Abstract: A laser plasma X-ray generating apparatus that can promptly repair a cryo-target layer on a drum surface held at a very low temperature using a liquid nitrogen is provided, and a drum 122 is fixed to a lower end of a shaft 121, and the drum 122 is arranged so as to be able to be moved in its rotating direction and its axle direction at an inside of the cryo-forming cover 106. And a liquid nitrogen supplying pipe 131 is inserted into the shaft 121, and a conduit 144 for supplying the target gas is connected to the cryo-forming cover 106. Further, a jacket 171 is arranged at the periphery of the cryo-forming cover 106 and a pipe 185 is arranged at the periphery of the conduit 144, resulting in forming a heat exchanger.

Abstract: A laser plasma X-ray generating apparatus that can promptly repair a cryo-target layer on a drum surface held at a very low temperature using a liquid nitrogen is provided, and a drum 122 is fixed to a lower end of a shaft 121, and the drum 122 is arranged so as to be able to be moved in its rotating direction and its axle direction at an inside of the cryo-forming cover 106. And a liquid nitrogen supplying pipe 131 is inserted into the shaft 121, and a conduit 144 for supplying the target gas is connected to the cryo-forming cover 106. Further, a jacket 171 is arranged at the periphery of the cryo-forming cover 106 and a pipe 185 is arranged at the periphery of the conduit 144, resulting in forming a heat exchanger.