Abstract: A plurality of first measurement patterns each including a protruding pattern formed of a resist film and a recessed pattern having a space with a shape corresponding to the protruding pattern are formed on a first substrate such that they have different focus values at a time of exposure, edge inclination amounts of the plurality of first measurement patterns are measured, and a focus dependence (17) of the edge inclination amounts is obtained based on correspondences (7) and (14) between the edge inclination amounts and the focus values. A second measurement pattern including the protruding pattern and the recessed pattern is formed on a second substrate so as to measure edge inclination amounts of the second measurement pattern, and a focus deviation amount deviating from a best focus at the time of exposure of the second measurement pattern is calculated from the edge inclination amounts of the second measurement pattern based on the focus dependence of the edge inclination amounts.

Abstract: Disclosed is a pyrrolotriazole compound represented by the following formula (I) and having an organic compound incorporated into crystals thereof or a pyrrolotriazole compound represented by the following formula (II) and having an alcohol incorporated into crystals thereof.

Abstract: It is an object to provide a semiconductor device having a buried multilayer wiring structure in which generation of a resolution defect of a resist pattern is suppressed and generation of a defective wiring caused by the resolution defect is reduced. After a via hole (7) reaching an etching stopper film (4) is formed, annealing is carried out at 300 to 400° C. with the via hole (7) opened. As an annealing method, it is possible to use both a method using a hot plate and a method using a heat treating furnace. In order to suppress an influence on a lower wiring (20) which has been manufactured, heating is carried out for a short time of approximately 5 to 10 minutes by using the hot plate.

Abstract: It is an object to provide a semiconductor device having a buried multilayer wiring structure in which generation of a resolution defect of a resist pattern is suppressed and generation of a defective wiring caused by the resolution defect is reduced. After a via hole (7) reaching an etching stopper film (4) is formed, annealing is carried out at 300 to 400° C. with the via hole (7) opened. As an annealing method, it is possible to use both a method using a hot plate and a method using a heat treating furnace. In order to suppress an influence on a lower wiring (20) which has been manufactured, heating is carried out for a short time of approximately 5 to 10 minutes by using the hot plate.

Abstract: There is disclosed a method of producing acetals, which comprises reacting a compound of formula (I), at least one compound selected from a group consisting of a compound of formula (II), paraformaldehyde, and trioxane; and a compound of formula (III), to synthesize an acetal of formula (IV), wherein the reaction is carried out in the presence of an oxidizing agent and an acid:  wherein R1 is an alkyl group etc., R2 is an alkyl or aryl group, R3 and R4 each independently are a hydrogen atom, an alkyl group or an aryl group, X1 and X2 each are a group of nonmetal atoms necessary to form a 5- or 6-membered N-containing heteroring, and M is a hydrogen atom or a cation. This method can give acetal compounds with good efficiency and a high yield.

Abstract: In a leg apparatus with which a supporting wheel for the magnetically levitated vehicle can be lifted up and down freely, a supporting wheel is positioned and hung by a swing arm and a lifting actuator. Usage of only the lifting actuator flat spring having a damper and coil spring or a combination thereof offer a buffer-supporting to enhance better comfortable feeling of riding. The leg can be completely retracted with a short stroke by a contracting action of the lifting actuator having the internal lock. Moreover the vehicle height can be adjusted. The leg apparatus is also designed and constructed in such a way that a damper or spring is installed inside the preventive wall against fire or foreign obstacles.

Abstract: According to this invention, wheels are pivotally supported by a fork arm comprising a lever-type supporting component, an expandable lifting actuator having damper serially arranged to buffer and support thereof at other end end of arm of said supporting component. With this structure, a complete retraction of wheels can be achieved. Hence the supporting component can be used both as the supporting leg apparatus to vertically support the magnetically levitated vehicle and the guide leg apparatus to mechanically guide the vehicle along the guideway side wall. It is, therefore, characterized with the simple structure, light weight, small storage space, and easy to perform maintenance.

Abstract: This sealing mechanism is provided with a cap in an overall sectional configuration of a cramp iron which is made from a synthetic resin, and a resilient sealing body in an overall sectional configuration of a cramp iron. An inner surface of the cap is formed with an inserting groove in which the resilient sealing body is fitted. When the resilient sealing body is fitted in the inserting groove in the cap, this sealing body is partially protruded from inner surface of the cap. The cap is also formed with longitudinal lubricating slots on the outer surface thereof. Moreover, both side surfaces of the cap are provided with a plurality of notches at predetermined regular intervals of place which extend from the outer surface of the cap to the inner surface thereof.