Abstract: The entire surface of a photomask 101 is inspected after data and parameters of the lithography simulator are set in the operation setting screen of a control computer 110 and after the inspection system 100 is calibrated. The coordinates of a portion or portions determined in the inspection to be a defect are written into an XML file. When the inspection system 100 is in the die-to-database inspection mode, the control computer 110 reads pattern data from the database, which data is used by the inspection system 100 to generate reference data, and then converts the read pattern data into OASIS format, which is highly versatile. The optical image captured by the inspection system 100 is converted into a bitmap. These data are sent to the lithography simulator, together with simulation operating conditions and the image data that was used to calibrate the inspection system 100.

Abstract: A mobile robot includes: a main body; a drive unit that moves the main body; a contact force detecting unit that detects a contact force acting against an obstacle; and a controller that controls the drive unit to move the main body toward a target object under a condition that the contact force detected by the contact force detecting unit is in a predetermined range.

Abstract: This pattern inspection apparatus includes an inspection region information storage unit that stores an inspection region specified in a pattern region, a pattern surface height detection unit that detects a pattern surface height signal corresponding to a pattern surface height measurement position on the inspection sample, an autofocus mechanism that focuses on the inspection sample using the pattern surface height signal detected by the pattern surface height detection unit, a determination unit, and an autofocus mechanism control unit. When the determination unit determines that the pattern surface height measurement position is located within the inspection region, the autofocus mechanism control unit drives the autofocus mechanism, and the determination unit determines that the pattern surface height measurement position is not located within the inspection region, the autofocus mechanism control unit stops the autofocus mechanism.

Abstract: The entire surface of a photomask 101 is inspected after data and parameters of the lithography simulator are set in the operation setting screen of a control computer 110 and after the inspection system 100 is calibrated. The coordinates of a portion or portions determined in the inspection to be a defect are written into an XML file. When the inspection system 100 is in the die-to-database inspection mode, the control computer 110 reads pattern data from the database, which data is used by the inspection system 100 to generate reference data, and then converts the read pattern data into OASIS format, which is highly versatile. The optical image captured by the inspection system 100 is converted into a bitmap. These data are sent to the lithography simulator, together with simulation operating conditions and the image data that was used to calibrate the inspection system 100.

Abstract: A robot controller according to an embodiment of the present invention comprises a base; a first link; a first actuator which drives to rotate the first link relative to the base; a first torque transmission mechanism which transmits the torque of the first actuator to the first link at a speed reducing ratio of N1; a first angular sensor which detects a rotating angle ?M1 of the first actuator; a first angular velocity sensor which detects an angular velocity ?A1 of the first link rotating relatively to the base; and a processor which calculates an angle of the first link relatively to the base by using a high frequency content of an integrated value of ?A1 and a low frequency content of ?M1*N1, the high frequency content being equal to a first frequency or higher and the low frequency content being equal to a first frequency or lower.

Abstract: A command executing apparatus includes an executing unit that executes a command indicating process contents of a robot; a suspending unit that suspends execution of the command, when an interrupt command; a resumption condition generating unit that generates a resumption condition for resuming a suspending command; an executed contents generating unit that generates executed contents indicating the process contents executed until the suspending command is suspended; a suspending state holding unit that holds the resumption command and the executed contents in association with the suspending command; a resumption propriety judging unit that judges whether the suspending command is able to be resumed, when the resumption command is obtained; and a resuming unit that indicates the executing unit that the execution of the suspending command is resumed from a point at which the suspending command is suspended, when the suspending command is judged to be able to be resumed.

Abstract: A main control apparatus is connected to a single signal line. A plurality of equipments is respectively connected to a multipoint line. Each multipoint line diverges from the single signal line. The main control apparatus sends a control signal to each equipment through the single signal line using a frequency band. Each equipment receives the control signal from the main control apparatus through the multipoint line using the frequency band. Each equipment is assigned a unique frequency from within the frequency band.

