Patents by Inventor Fumio Uehara

Fumio Uehara has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer processing apparatus, wafer processing method, and semiconductor substrate fabrication method
    Patent number: 6767840
    Abstract: An ultrasonic bath (30) is arranged below a wafer processing bath (10). Wafers (40) are processed while ultrasonic waves are transmitted from the ultrasonic bath (30) to the wafer processing bath (10). The wafers (40) are processed while being entirely dipped into the wafer processing bath (10) and rotated by wafer rotating rods (53).
    Type: Grant
    Filed: September 19, 2000
    Date of Patent: July 27, 2004
    Assignee: Canon Kabushiki Kaisha
    Inventors: Fumio Uehara, Kiyofumi Sakaguchi, Kazutaka Yanagita, Masakazu Harada
  • Wafer processing apparatus, wafer processing method, and semiconductor substrate fabrication method
    Patent number: 6199563
    Abstract: An ultrasonic bath (30) is arranged below a wafer processing bath (10). Wafers (40) are processed while ultrasonic waves are transmitted from the ultrasonic bath (30) to the wafer processing bath (10). The wafers (40) are processed while being entirely dipped into the wafer processing bath (10) and rotated by wafer rotating rods (53).
    Type: Grant
    Filed: February 18, 1998
    Date of Patent: March 13, 2001
    Assignee: Canon Kabushiki Kaisha
    Inventors: Fumio Uehara, Kiyofumi Sakaguchi, Kazutaka Yanagita, Masakazu Harada