Abstract: In order to expand the surface area of a reflective layer, the space between adjacent turns of a drive coil, which is wound a plurality of turns on a peripheral edge front surface of the principal surface of a movable portion which, being inside a frame-formed support substrate, is connected to the support substrate by torsion bars, is filled and flattened with a smoothing layer, thereby adopting a configuration such that the reflective layer can also be provided in the region of the upper surface of the drive coil.

Abstract: In order to expand the surface area of a reflective layer, the space between adjacent turns of a drive coil, which is wound a plurality of turns on a peripheral edge front surface of the principal surface of a movable portion which, being inside a frame-formed support substrate, is connected to the support substrate by torsion bars, is filled and flattened with a smoothing layer, thereby adopting a configuration such that the reflective layer can also be provided in the region of the upper surface of the drive coil.

Abstract: A magnetic position detection device configured to detect a relative movement position of a magnetic encoder, which includes N-magnetic poles and S-magnetic poles arranged alternately in a moving direction, by a magnetosensitive portion as a change in direction of a magnetic field from the encoder. As the magnetosensitive portion, direction detection type magnetoresistive elements are arranged, which each have a resistance value that changes depending on a direction of an applied magnetic field. The encoder further includes non-magnetized portions arranged at boundaries between the N-magnetic poles and the S-magnetic poles so that changes through the movement of the encoder of a magnetic-field component Bs in the moving direction of the encoder and a magnetic-field component Br in a direction in which the magnetosensitive portion and the encoder are opposed to each other, which are formed at a position of the magnetosensitive portion, are approximately sinusoidal.

Abstract: A magnetic position detection device configured to detect a relative movement position of a magnetic encoder, which includes N-magnetic poles and S-magnetic poles arranged alternately in a moving direction, by a magnetosensitive portion as a change in direction of a magnetic field from the encoder. As the magnetosensitive portion, direction detection type magnetoresistive elements are arranged, which each have a resistance value that changes depending on a direction of an applied magnetic field. The encoder further includes non-magnetized portions arranged at boundaries between the N-magnetic poles and the S-magnetic poles so that changes through the movement of the encoder of a magnetic-field component Bs in the moving direction of the encoder and a magnetic-field component Br in a direction in which the magnetosensitive portion and the encoder are opposed to each other, which are formed at a position of the magnetosensitive portion, are approximately sinusoidal.