Abstract: A profile measuring machine is for measuring a profile of a workpiece having a plurality of known-profile portions and a plurality of unknown-profile portions, the known-profile portions being cyclically arranged via the respective unknown-profile portions. The profile measuring machine includes: a scanning probe having a contact piece capable of being in contact with the workpiece; a drive mechanism for moving the scanning probe; an autonomous scanning measurement unit for controlling the drive mechanism to perform the autonomous scanning measurement; a measurement-path calculator for calculating a movement path of the scanning probe; and a nominal-value scanning measurement unit for controlling the drive mechanism to move the scanning probe along the movement path to perform a nominal-value scanning measurement.

Abstract: A profile measuring machine is for measuring a profile of a workpiece having a plurality of known-profile portions and a plurality of unknown-profile portions, the known-profile portions being cyclically arranged via the respective unknown-profile portions. The profile measuring machine includes: a scanning probe having a contact piece capable of being in contact with the workpiece; a drive mechanism for moving the scanning probe; an autonomous scanning measurement unit for controlling the drive mechanism to perform the autonomous scanning measurement; a measurement-path calculator for calculating a movement path of the scanning probe; and a nominal-value scanning measurement unit for controlling the drive mechanism to move the scanning probe along the movement path to perform a nominal-value scanning measurement.

Abstract: A hardness tester enabling a user to form an indentation in a desired test position, capable of performing an accurate hardness test even when center positions of an indenter and a field lens are offset. The hardness tester includes an XY stage displacing a sample stage in a horizontal direction; a CCD camera capturing images of a sample surface via a field lens; a monitor displaying the images; a turret capable of selectively positioning the indenter or the field lens in a predetermined position opposite the sample; a memory storing an amount of horizontal direction offset between the center positions of the indenter and the field lens when positioned in the predetermined position; and a CPU displaying, based on the amount of offset stored in the memory, a mark indicating the center position of the indenter on the monitor when the field lens is positioned in the predetermined position.

Abstract: A hardness tester capable of facilitating positioning of a sample even when the hardness tester includes a manual XY stage. The hardness tester includes an XY stage displacing a sample stage in a horizontal direction; a CCD camera capturing an image of a sample surface via an objective lens; a monitor displaying the image of the sample surface captured by the CCD camera; an operator specifying a test position at which an indentation is to be formed, the test position being specified on the image displayed on the display; and a CPU calculating, in conjunction with displacement of the XY stage, an amount of offset in the XY direction between the test position and a center position of the indenter when forming the indentation, then displaying the calculated amount of offset on the display.

Abstract: An offset amount calibrating method that obtains the offset amount between a contact-type detector and an image probe for a surface profile measuring machine is provided. The method includes: setting on a stage a calibration jig that has a surface being provided with a lattice pattern with a level difference; measuring the lattice pattern of the calibration jig by the contact-type detector to obtain a first reference position of the lattice pattern; capturing the image of the lattice pattern of the calibration jig by the image probe to obtain a second reference position of the lattice pattern; and obtaining the offset amount from a difference between the first and second reference positions.

Abstract: A surface texture measuring machine includes: a stage, a contact-type detector having a stylus, an image probe, a relative movement mechanism and a controller. The controller includes: a center position calculating unit that, when the image probe enters position data of at least three points on a circular contour of a circular concave portion or a circular convex portion of an object, approximates the entered position data to a circle to obtain a center position of the circle; and a stylus setting unit that, after calculating the center position, operates the relative movement mechanism to position the stylus of the contact-type detector at the center position.

Abstract: A hardness tester includes a monitor capable of displaying a main screen and an assistant screen; a first test location setter setting an indentation formation location on a test specimen for an initial test; and a second test location setter setting an indentation formation location on the test specimen for a retest. The second test location setter judges whether a new indentation formation location is suitable for a test based on a surface image of the test specimen and a setting condition obtained during the initial test, and, in a case where it is judged that the new indentation formation location is unsuitable for a test, sets again a coordinate point different from the coordinate point of the new indentation formation location as another new indentation formation location.

