Abstract: Provided are a valve guide made of an iron-based sintered alloy excellent in wear resistance and thermal conductivity, and a method of producing the same. Specifically, provided are a method of producing a valve guide made of an iron-based sintered alloy, the method including the steps of: molding raw material powder including diffusion-alloyed powder including core iron powder and Cu bonded to the core iron powder through diffusion to obtain a molded body; and sintering the molded body, to thereby produce a valve guide made of an iron-based sintered alloy, and a valve guide produced by the production method.

Abstract: A MEMS device includes: a substrate as a base including a support portion and a detection electrode as a fixed electrode; a movable body supported to the support portion with a major surface of the movable body facing the fixed electrode; and an abutment portion facing at least a portion of an outer edge of the movable body and restricting rotational displacement in an in-plane direction of the major surface. The abutment portion includes an abutment surface including an abutment position at which the movable body abuts against the abutment portion due to the rotational displacement of the movable body, and a hollow portion provided opposing the abutment surface.

Abstract: A MEMS device includes: a substrate as a base including a support portion and a detection electrode as a fixed electrode; a movable body supported to the support portion with a major surface of the movable body facing the fixed electrode; and an abutment portion facing at least a portion of an outer edge of the movable body and restricting rotational displacement in an in-plane direction of the major surface. The abutment portion includes an abutment surface including an abutment position at which the movable body abuts against the abutment portion due to the rotational displacement of the movable body, and a hollow portion provided opposing the abutment surface.

Abstract: An inertial sensor according to the embodiment includes a first sensor, a first detection circuit, a second sensor, a second detection circuit, and a range setting unit. The first sensor detects a first physical quantity on a first axis. The first detection circuit outputs first detection information based on a first sensor signal from the first sensor. The second sensor detects a second physical quantity on a second axis. The second detection circuit outputs second detection information based on a second sensor signal from the second sensor. The range setting unit performs range setting processing of setting a detection range of the first physical quantity in the first detection circuit based on the first detection information and the second detection information.

Abstract: The present invention addresses the problem of providing a sintered alloy valve guide capable of inhibiting valve adhesion even in a high-temperature environment. The problem can be solved by a sintered alloy valve guide impregnated with a lubricating oil including pores that are sealed on the valve guide outer circumferential surface. More particularly, the problem is solved by the sealing step of performing a sealing treatment of pores on the outer circumferential surface of a sintered body impregnated with a lubricating oil.

Abstract: The present invention addresses the problem of providing a sintered alloy valve guide capable of inhibiting valve adhesion even in a high-temperature environment. The problem can be solved by a sintered alloy valve guide impregnated with a lubricating oil including pores that are sealed on the valve guide outer circumferential surface. More particularly, the problem is solved by the sealing step of performing a sealing treatment of pores on the outer circumferential surface of a sintered body impregnated with a lubricating oil.

Abstract: A MEMS device includes: a substrate as a base including a support portion and a detection electrode as a fixed electrode; a movable body supported to the support portion with a major surface of the movable body facing the fixed electrode; and an abutment portion facing at least a portion of an outer edge of the movable body and restricting rotational displacement in an in-plane direction of the major surface. The abutment portion includes an abutment surface including an abutment position at which the movable body abuts against the abutment portion due to the rotational displacement of the movable body, and a hollow portion provided opposing the abutment surface.

Abstract: The present invention addresses the problem of providing a sintered alloy valve guide capable of inhibiting valve adhesion even in a high-temperature environment. The problem can be solved by a sintered alloy valve guide impregnated with a lubricating oil including pores that are sealed on the valve guide outer circumferential surface. More particularly, the problem is solved by the sealing step of performing a sealing treatment of pores on the outer circumferential surface of a sintered body impregnated with a lubricating oil.

Abstract: A MEMS device includes: a substrate as a base including a support portion and a detection electrode as a fixed electrode; a movable body supported to the support portion with a major surface of the movable body facing the fixed electrode; and an abutment portion facing at least a portion of an outer edge of the movable body and restricting rotational displacement in an in-plane direction of the major surface. The abutment portion includes an abutment surface including an abutment position at which the movable body abuts against the abutment portion due to the rotational displacement of the movable body, and a hollow portion provided opposing the abutment surface.

Abstract: An inertial sensor includes: a sensor unit; a base substrate having the sensor unit arranged at one surface thereof and having a first lateral surface and a second lateral surface; a package accommodating the sensor unit and the base substrate and having an inner bottom surface, a first inner wall surface, and a second inner wall surface; a first adhesive bonding together an other surface of the base substrate and an inner bottom surface of the package; a second adhesive bonding together the first inner wall surface of the package and the first lateral surface; and a third adhesive bonding together the second inner wall surface of the package and the second lateral surface.

