Abstract: A photocoupler 3 splits the light from a low-coherence light source 1 into measuring light DL and local oscillator light KL. A photocoupler 5 receives measuring light DL arid is input to an optical circuit 7 to be measured. The photocoupler 5 splits the reflected light RL. A polarization controller 9 controls the state of polarization of the reflected light RL as split by the photocoupler 5. A photocoupler 13 allows local oscillator light KL to be incident on a reflector mirror 16 and splits local oscillator light KL. A photocoupler 11 combines the reflected light RL as controlled in the state of polarization by the polarization controller 9, with the local oscillator light KL.

Abstract: The optical interferometer in which the incident light beam 3 is branched into 2 optical paths of the reflection light and the transmission light which cross at right angle with each other by the beam splitter 4, and on each optical path, the reflection light is totally reflected by the first reflection unit 5, and the transmission light is totally reflected by the second reflection unit 6, and the reflection lights by both reflection units 5 and 6 are wave-combined again by the beam splitter 4, and received by the light receiver 7. The beam splitter 4 by which the incident light beam is wave-separated and wave-combined, is arranged with a little inclination from the vertical to the incident light beam.

Abstract: A position sensor for movable body, which detects a position of a movable body which moves in a reciprocal direction, comprises; at least two portions to be detected, which are provided on one side surface of the movable body with respect to a moving direction of the movable body, and at least two detectors for detecting the portions to be detected, wherein one portion to be detected is not arranged on a line parallel to the moving direction, on which the other portion is disposed, nor arranged on a line perpendicular to the moving direction, on which the other portion is disposed, one detector corresponding to the one portion is arranged so that when the one detector detects the one portion by moving the movable body in one direction, the other portion is moved in the one direction beyond the one detector, and the other detector corresponding to the other portion is arranged so that when the other detector detects the other portion by moving the movable body in the other direction, the one portion is moved i

Abstract: The optical interferometer in which the incident light beam 3 is branched into 2 optical paths of the reflection light and the transmission light which cross at right angle with each other by the beam splitter 4, and on each optical path, the reflection light is totally reflected by the first reflection unit 5, and the transmission light is totally reflected by the second reflection unit 6, and the reflection lights by both reflection units 5 and 6 are wave-combined again by the beam splitter 4, and received by the light receiver 7. The beam splitter 4 by which the incident light beam is wave-separated and wave-combined, is arranged with a little inclination from the vertical to the incident light beam.

Abstract: An optical part driving device for moving an optical part, comprises; a driving timing pulley, a pair of driven timing pulleys, a timing belt wound by the driving timing pulley and the driven timing pulleys and connected with the optical part between the pair of driven timing pulleys, and a pair of tension pulleys for tensing the timing belt on both sides of the driving timing pulley.

Abstract: A light receiving module and a light receiving method to reduce polarization dependence, used in evaluation of polarization characteristics of various optical parts. The light receiving module has an optical mechanism including a first light transmission plate and a second light transmission plate between a first lens and a second lens, and a light receiving element of the outside of the optical mechanism. The first light transmission plate is inclined at such an angle as to have the same value as polarization dependence due to the inclination of the light receiving surface of the light receiving element, and subsequently the first light transmission plate is rotated by 90° in relation to the optical axis.

Abstract: In an optical interferometer, incident light 1 is divided into reflected light and transmitted light which travel along respective optical paths, which are orthogonal to each other. The reflected light is subjected to total reflection by means of a first reflector 3, and the transmitted light is subjected to total reflection by means of a second reflector 4. The light reflected by the first reflector 3 and the light reflected by the second reflector 4 are again merged by means of the beam splitter 2 into a single ray, and the thus-merged ray falls on a photodetector 5. The optical interferometer is equipped with a third reflector 6 which reflects the incident light 1 at right angles so as to fall on the beam splitter 2, and a fourth reflector 7 which reflects the light, having been transmitted through the beam splitter 2, at right angles so as to fall on the second reflector 4.

Abstract: An optical interferometer in which a reference light and a light to be measured interfere with each other includes a casing, a movable optical part which is movable with respect to the casing, a fixed optical part which is fixed to the casing, and an attachment emember for attaching the movable optical part to the casing and for removing the movable optical part form the casing.

Abstract: An electro-optic sampling probe is disclosed, by which both faces of an IC wafer can be measured without moving the IC wafer. In the probe, an excitation optical system is provided at the back face side of a back-face excitation type IC wafer. The back face of the IC wafer is irradiated by light output from the excitation optical system, and simultaneously, the electric signal transmitted through wiring on the IC wafer is measured by using light output from an electro-optic sampling optical system provided at the front face side of the IC wafer. If the excitation optical system is substituted with an electro-optic sampling optical system, an IC wafer having wiring in both faces can also be measured.

