Abstract: An apparatus includes a processor that matches of local-feature-amounts in a state where an image of a measurement target captured by an image-sensor and a projective-transformed image of three-dimensional design data of the measurement target substantially overlap each other on a display to search the captured image and a virtual image generated from the projective-transformed image for a plurality of feature-point pairs with similar local-feature-amounts of an image, estimates a temporary-external-parameter related to a position and orientation of the image-sensor, compares an initial-external-parameter and the temporary-external-parameter to diagnose reliability of the temporary-external-parameter, and selects, among the feature-point pairs, a specified number of feature-point pairs with a score value indicating similarity between two feature-points forming each feature-point pair equal to or higher than a threshold value, estimate a final-external-parameter using the selected feature-point pairs, and disp

Abstract: An evaluation method includes: identifying by a computer, when detecting that a hole formed in a structure is included in a target image that includes a captured image of the structure, a shape of a contour of the hole on the target image; identifying a part of the three-dimensional model such that, when a three-dimensional model according to three-dimensional design data of the structure is projected onto the target image such that a projected image of the three-dimensional model onto the target image corresponds to the captured image of the structure included in the target image, the part on the projected image corresponds to the shape; and outputting evaluation information related to a position at which the hole is formed in the structure, based on a result of comparison between the identified part and a part of the three-dimensional model corresponding to the three-dimensional design data of the hole.

Abstract: An apparatus includes a processor that matches of local-feature-amounts in a state where an image of a measurement target captured by an image-sensor and a projective-transformed image of three-dimensional design data of the measurement target substantially overlap each other on a display to search the captured image and a virtual image generated from the projective-transformed image for a plurality of feature-point pairs with similar local-feature-amounts of an image, estimates a temporary-external-parameter related to a position and orientation of the image-sensor, compares an initial-external-parameter and the temporary-external-parameter to diagnose reliability of the temporary-external-parameter, and selects, among the feature-point pairs, a specified number of feature-point pairs with a score value indicating similarity between two feature-points forming each feature-point pair equal to or higher than a threshold value, estimate a final-external-parameter using the selected feature-point pairs, and disp

Abstract: An information processing apparatus includes a processor and a memory. The memory stores three-dimensional data describing a real device including an object, a source of an acting factor that acts on the object and causes a detectable change at the object, and a detector that detects the change in a specified detection range. The processor produces a virtual device that represents the real device in a virtual space, based on the three-dimensional data in the memory. With this virtual device, the processor simulates the change caused by the acting factor, and calculates a region of the object in which the simulated change satisfies a specified condition.

Abstract: An input picture generation unit generates a virtually photographed picture including an object of interest photographed in a virtual space and outputs the virtually photographed picture as an input picture for use in generating an image processing program through learning. A target picture generation unit receives selection of feature data corresponding to a feature portion of the object of interest, from among geometric data representing a three-dimensional shape of the object of interest. The target picture generation unit calculates a projected position of the feature portion in the input picture, based on the feature data, and generates a target picture corresponding to the input picture, based on the calculated projected position.

Abstract: An information processing apparatus includes a processor and a memory. The memory stores three-dimensional data describing a real device including an object, a source of an acting factor that acts on the object and causes a detectable change at the object, and a detector that detects the change in a specified detection range. The processor produces a virtual device that represents the real device in a virtual space, based on the three-dimensional data in the memory. With this virtual device, the processor simulates the change caused by the acting factor, and calculates a region of the object in which the simulated change satisfies a specified condition.

Abstract: A candidate pixel generating unit searches a path-undetermined adjacent pixel j which is adjacent around a parent pixel i, and, with respect to the searched adjacent pixel j, generates a candidate pixel having data {j(i,|Wij|)} in which the parent pixel i and magnitude |Wij| of a phase difference Wij in which phase skip between the pixels is corrected are combined. The registration control unit registers the pixel to a heap having a function of ordering the registration order, and order the pixel, if the weight |Wij| is equal to or more than a predetermined threshold value TH; and registers the pixel to a queue not having the function of ordering the registration order if it is less than the threshold value TH. A path determination unit prioritizes the queue to retrieve and eliminate one candidate pixel, and determines a path between the eliminated candidate pixel and the parent pixel.