Abstract: A hardness tester includes a monitor capable of displaying a main screen and assistant screen. A first test location setter sets a coordinate point of an indentation formation location, and stores a setting condition of the set coordinate point and the surface image of a first test specimen. A second test location setter displays the surface image of the first test specimen in the assistant screen when a surface image of a second test specimen is displayed on the main screen, and, when a reference coordinate is set on the surface image of the second test specimen, determines a coordinate point of an indentation formation location based on the set reference coordinate and the setting condition of the coordinate point stored by the first test location setter.

Abstract: A hardness tester enabling a user to form an indentation in a desired test position, capable of performing an accurate hardness test even when center positions of an indenter and a field lens are offset. The hardness tester includes an XY stage displacing a sample stage in a horizontal direction; a CCD camera capturing images of a sample surface via a field lens; a monitor displaying the images; a turret capable of selectively positioning the indenter or the field lens in a predetermined position opposite the sample; a memory storing an amount of horizontal direction offset between the center positions of the indenter and the field lens when positioned in the predetermined position; and a CPU displaying, based on the amount of offset stored in the memory, a mark indicating the center position of the indenter on the monitor when the field lens is positioned in the predetermined position.

Abstract: A hardness tester capable of facilitating positioning of a sample even when the hardness tester includes a manual XY stage. The hardness tester includes an XY stage displacing a sample stage in a horizontal direction; a CCD camera capturing an image of a sample surface via an objective lens; a monitor displaying the image of the sample surface captured by the CCD camera; an operator specifying a test position at which an indentation is to be formed, the test position being specified on the image displayed on the display; and a CPU calculating, in conjunction with displacement of the XY stage, an amount of offset in the XY direction between the test position and a center position of the indenter when forming the indentation, then displaying the calculated amount of offset on the display.

Abstract: A hardness tester includes a monitor capable of displaying a main screen and assistant screen. A first test location setter sets a coordinate point of an indentation formation location, and stores a setting condition of the set coordinate point and the surface image of a first test specimen. A second test location setter displays the surface image of the first test specimen in the assistant screen when a surface image of a second test specimen is displayed on the main screen, and, when a reference coordinate is set on the surface image of the second test specimen, determines a coordinate point of an indentation formation location based on the set reference coordinate and the setting condition of the coordinate point stored by the first test location setter.

Abstract: A hardness tester includes a monitor capable of displaying a main screen and an assistant screen; a first test location setter setting an indentation formation location on a test specimen for an initial test; and a second test location setter setting an indentation formation location on the test specimen for a retest. The second test location setter judges whether a new indentation formation location is suitable for a test based on a surface image of the test specimen and a setting condition obtained during the initial test, and, in a case where it is judged that the new indentation formation location is unsuitable for a test, sets again a coordinate point different from the coordinate point of the new indentation formation location as another new indentation formation location.

Abstract: An offset amount calibrating method that obtains the offset amount between a contact-type detector and an image probe for a surface profile measuring machine is provided. The method includes: setting on a stage a calibration jig that has a surface being provided with a lattice pattern with a level difference; measuring the lattice pattern of the calibration jig by the contact-type detector to obtain a first reference position of the lattice pattern; capturing the image of the lattice pattern of the calibration jig by the image probe to obtain a second reference position of the lattice pattern; and obtaining the offset amount from a difference between the first and second reference positions.

Abstract: A surface texture measuring machine includes: a stage, a contact-type detector having a stylus, an image probe, a relative movement mechanism and a controller. The controller includes: a center position calculating unit that, when the image probe enters position data of at least three points on a circular contour of a circular concave portion or a circular convex portion of an object, approximates the entered position data to a circle to obtain a center position of the circle; and a stylus setting unit that, after calculating the center position, operates the relative movement mechanism to position the stylus of the contact-type detector at the center position.

