Abstract: The present invention relates to a rotating ring apparatus comprising: —a stationary ring (1), —a rotating ring (2) for rotation around a central region (3), —a rotation unit (4, 5) for radially bearing and rotating said rotating ring (2) with respect to the stationery ring (1), said rotation unit including a stationary induction element (4) mounted on said stationery ring (1) and a rotating induction element (5) mounted on said rotating ring (2), and —a controller (8) for controlling said rotation unit (4, 5) to rotate and levitate the rotating induction element (5).

Abstract: A lithographic apparatus includes a bearing configured to support a first part with respect to a second part of the apparatus in a first direction such that the first part is moveable in a second direction relative to the second part. The bearing passively supports the first part in three degrees of freedom. The first part is coupled to at least one permanent magnet, and the second part is coupled to at least two permanent magnets. The permanent magnet of the first part is positioned substantially between the permanent magnets of the second part. A field orientation of the permanent magnets is substantially parallel to the first direction and the permanent magnet of the first part has a substantially opposite polarity to at least one of the magnets of the second part.

Abstract: Electrostatic displacement devices (1) with high forces and high accelerations are provided by arranging the electrodes (31, 31a, 31b) such that an electric field is generated extending over an area equivalent to the surface area of the object (2) to be displaced. Preferably, higher voltages are applied to the electrodes (31a) in the edge region than to the electrodes (31b) in the middle region, to further increase the shear forces inducing the actual displacement.

Abstract: An electroactive polymer actuator (10) is disclosed for use in various applications including camera diaphragms and lenses. The actuator (10) converts electrical energy to mechanical energy and comprises, in one embodiment, at least two flexible electrodes (15, 25); a transparent elastic non-conductive material (20) having a substantially constant thickness, the transparent elastic non-conductive material (20) arranged in a manner which causes the transparent elastic non-conductive material (20) to compress in a first direction orthogonal to the thickness in response to an electric field applied to the polymer; and a frame coupled to the at least two electrodes (15, 25) and the transparent elastic non-conductive material (20), the outer frame substantially preventing expansion in a second direction opposite said first direction in response to an electric field applied to the polymer.

Abstract: An ironless linear motor (5) comprising a magnet track (53) and a coil assembly (50) operating in cooperation with said magnet track (53) and having a plurality of concentrated multi-turn coils (31 a-f, 41 a-d, 51 a-k), wherein the end windings (31E) of the coils (31 a-f, 41 a-e) are substantially rounded, the coil part (31 S) between the end windings (31E) is straight and the coils (31 a-f, 41a-d, 51a-k) are arranged in an overlapping manner, wherein the end windings (31E) are pressed together, is provided. The coil assembly has the advantage to be flat, thus being easy to handle, and leading to a high steepness.

Abstract: Linear electric motor or actuator comprising a movable part (21) consisting of a soft-magnetic core (22) which supports a set of electrically conductive turns (25), which movable part is slidably supported by a rail (26) which is provided with at least one set of permanent magnets (27, 30, 31) extending in longitudinal direction along the core's periphery. The magnets (27, 30, 31) produce a magnetic field that cooperates with the set of turns (27, 30, 31) via an air-gap. The soft-magnetic core (22) of the movable part (21) is made of soft-magnetic composite material. The electrically conductive turns (25) are wound around the periphery of the core (21) substantially perpendicularly to the centerline thereof, and at least two sets of magnets (27, 30, 31) are arranged along its periphery such that the at least two sets of magnets (27, 30, 31) are arranged at different angles to the core (22).