Abstract: Methods and devices including an air gap adjacent a contact element extending to a source/drain feature of a device are described. Some embodiments of the method include depositing a dummy layer, which is subsequently removed to form the air gap. The dummy layer and subsequent air gap may be formed after a SAC dielectric layer such as silicon nitride is formed over an adjacent metal gate structure.

Abstract: Epitaxial source/drain structures for enhancing performance of multigate devices, such as fin-like field-effect transistors (FETs) or gate-all-around (GAA) FETs, and methods of fabricating the epitaxial source/drain structures, are disclosed herein. An exemplary device includes a dielectric substrate. The device further includes a channel layer, a gate disposed over the channel layer, and an epitaxial source/drain structure disposed adjacent to the channel layer. The channel layer, the gate, and the epitaxial source/drain structure are disposed over the dielectric substrate. The epitaxial source/drain structure includes an inner portion having a first dopant concentration and an outer portion having a second dopant concentration that is less than the first dopant concentration. The inner portion physically contacts the dielectric substrate, and the outer portion is disposed between the inner portion and the channel layer. In some embodiments, the outer portion physically contacts the dielectric substrate.

Abstract: A device includes a gate stack; a gate spacer on a sidewall of the gate stack; a source/drain region adjacent the gate stack; a silicide; and a source/drain contact electrically connected to the source/drain region through the silicide. The silicide includes a conformal first portion in the source/drain region, the conformal first portion comprising a metal and silicon; and a conformal second portion over the conformal first portion, the conformal second portion further disposed on a sidewall of the gate spacer, the conformal second portion comprising the metal, silicon, and nitrogen.

Abstract: In an embodiment, a device includes: a gate electrode; a epitaxial source/drain region adjacent the gate electrode; one or more inter-layer dielectric (ILD) layers over the epitaxial source/drain region; a first source/drain contact extending through the ILD layers, the first source/drain contact connected to the epitaxial source/drain region; a contact spacer surrounding the first source/drain contact; and a void disposed between the contact spacer and the ILD layers.

Abstract: A preparation method of a positive electrode material of a lithium battery is provided, including mixing a compound containing at least one ethylenically-unsaturated group and one carbonyl group or a derivative thereof and a Ni-rich oxide of lithium and transition metal to react. The compound containing at least one ethylenically-unsaturated group and one carbonyl group is selected from a group consisting of a maleimide-based compound, an acrylate-based compound, a methacrylate-based compound, an acrylamide-based compound, a vinylamide-based compound, and a combination thereof, and the Ni-rich oxide of lithium and transition metal is represented by formula I, LiNixMyO2 ??Formula I wherein x+y=1, 1>x?0.5, and M is at least one transition metal element except Ni.

Abstract: A manufacturing method of a protein sensor includes the following steps. A hydrophobic material is provided and the hydrophobic material has a surface. An atmospheric pressure plasma process is performed to form a hydrophilic functional group on the surface of the hydrophobic material. A first antibody is immobilized on the surface of the hydrophobic material by the hydrophilic functional group. A mixed solution is prepared. The mixed solution includes a second antibody and an analyte, and the second antibody binds to the analyte. The mixed solution is reacted with the first antibody immobilized on the surface of the hydrophobic material to bind the first antibody to the analyte. Furthermore, a protein sensor manufactured by the above-described manufacturing method of the protein sensor is also provided.

Abstract: A manufacturing method of a protein sensor includes the following steps. A hydrophobic material is provided and the hydrophobic material has a surface. An atmospheric pressure plasma process is performed to form a hydrophilic functional group on the surface of the hydrophobic material. A first antibody is immobilized on the surface of the hydrophobic material by the hydrophilic functional group. A mixed solution is prepared. The mixed solution includes a second antibody and an analyte, and the second antibody binds to the analyte. The mixed solution is reacted with the first antibody immobilized on the surface of the hydrophobic material to bind the first antibody to the analyte. Furthermore, a protein sensor manufactured by the above-described manufacturing method of the protein sensor is also provided.

Abstract: A preparation method of a positive electrode material of a lithium battery is provided, including mixing a compound containing at least one ethylenically-unsaturated group or a derivative thereof and a Ni-rich oxide of lithium and transition metal to react. The compound containing at least one ethylenically-unsaturated group and one carbonyl group are selected from a group consisting of a maleimide-based compound, an acrylate-based compound, a methacrylate-based compound, an acrylamide-based compound, a vinylamide-based compound, and a combination thereof. The Ni-rich oxide of lithium and transition metal is represented by formula I, LiNixMyO2 ??Formula I wherein x+y=1, 1>x?0.5, and M is at least one transition metal element except Ni.

Abstract: A silicon compound, a preparation method thereof, and a lithium battery are provided. The silicon compound is represented by the following Chemical formula 1: (R1)4-n—Si-(L-A)n??[Chemical formula 1] In Chemical formula 1, each substituent is defined the same as in the specification.

Abstract: An oligomer and a lithium battery are provided. The oligomer is obtained by a reaction of epoxy acrylate and barbituric acid. The lithium battery includes an anode, a cathode, a separator, an electrolyte solution and a packaging structure, wherein the cathode includes the oligomer.

Abstract: An oligomer-polymer and a lithium battery are provided. The oligomer-polymer is obtained by a polymerization of a polymerizable compound having at least one ethylenically unsaturated group and at least one active hydrogen group in the same molecule. The lithium battery includes an anode, a cathode, a separator, an electrolyte solution and a package structure, wherein the cathode includes the oligomer-polymer.