Abstract: An information processing apparatus includes a plurality of information reforming modules that reform input information input from each information device to common format information, which is a format common to the respective information devices, and a status-information storage unit that stores status information indicating a status for each of predetermined items of the reformed common format information, for each of the information reforming modules. The apparatus specifies the information reforming module that satisfies a use request condition, from one or a combination of a plurality of pieces of status information stored in the status-information storage unit, acquires the common format information reformed by the specified information reforming module, processes the acquired common format information to use information matched with the use request condition, and outputs the processed use information.

Abstract: A mobile robot includes: a main body; a drive unit that moves the main body; a contact force detecting unit that detects a contact force acting against an obstacle; and a controller that controls the drive unit to move the main body toward a target object under a condition that the contact force detected by the contact force detecting unit is in a predetermined range.

Abstract: A receiving device includes a light-receiving unit receiving a light transmitted from a light source, luminance of the light changing corresponding to an information, the light-receiving unit having a plurality of light-receiving elements detecting the light repeatedly at times different from one another, and a decoding unit decoding a light-receiving signal outputted from the light-receiving unit into the information.

Abstract: A behavior control apparatus includes an external condition acquiring unit configured to acquire an external condition of a mobile robot; a goal generating unit configured to generate a goal to be achieved by executing a plan for multiple functions of the mobile robot, based on the external condition; a goal class generating unit configured to generate a goal class indicating whether the goal is a general goal to be achieved in the order of generation of the goal or a conditional goal to be achieved by an interruption as satisfying a preset executing condition; an executing order determining unit configured to determine an executing order of the plan based on the goal class; and a plan generating unit configured to generate the plan for achieving a goal sequence of the order of execution.

Abstract: A command executing apparatus includes an executing unit that executes a command indicating process contents of a robot; a suspending unit that suspends execution of the command, when an interrupt command; a resumption condition generating unit that generates a resumption condition for resuming a suspending command; an executed contents generating unit that generates executed contents indicating the process contents executed until the suspending command is suspended; a suspending state holding unit that holds the resumption command and the executed contents in association with the suspending command; a resumption propriety judging unit that judges whether the suspending command is able to be resumed, when the resumption command is obtained; and a resuming unit that indicates the executing unit that the execution of the suspending command is resumed from a point at which the suspending command is suspended, when the suspending command is judged to be able to be resumed.

Abstract: A robot controller according to an embodiment of the present invention comprises a base; a first link; a first actuator which drives to rotate the first link relative to the base; a first torque transmission mechanism which transmits the torque of the first actuator to the first link at a speed reducing ratio of N1; a first angular sensor which detects a rotating angle ?M1 of the first actuator; a first angular velocity sensor which detects an angular velocity ?A1 of the first link rotating relatively to the base; and a processor which calculates an angle of the first link relatively to the base by using a high frequency content of an integrated value of ?A1 and a low frequency content of ?M1*N1, the high frequency content being equal to a first frequency or higher and the low frequency content being equal to a first frequency or lower.

Abstract: A controller system comprises a mechatronics device comprising a first connector inputting or outputting signals, and a memory which stores characteristic information showing characteristics of the signals input and output through the first connector; and a controller, which controls the mechatronics device, comprising a second connector which is electrically connected to the first connector, a reconfigurable circuit which outputs control signals controlling the mechatronics device, the reconfigurable circuit being changed to a suitable circuit structure for the mechatronics device, and a processor outputting an instruction to the reconfigurable circuit to change the circuit structure according to the characteristic information.

Abstract: A main control apparatus is connected to a single signal line. A plurality of equipments is respectively connected to a multipoint line. Each multipoint line diverges from the single signal line. The main control apparatus sends a control signal to each equipment through the single signal line using a frequency band. Each equipment receives the control signal from the main control apparatus through the multipoint line using the frequency band. Each equipment is assigned a unique frequency from within the frequency band.