Abstract: The invention provides an aspherical workpiece leveling method for leveling an aspherical workpiece mounted on a tilt correction table. The method includes three-dimensionally measuring a surface of the aspherical workpiece containing an extreme value; deriving a secondary curved surface from the obtained three-dimensionally measured values to obtain an extreme value of the secondary curved surface as a temporary extreme value; obtaining three-dimensionally measured values at three or more points from the surround about the obtained temporary extreme value; obtaining a plane defined by the obtained three-dimensionally measured values at three or more points; and adjusting the tilt correction table for leveling the obtained plane.

Abstract: An interaxis-angle correction method comprising: a reference sphere measurement step of scanning, with the sensor, a reference sphere located on the table, in the measurement-axis direction at a translation-axis-direction position on the reference sphere to acquire measurement-axis-direction contour information, and performing the scanning at a plurality of different translation-axis-direction positions on the same reference sphere, with the table being linearly translated; a peak detection step of detecting a peak point in the measurement-axis-direction contour information, and performing the detection for each set of measurement-axis-direction contour information; an error information acquisition step of obtaining information related to the inclination of an actual straight line based on each peak point with respect to an ideal straight line; a correction information acquisition step of obtaining correction information for correcting a measurement error related to the position in the measurement-axis direct

Abstract: An interaxis-angle correction method comprising: a reference sphere measurement step of scanning, with the sensor, a reference sphere located on the table, in the measurement-axis direction at a translation-axis-direction position on the reference sphere to acquire measurement-axis-direction contour information, and performing the scanning at a plurality of different translation-axis-direction positions on the same reference sphere, with the table being linearly translated; a peak detection step of detecting a peak point in the measurement-axis-direction contour information, and performing the detection for each set of measurement-axis-direction contour information; an error information acquisition step of obtaining information related to the inclination of an actual straight line based on each peak point with respect to an ideal straight line; a correction information acquisition step of obtaining correction information for correcting a measurement error related to the position in the measurement-axis direct

Abstract: The invention provides an aspherical workpiece leveling method for leveling an aspherical workpiece mounted on a tilt correction table. The method comprises three-dimensionally measuring a surface of the aspherical workpiece containing an extreme value; deriving a secondary curved surface from the obtained three-dimensionally measured values to obtain an extreme value of the secondary curved surface as a temporary extreme value; obtaining three-dimensionally measured values at three or more points from the surround about the obtained temporary extreme value; obtaining a plane defined by the obtained three-dimensionally measured values at three or more points; and adjusting the tilt correction table for leveling the obtained plane.

Abstract: Method for determining a coordinate system including a preliminary measurement step in which a detector of a coordinate measuring apparatus is used to scan first measurement areas of the device to obtain position coordinate information and the detector is used to scan a second measurement area that is not on a straight line connecting the first measurement areas to obtain position coordinate information; a feature-point detection step of obtaining the position of a feature point in each of the measurement areas according to a result of measurement; a reference-line determination step of obtaining a first reference line according to the position of each feature point in the first measurement areas, and obtaining a second reference line perpendicular to the first reference line and passing through a feature point located in the second measurement area; an origin-setting step; and an axis setting step.

Abstract: A method for determining a coordinate system for a device under measurement comprises: a preliminary measurement step in which a detector of a coordinate measuring apparatus is used to scan first measurement areas which include two or more feature portions of the device under measurement to obtain position coordinate information and the detector is used to scan a second measurement area which includes one or more feature portions that are not on a straight line connecting the first measurement areas to obtain position coordinate information; a feature-point detection step of obtaining the position of a feature point in each of the measurement areas according to a result of measurement; a reference-line determination step of obtaining a first reference line according to the position of each feature point in the first measurement areas, and of obtaining a second reference line perpendicular to the first reference line and passing through a feature point located in the second measurement area; an origin-setting