Patents by Inventor Fumitaka FUJII

Fumitaka FUJII has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Spectroscopic reflectometer
    Patent number: 8825448
    Abstract: In a spectroscopic reflectometer, in order to make it possible to omit a supplementary measurement (specifically, measurement of a calibration sample) which has been needed every time a light reflectance of an inspection work is measured to promote the reduction in measurement time and simplification in measurement configuration, an internal reflection mechanism having a constant light reflectance is arranged inside a head so that light reflected by the internal reflection mechanism is received by a photo-detector, whereby the light reflectance of the inspection work is calculated based on an output value of the photo-detector in a state of having substantially no light introduced, an output value of the photo-detector when a dark sample that substantially reflects no light is used, an output value that is an output value of the photo-detector when a calibration sample of a known light reflectance is used as the object, and an output value of the photo-detector when an inspection work to be measured is used.
    Type: Grant
    Filed: August 9, 2010
    Date of Patent: September 2, 2014
    Assignee: Horiba, Ltd.
    Inventor: Fumitaka Fujii
  • SPECTROSCOPIC REFLECTOMETER
    Publication number: 20110035189
    Abstract: In a spectroscopic reflectometer, in order to make it possible to omit a supplementary measurement (specifically, measurement of a calibration sample) which has been needed every time a light reflectance of an inspection work is measured to promote the reduction in measurement time and simplification in measurement configuration, an internal reflection mechanism having a constant light reflectance is arranged inside a head so that light reflected by the internal reflection mechanism is received by a photo-detector, whereby the light reflectance of the inspection work is calculated based on an output value of the photo-detector in a state of having substantially no light introduced, an output value of the photo-detector when a dark sample that substantially reflects no light is used, an output value that is an output value of the photo-detector when a calibration sample of a known light reflectance is used as the object, and an output value of the photo-detector when an inspection work to be measured is used.
    Type: Application
    Filed: August 9, 2010
    Publication date: February 10, 2011
    Applicant: HORIBA, LTD.
    Inventor: Fumitaka FUJII