Abstract: A reference-height calculating unit calculates an original height of a distortion detecting mirror when a distortion detecting mirror and a reference mirror are set in parallel to each other. A height measuring unit measures mirror heights when the distortion detecting mirror is tilted in directions of an X axis and a Y axis. A contour-line calculating unit calculates a pair of contour lines based on the mirror heights. An intersection calculating unit calculates an intersection of the contour lines. A storing unit stores coordinates to which height of predetermined coordinates are moved by distortion in a correction table. A distortion correcting unit corrects the distortion based on the correction table.

Abstract: A candidate pixel generating unit searches a path-undetermined adjacent pixel j which is adjacent around a parent pixel i, and, with respect to the searched adjacent pixel j, generates a candidate pixel having data {j(i,|Wij|)} in which the parent pixel i and magnitude |Wij| of a phase difference Wij in which phase skip between the pixels is corrected are combined. The registration control unit registers the pixel to a heap having a function of ordering the registration order, and order the pixel, if the weight |Wij| is equal to or more than a predetermined threshold value TH; and registers the pixel to a queue not having the function of ordering the registration order if it is less than the threshold value TH. A path determination unit prioritizes the queue to retrieve and eliminate one candidate pixel, and determines a path between the eliminated candidate pixel and the parent pixel.

Abstract: A reference-height calculating unit calculates an original height of a distortion detecting mirror when a distortion detecting mirror and a reference mirror are set in parallel to each other. A height measuring unit measures mirror heights when the distortion detecting mirror is tilted in directions of an X axis and a Y axis. A contour-line calculating unit calculates a pair of contour lines based on the mirror heights. An intersection calculating unit calculates an intersection of the contour lines. A storing unit stores coordinates to which height of predetermined coordinates are moved by distortion in a correction table. A distortion correcting unit corrects the distortion based on the correction table.

Abstract: A method of inspecting bumps provided on a surface of an object to be inspected includes the steps of: (a) irradiating a first irradiation beam on said object in an oblique direction and (b) imaging a first reflected beam from said object so as to obtain a first reflection image including a first reflection region and a height data of said bump corresponding to said first regular reflection region produced by a part of the first reflected beam reflected near an apex of the bump. The method further includes the steps of (c) shifting a position of said first regular reflection region in said first reflection image in accordance with a value derived from said height data and said predetermined angle, (d) extracting said first regular reflection region within a predetermined region from said first reflection image after said step c), and (e) detecting a height of said bump based on said height data corresponding to the extracted first regular reflection region.

Abstract: The bump height is measure din a sample area on a wafer, the bump height distribution on the wafer is estimated on the bases of the measured value, the portion where the estimated height distribution is out of a predetermined range is determined as an inspection area, and the bump height is measured in the inspection area, and a chip area having a bump height out of a predetermined range is judged to be defective. Data of the inspection areas and inspection results are accumulated, and the inspection density is renewed on the basis of the accumulated data. In another method, the inspection area is divided into rectangular blocks so that each block has a width of approximately equal to a light beam scanning length and a distance between any adjacent bumps in the feeding direction is less than a predetermined value, feeding path being perpendicular to the scanning direction.

Abstract: The object of the present invention is to provide a height measurement device that can accurately measure the height of an object to be measured, and that can easily and precisely adjust the focal point of an optical system.

Abstract: The present invention is a method for inspecting height, scanning the surface of a subject item having zones of different reflectance with incident light of a prescribed intensity, causing the reflected light from the surface to be imaged with means for detecting light spot positions, and detecting the height of said surface from the light spot position which was imaged, said method comprising: a step of scanning, in a second zone with low reflectance surrounding a first zone with high reflectance with a first intensity of incident light, which is low to the degree that said means for detecting light spot positions is not saturated even with said high reflectance; and a step of scanning, if it is detected that the quantity of light of the imaged light of said reflected light exceeds a prescribed threshold value, with an appropriate second intensity of incident light found from said intensity of incident light and said detected quantity of light at the time of the preceding scan.

Abstract: The terminal assembly of this invention has a terminal carrier comprised of a series of integral, same-shape structures whose shape forms a series of widthwise protuberances, arranged at a predetermined pitch, which constitute the respective longitudinal sides of the terminal carrier. A series of contact terminals extend from either side of each of the protuberances along one longitudinal side of the terminal carrier such that they are supported in the widthwise direction and by a pitch determined by that of the protuberances. Lozenge-shaped through holes are formed in the center of each of the same-shape structures at the point of intersection between an imaginary latitudinal and longitudinal axis. The individual same-shape structures and the terminal carrier as a whole are symmetrical with respect to these axes.