Abstract: A system for a semiconductor fabrication facility comprises a transporting tool configured to move a carrier, a first manufacturing tool configured to accept the carrier facing in a first direction, a second manufacturing tool configured to accept the carrier facing in the second direction, and an orientation tool. The carrier is moved to the orientation tool by the transporting tool prior to being moved to the first manufacturing tool or the second manufacturing tool by the transporting tool. The orientation tool rotates the carrier so that the carrier is accepted by the first manufacturing tool or the second manufacturing tool. The transporting tool, the first manufacturing tool, the second manufacturing tool and the orientation tool are physically separated from each other.

Abstract: A fixing mechanism includes a base, a stud and an elastic clamping member. The base is arranged at a side of an object. The base includes a through hole defined therein. The stud includes a threaded hole defined therein. The stud includes a cap portion received in the through hole and a main body passing through the through hole. An engaging groove is defined in a surface of the main body. The elastic clamping member includes an annulus end surface, and a truncated cone surface extending from an inner edge of the annulus end surface. The annulus end surface is pressed against onto with the base. A number of gaps are radially arranged in the truncated cone surface thereby defining a number of clamping portions between the gaps. The clamping portions are engaged with the engaging groove thereby cooperatively clamping the stud.

Abstract: A fixing mechanism includes a base, a stud and an elastic clamping member. The base is arranged at a side of an object. The base includes a through hole defined therein. The stud includes a threaded hole defined therein. The stud includes a cap portion received in the through hole and a main body passing through the through hole. An engaging groove is defined in a surface of the main body. The elastic clamping member includes an annulus end surface, and a truncated cone surface extending from an inner edge of the annulus end surface. The annulus end surface is pressed against onto with the base. A number of gaps are radially arranged in the truncated cone surface thereby defining a number of clamping portions between the gaps. The clamping portions are engaged with the engaging groove thereby cooperatively clamping the stud.