Abstract: An inertial sensor includes a substrate, a first detection element that is provided on a first surface of the substrate and includes a first movable portion displaceable with respect to the substrate and a first fixed portion connected to the first movable portion and fixed to the substrate, and a second detection element that is provided on a second surface in a front-back relationship with the first surface and includes a second movable portion displaceable with respect to the substrate and a second fixed portion connected to the second movable portion and fixed to the substrate.

Abstract: A MEMS device includes: a base (substrate) having a support part and a fixed electrode (detection electrode); a movable member supported on the support part with a main surface facing the fixed electrode; and a lid joined to the base and forming an accommodation space in which the movable member is accommodated. The lid has an abutting part which faces, via a space, at least a part of an outer edge of the movable member accommodated in the accommodation space and regulates displacement in an in-plane direction of the main surface.

Abstract: A MEMS device includes: a substrate as a base including a support portion and a detection electrode as a fixed electrode; a movable body supported to the support portion with a major surface of the movable body facing the fixed electrode; and an abutment portion facing at least a portion of an outer edge of the movable body and restricting rotational displacement in an in-plane direction of the major surface. The abutment portion includes an abutment surface including an abutment position at which the movable body abuts against the abutment portion due to the rotational displacement of the movable body, and a hollow portion provided opposing the abutment surface.

Abstract: A MEMS device includes: a substrate as a base including a support portion and a detection electrode as a fixed electrode; a movable body supported to the support portion with a major surface of the movable body facing the fixed electrode; and an abutment portion facing at least a portion of an outer edge of the movable body and restricting rotational displacement in an in-plane direction of the major surface. The abutment portion includes an abutment surface including an abutment position at which the movable body abuts against the abutment portion due to the rotational displacement of the movable body, and a hollow portion provided opposing the abutment surface.

Abstract: The inertial sensor includes a first substrate provided with an inertial sensor element, and a second substrate. The first substrate includes, in a plan view, a first area to be bonded to the second substrate, a second area which is located outside the first area, and is not bonded to the second substrate, and a third area which is located outside the second area, and is not bonded to the second substrate. The first substrate in the second area has a part thinner than a thickness of the first substrate in the third area.

Abstract: An inertial sensor includes: a sensor unit; a base substrate having the sensor unit arranged at one surface thereof and having a first lateral surface and a second lateral surface; a package accommodating the sensor unit and the base substrate and having an inner bottom surface, a first inner wall surface, and a second inner wall surface; a first adhesive bonding together an other surface of the base substrate and an inner bottom surface of the package; a second adhesive bonding together the first inner wall surface of the package and the first lateral surface; and a third adhesive bonding together the second inner wall surface of the package and the second lateral surface.

Abstract: An inertial sensor includes a substrate, a first detection element that is provided on a first surface of the substrate and includes a first movable portion displaceable with respect to the substrate and a first fixed portion connected to the first movable portion and fixed to the substrate, and a second detection element that is provided on a second surface in a front-back relationship with the first surface and includes a second movable portion displaceable with respect to the substrate and a second fixed portion connected to the second movable portion and fixed to the substrate.

Abstract: Provided are a valve guide made of an iron-based sintered alloy excellent in wear resistance and thermal conductivity, and a method of producing the same. Specifically, provided are a method of producing a valve guide made of an iron-based sintered alloy, the method including the steps of: molding raw material powder including diffusion-alloyed powder including core iron powder and Cu bonded to the core iron powder through diffusion to obtain a molded body; and sintering the molded body, to thereby produce a valve guide made of an iron-based sintered alloy, and a valve guide produced by the production method.

Abstract: A MEMS device includes: a base (substrate) having a support part and a fixed electrode (detection electrode); a movable member supported on the support part with a main surface facing the fixed electrode; and a lid joined to the base and forming an accommodation space in which the movable member is accommodated. The lid has an abutting part which faces, via a space, at least a part of an outer edge of the movable member accommodated in the accommodation space and regulates displacement in an in-plane direction of the main surface.

Abstract: A MEMS device includes: a substrate as a base including a support portion and a detection electrode as a fixed electrode; a movable body supported to the support portion with a major surface of the movable body facing the fixed electrode; and an abutment portion facing at least a portion of an outer edge of the movable body and restricting rotational displacement in an in-plane direction of the major surface. The abutment portion includes an abutment surface including an abutment position at which the movable body abuts against the abutment portion due to the rotational displacement of the movable body, and a hollow portion provided opposing the abutment surface.