Patents by Inventor Fumihisa Miyajima

Fumihisa Miyajima has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7314701
    Abstract: A positive tone radiation-sensitive resin composition comprising (A) a 1-substituted imidazole, (B) a photoacid generator, and (C-a) a resin protected by an acid-dissociable group, insoluble or scarcely soluble in alkali, but becoming soluble in alkali when the acid-dissociable group dissociates or (C-b) an alkali-soluble resin and an alkali solubility controller, and a negative tone radiation-sensitive resin composition comprising (A), (B), (D) an alkali-soluble resin, and (E) a compound that can crosslink the alkali-soluble resin in the presence of an acid. The radiation-sensitive resin composition of the present invention is a chemically amplified resist exhibiting high resolution and high storage stability as a composition, and suitable for microfabrication sensible to active radiations, for example, ultraviolet rays such as g-lines and i-lines, deep ultraviolet rays represented by a KrF excimer laser, ArF excimer laser, F2 excimer laser, and EUV excimer laser, and electron beams.
    Type: Grant
    Filed: October 7, 2003
    Date of Patent: January 1, 2008
    Assignee: JSR Corporation
    Inventors: Kenichi Yokoyama, Fumihisa Miyajima, Tomoki Nagai, Eiji Yoneda
  • Patent number: 7105269
    Abstract: 1. A copolymer having recurring units of the following formulas (1), (2), and (3), wherein R1, R4, R5, and R6 are a hydrogen atom or a methyl group, R2, R3, and R7 represent a monovalent organic group, k is 1 or 2, 1 is 0–4, n is 1–3, m is 0–3, R8 is a substituted methyl group, 1-substituted ethyl group, 1-branched alkyl group, triorganosilyl group, triorganogermyl group, alkoxycarbonyl group, acyl group, or cyclic acid-dissociable group, with two or more R8 groups being the same or different, q is 1–3, and p is 0–3, the copolymer having a GPC average molecular weight of 3,000–100,000. The composition is useful as a polymer component for a radiation-sensitive resin composition suitable as a chemically-amplified resist.
    Type: Grant
    Filed: December 18, 2002
    Date of Patent: September 12, 2006
    Assignee: JSR Corporation
    Inventors: Tomoki Nagai, Daisuke Shimizu, Tsutomu Shimokawa, Fumihisa Miyajima, Masaaki Miyaji
  • Publication number: 20050095527
    Abstract: A positive tone radiation-sensitive resin composition comprising (A) a 1-substituted imidazole, (B) a photoacid generator, and (C-a) a resin protected by an acid-dissociable group, insoluble or scarcely soluble in alkali, but becoming soluble in alkali when the acid-dissociable group dissociates or (C-b) an alkali-soluble resin and an alkali solubility controller, and a negative tone radiation-sensitive resin composition comprising (A), (B), (D) an alkali-soluble resin, and (E) a compound that can crosslink the alkali-soluble resin in the presence of an acid. The radiation-sensitive resin composition of the present invention is a chemically amplified resist exhibiting high resolution and high storage stability as a composition, and suitable for microfabrication sensible to active radiations, for example, ultraviolet rays such as g-lines and i-lines, deep ultraviolet rays represented by a KrF excimer laser, ArF excimer laser, F2 excimer laser, and EUV excimer laser, and electron beams.
    Type: Application
    Filed: October 7, 2003
    Publication date: May 5, 2005
    Inventors: Kenichi Yokoyama, Fumihisa Miyajima, Tomoki Nagai, Eiji Yoneda
  • Publication number: 20030225203
    Abstract: The present invention provides a copolymer latex capable of remarkably improving the bond strength of coated paper, excelling in coated paper properties such as print gloss, and excelling in coating operability such as redispersibility, mechanical stability, and anti-stick properties, a process for producing the copolymer latex, and a paper coating composition. In the copolymer latex of the present invention, the content of components detected before an elution time at which a component having a polystyrene-reduced molecular weight of 1,000,000 is detected in a molecular-weight distribution measured by gel permeation chromatography (GPC) is 31% or more, the weight average molecular weight of components detected after the elution time at which the component having a polystyrene-reduced molecular weight of 1,000,000 is detected is 30,000-400,000, and the toluene insoluble content is 31 wt % or more.
    Type: Application
    Filed: May 29, 2002
    Publication date: December 4, 2003
    Applicant: JSR CORPORATION
    Inventors: Osamu Kurita, Fumihisa Miyajima, Osamu Ishikawa
  • Publication number: 20030157423
    Abstract: 1.
    Type: Application
    Filed: December 18, 2002
    Publication date: August 21, 2003
    Inventors: Tomoki Nagai, Daisuke Shimizu, Tsutomu Shimokawa, Fumihisa Miyajima, Masaaki Miyaji