Patents by Inventor Fusao Shimizu

Fusao Shimizu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Shape measurement device
    Patent number: 6762399
    Abstract: A shape measurement device includes: a stage for loading a subject for measurement; an imaging section that forms an image of the subject for measurement; and a shifting section that implements relative shifting between the imaging section and the subject for measurement to shift the imaging section to a position corresponding to a portion on the subject for measurement which is to be measured, and the shifting section implements the relative shifting by shifting the imaging section without shifting the stage.
    Type: Grant
    Filed: May 24, 2001
    Date of Patent: July 13, 2004
    Assignee: Nikon Corporation
    Inventor: Fusao Shimizu
  • Carrier shape measurement device
    Patent number: 6760115
    Abstract: A carrier shape measurement device includes: a stage which supports a carrier which is to be a subject of measurement; and a measurement section which measures a shape of the carrier, and the stage comprises kinematic coupling pins to support the carrier by a kinematic coupling.
    Type: Grant
    Filed: May 24, 2001
    Date of Patent: July 6, 2004
    Assignees: Nikon Corporation, Semiconductor Leading Edge Technologies, Inc.
    Inventors: Fusao Shimizu, Atsuhiro Fujii
  • Shape measurement device
    Publication number: 20020017599
    Abstract: A shape measurement device includes: a stage for loading a subject for measurement; an imaging section that forms an image of the subject for measurement; and a shifting section that implements relative shifting between the imaging section and the subject for measurement to shift the imaging section to a position corresponding to a portion on the subject for measurement which is to be measured, and the shifting section implements the relative shifting by shifting the imaging section without shifting the stage.
    Type: Application
    Filed: May 24, 2001
    Publication date: February 14, 2002
    Applicant: NIkon Corporation
    Inventor: Fusao Shimizu
  • Carrier shape measurement device
    Publication number: 20010049880
    Abstract: A carrier shape measurement device includes: a stage which supports a carrier which is to be a subject of measurement; and a measurement section which measures a shape of the carrier, and the stage comprises kinematic coupling pins to support the carrier by a kinematic coupling.
    Type: Application
    Filed: May 24, 2001
    Publication date: December 13, 2001
    Applicant: Nikon Corporation
    Inventors: Fusao Shimizu, Atsuhiro Fujii