Abstract: An electro-optic sampling probe includes an electro-optic element which is to be positioned to contact wiring on an IC wafer surface which is a measurement target and whose optical characteristics are changed depending on an electric field applied via the wiring and an electro-optic sampling optical system module having a polarized beam splitter, a wave plate, and a photo diode. The module separates light, which is transmitted through the electro-optic element and is reflected by a surface of the electro-optic element from laser light emitted from the outside and converts the separated light into an electric signal, and includes an optical axis adjuster attached to a detachable portion of an optical fiber that emits the laser light for adjusting the optical axis of the laser light and a light receiving surface adjuster attached to the detachable portion of the photo diode for adjusting the position of a light receiving surface of the photo diode.

Abstract: A photocoupler 3 splits the light from a low-coherence light source 1 into measuring light DL and local oscillator light KL. A photocoupler 5 receives measuring light DL arid is input to an optical circuit 7 to be measured. The photocoupler 5 splits the reflected light RL. A polarization controller 9 controls the state of polarization of the reflected light RL as split by the photocoupler 5. A photocoupler 13 allows local oscillator light KL to be incident on a reflector mirror 16 and splits local oscillator light KL. A photocoupler 11 combines the reflected light RL as controlled in the state of polarization by the polarization controller 9, with the local oscillator light KL.

Abstract: An electro-optic sampling probe for preventing noise from being transmitted to photodiodes and improving the measurement accuracy is disclosed. In the probe, the optical system module comprises wavelength plates and polarized beam splitters arranged along an optical path of the relevant laser beam, and photodiodes facing the polarized beam splitters, wherein each photodiode is fixed via an insulating material to the main frame of the optical system module.

Abstract: An electro-optic sampling prober is used to measure a waveform of a measured signal applied to wiring of an IC wafer. Herein, a laser radiates laser beams, which are supplied to an optical module containing an optical isolator and photodiodes by way of an optical fiber. Then, the laser beams pass through an optical wavelength filter to propagate through a prober unit. The laser beams are incident on an electro-optical element, which is changed in polarization state in response to an electric field being caused by the measured signal. The laser beams are reflected by a surface mirror of the electro-optical element, so that reflected beams propagate back through the prober unit and are returned to the optical module by way of the optical wavelength filter. During the measurement, a human operator watches an image of a selected portion of the IC wafer presently placed beneath the prober unit to adjust a positional relationship between the prober unit and IC wafer.

Abstract: An electro-optic sampling probe is disclosed, by which both faces of an IC wafer can be measured without moving the IC wafer. In the probe, an excitation optical system is provided at the back face side of a back-face excitation type IC wafer. The back face of the IC wafer is irradiated by light output from the excitation optical system, and simultaneously, the electric signal transmitted through wiring on the IC wafer is measured by using light output from an electro-optic sampling optical system provided at the front face side of the IC wafer. If the excitation optical system is substituted with an electro-optic sampling optical system, an IC wafer having wiring in both faces can also be measured.

Abstract: The optical interferometer in which the incident light beam 3 is branched into 2 optical paths of the reflection light and the transmission light which cross at right angle with each other by the beam splitter 4, and on each optical path, the reflection light is totally reflected by the first reflection unit 5, and the transmission light is totally reflected by the second reflection unit 6, and the reflection lights by both reflection units 5 and 6 are wave-combined again by the beam splitter 4, and received by the light receiver 7. The beam splitter 4 by which the incident light beam is wave-separated and wave-combined, is arranged with a little inclination from the vertical to the incident light beam.

Abstract: Disclosed herein is an electro-optic sampling probe in which the quantity of light incident on the electro-optic sampling system module can be adjusted. The probe includes an electro-optic element that has a reflective face, an optical system for transmitting a laser beam received from an external source and an electro-optic sampling optical system module as well as unit for attenuating the quantity of light of the laser beam that is received by the optical system.

Abstract: The light receiving module has an optical mechanism 18 including a first light transmission plate 14a and a second light transmission plate 15a between a first lens 12 and a second lens 16, and a light receiving element 13 of the outside of the optical mechanism 18. The light receiving element 13 is placed adjacent to the first light transmission plate 14a with the second lens 12 sandwiched, and the light receiving element 13 is placed with a light receiving surface 13b inclined with respect to an optical axis of incident light 11a. In the optical mechanism 18, the first light transmission plate 14a is inclined at such an angle as to have the same value as polarization dependence due to the inclination of the light receiving surface 13b of the light receiving element 13, and subsequently the first light transmission plate 14a is rotated by 90° in relation to the optical axis 11a.

Abstract: There is to provided a photoreceptacle capable of stabilizing th connection between an optical fiber connector and the photoreceptacle and of commonly using an optical fiber connector having ferrules of the same shape. A cylindrical elastic body for elastically pressing and supporting outer diameter portions of ferrules of an optical fiber connector is integrally mounted on a photoreceptacle. The photoreceptacle comprises a cylinder which is inserted into the optical fiber connector and a collar attached to a photodetector. The collar has an outer configuration not to contact adjacent ferrules of a multi-core optical fiber connector when the multi-core optical fiber connector is inserted into the photoreceptacle.