Patents by Inventor Fumiko Kiriishi

Fumiko Kiriishi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Shower head and substrate processing apparatus
    Patent number: 8236106
    Abstract: A shower head is provided in a processing chamber for processing a substrate therein. Further, the shower head has a facing surface facing a mounting table for mounting thereon the substrate and serves to supply one or more gases through the facing surface toward the substrate. The shower head includes a central gas supply unit for supplying a first gas through a central portion of the facing surface toward the substrate, a peripheral gas supply unit for supplying a second gas through a peripheral portion of the facing surface toward the substrate and a gas exhaust unit, provided with a plurality of gas exhaust holes formed between the central gas supply unit and the peripheral gas supply unit, for exhausting the first and the second gas from the facing surface.
    Type: Grant
    Filed: March 13, 2009
    Date of Patent: August 7, 2012
    Assignee: Tokyo Electron Limited
    Inventors: Hachishiro Iizuka, Fumiko Kiriishi, Tsuyoshi Komiyama
  • SHOWER HEAD AND SUBSTRATE PROCESSING APPARATUS
    Publication number: 20090229754
    Abstract: A shower head is provided in a processing chamber for processing a substrate therein. Further, the shower head has a facing surface facing a mounting table for mounting thereon the substrate and serves to supply one or more gases through the facing surface toward the substrate. The shower head includes a central gas supply unit for supplying a first gas through a central portion of the facing surface toward the substrate, a peripheral gas supply unit for supplying a second gas through a peripheral portion of the facing surface toward the substrate and a gas exhaust unit, provided with a plurality of gas exhaust holes formed between the central gas supply unit and the peripheral gas supply unit, for exhausting the first and the second gas from the facing surface.
    Type: Application
    Filed: March 13, 2009
    Publication date: September 17, 2009
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Hachishiro IIZUKA, Fumiko Kiriishi, Tsuyoshi Komiyama