Patents by Inventor Fumiya FUJII

Fumiya FUJII has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Inspection apparatus including power supply for supplying power to heating mechanism used for heating device
    Patent number: 11774488
    Abstract: A power supply for supplying a power to a heating mechanism used for heating a measurement target that emits a measurement signal includes an input device configured to output an input signal that reflects a control signal in a differentiable periodic waveform having a frequency of 1 kHz or less. The power supply includes a switching amplifier configured to amplify the input signal from the input device and output the amplified signal.
    Type: Grant
    Filed: December 3, 2021
    Date of Patent: October 3, 2023
    Assignee: Tokyo Electron Limited
    Inventors: Shigeru Kasai, Fumiya Fujii
  • POWER SUPPLY AND INSPECTION APPARATUS
    Publication number: 20220178988
    Abstract: A power supply for supplying a power to a heating mechanism used for heating a measurement target that emits a measurement signal includes an input device configured to output an input signal that reflects a control signal in a differentiable periodic waveform having a frequency of 1 kHz or less. The power supply includes a switching amplifier configured to amplify the input signal from the input device and output the amplified signal.
    Type: Application
    Filed: December 3, 2021
    Publication date: June 9, 2022
    Inventors: Shigeru KASAI, Fumiya FUJII