversion optical system for making all the light emitting areas conjugate to one geometrical-optical output image, all the solid light emitting elements being in series connected to each other and fixed to a heat sink to be insulated to one another, circuits on the input and output sides of an electric supply circuit being not insulated, the electric supply circuit including an interface circuit for receiving a modulation amount specifying signal from a host circuit, wherein a ratio of ON time to a switching cycle of the switch element is controlled in a feedback manner so that a difference between current values indicated by the output current signal and a target current signal may become small, and the interface circuit generating analog quantity correlated to the amount of modulation specified by a modulation amount specifying signal through a data insulation transmission unit.

Abstract: In an excimer lamp, rare gas and fluorine are enclosed inside a translucent ceramics arc tube. External electrodes are formed on an outer surface of the arc tube. A condition of 2.5+0.5 log(CF)?G?14?4 log(CF) is satisfied in the case of 0.1?CF?10, wherein G (mm) is a discharge gap in the arc tube and CF (%) is molar concentration of the fluorine.

Abstract: In an excimer lamp, rare gas and fluorine are enclosed inside a translucent ceramics arc tube. External electrodes are formed on an outer surface of the arc tube. A condition of 2.5+0.5 log(CF)?G?14?4 log(CF) is satisfied in the case of 0.1?CF?10, wherein G (mm) is a discharge gap in the arc tube and CF (%) is molar concentration of the fluorine.

Abstract: An excimer lamp that has an arc tube in which a seal structure is formed using a metal brazing material, which is composed of gold or a gold-nickel alloy, at an end portion of a transparent ceramic pipe that encloses a gas containing rare gas and fluorine atoms and a pair of electrodes arranged outside the arc tube.

Abstract: A excimer lamp comprises an electric discharge container in which a sealing member is provided between a lid member and an arc tube which does not contain silica, and a pair of external electrodes which are separately provided on an outer surface of the arc tube, wherein rare gas and a fluoride is enclosed in the electric discharge container, and the fluoride is sulfur hexafluoride, carbon tetrafluoride, or nitrogen trifluoride.

Abstract: A excimer lamp comprises an electric discharge container in which a sealing member is provided between a lid member and an arc tube which does not contain silica, and a pair of external electrodes which are separately provided on an outer surface of the arc tube, wherein rare gas and a fluoride is enclosed in the electric discharge container, and the fluoride is sulfur hexafluoride, carbon tetrafluoride, or nitrogen trifluoride.

Abstract: Provided is a surface-treating apparatus making use of a neutral particle beam, by which a high-quality surface treatment is fundamentally conducted, and a high surface treatment rate is achieved. The surface-treating apparatus serves to conduct a surface treatment of an object to be treated, which is arranged in a vacuum treatment chamber, by a neutral particle beam, and is equipped with a light source for irradiating the object to be treated with light. In the surface-treating apparatus, the light applied to the object to be treated is preferably light including rays having a wavelength of 380 nm or shorter. An illuminance of the rays having a wavelength of 380 nm or shorter on the surface to be treated of the object to be treated is preferably 7 mW/cm2 or higher. The light source is preferably a xenon flash lamp, and an illuminance of the light on the surface to be treated of the object to be treated is preferably 20 mW/cm2 or higher.