Abstract: A oligomer and a lithium battery are provided. The oligomer is obtained by a polymerization reaction of a compound containing at least one ethylenically unsaturated group and a nucleophile compound. The compound containing at least one ethylenically unsaturated group is selected from a group consisting of a maleimide-based compound, an acrylate ester-based compound, a methacrylate ester-based compound, an acrylamide-based compound, a vinylamide-based compound and a combination thereof. The nucleophile compound is selected from a group consisting of monomaleimide, trithiocyanuric acid, hydantoin, hydantoin derivative, thiohydantoin, thiohydantoin derivative and a combination thereof.

Abstract: An oligomer-polymer is provided. The oligomer-polymer is obtained by the polymerization reaction of a compound containing an ethylenically unsaturated group and a nucleophile compound, wherein the nucleophile compound includes the compound shown in formula 1: A lithium battery including an anode, a cathode, an isolation film, an electrolyte solution, and a package structure is also provided, wherein the cathode includes the oligomer-polymer.

Abstract: A cholesteric liquid crystal writing board, which can display a writing track, includes a cholesteric liquid crystal device, an optical layer, a photo-sensing array and a voltage control circuit. The cholesteric liquid crystal device includes plural liquid crystal control areas. The optical layer has plural optical openings. The photo-sensing array includes plural photo sensors arranged in an array. The photo sensors are disposed corresponding to the optical openings. One of the photo sensors senses a luminous flux change and generates an erasing signal accordingly. The voltage control circuit receives the erasing signal and outputs a voltage signal accordingly to the liquid crystal control areas corresponding to the photo sensors having the luminous flux change, such that a part or all of cholesteric liquid crystals corresponding to the liquid crystal control areas are morphologically changed so as to clear a part or all of the writing trace.

Abstract: A cholesteric liquid crystal writing board comprises a cholesteric liquid crystal device, a photo-sensing array layer and a mode control unit. The photo-sensing array layer is disposed at one side of the light-emitting surface of the cholesteric liquid crystal device. The photo-sensing array layer comprises a plurality of gate control lines and a plurality of mode control lines. The mode control unit comprises a main control circuitry and a plurality of mode switches coupled to the main control circuitry. Each mode switch is coupled to one of the mode control lines correspondingly. The gate control lines intersect with the mode control lines so as to define a plurality of light sensing areas arranged in an array. Each light sensing area has a switch element and a light-sensing element. The main control circuitry controls each mode switch to be switched between a voltage output mode and a voltage write mode.

Abstract: An oligomer-polymer is provided. The oligomer-polymer is obtained by the polymerization reaction of a compound containing an ethylenically unsaturated group and a nucleophile compound, wherein the nucleophile compound includes the compound shown in formula 1: A lithium battery including an anode, a cathode, an isolation film, an electrolyte solution, and a package structure is also provided, wherein the cathode includes the oligomer-polymer.

Abstract: An electronic writing board comprises a first glass substrate, a second glass substrate and a Cholesteric liquid crystal layer. The first glass substrate has a writing surface, and the thickness thereof is between 0.1 mm and 0.35 mm. The second glass substrate is disposed opposite to the first glass substrate. The Cholesteric liquid crystal layer is disposed between the first glass substrate and the second glass substrate. The electronic writing board has a novel structure and can be easily manufactured, thereby reducing the cost of production machines.

Abstract: A cholesteric liquid crystal writing board comprises a cholesteric liquid crystal device, a photo-sensing array layer and a mode control unit. The photo-sensing array layer is disposed at one side of the light-emitting surface of the cholesteric liquid crystal device. The photo-sensing array layer comprises a plurality of gate control lines and a plurality of mode control lines. The mode control unit comprises a main control circuitry and a plurality of mode switches coupled to the main control circuitry. Each mode switch is coupled to one of the mode control lines correspondingly. The gate control lines intersect with the mode control lines so as to define a plurality of light sensing areas arranged in an array. Each light sensing area has a switch element and a light-sensing element. The main control circuitry controls each mode switch to be switched between a voltage output mode and a voltage write mode.

Abstract: A cholesteric liquid crystal writing board, which can display a writing track, includes a cholesteric liquid crystal device, an optical layer, a photo-sensing array and a voltage control circuit. The cholesteric liquid crystal device includes plural liquid crystal control areas. The optical layer has plural optical openings. The photo-sensing array includes plural photo sensors arranged in an array. The photo sensors are disposed corresponding to the optical openings. One of the photo sensors senses a luminous flux change and generates an erasing signal accordingly. The voltage control circuit receives the erasing signal and outputs a voltage signal accordingly to the liquid crystal control areas corresponding to the photo sensors having the luminous flux change, such that a part or all of cholesteric liquid crystals corresponding to the liquid crystal control areas are morphologically changed so as to clear a part or all of the writing trace.

Abstract: A cholesteric liquid crystal writing board can display a writing track, and comprises a cholesteric liquid crystal device, a photo-sensing array layer, a sensing-signal processing circuitry and a voltage control circuitry. The cholesteric liquid crystal device comprises a plurality of liquid crystal control areas. The photo-sensing array layer comprises a plurality of photo-sensing dot-areas arranged in an array, a photo-sensing element of the photo-sensing dot-area senses a luminous flux change and generates a sensing signal. The sensing-signal processing circuitry receives the sensing signal and accordingly outputs position data of the photo-sensing element in the photo-sensing array layer.