Abstract: An electrostatic actuator comprises a stator having a circular surface carrying a plurality of drive electrodes, a rotor arranged opposite to the surface of the stator and a drive circuit for applying a drive voltage to the drive electrodes. Each of the drive electrodes having an arcuate profile extending from the center toward the outer periphery of the circular surface. The rotor can be driven to rotate in either sense of rotation by changing the mode of applying voltages to the drive electrodes. The rotor is floated above the stator by dynamic pressure generated by an oscillator, typically a piezoelectric element, provided under the stator. The distance between the rotor and the stator can be adjusted by controlling drive voltages applied to the oscillator.

Abstract: A surface optical device apparatus includes a surface optical device capable of emitting or receiving light through a surface thereof and a thick layer formed of a radiation-curable or electron-beam-curable material, such as a polymerizable resist. In the thick layer, a guide hole for inserting an end portion of a light-transmission member, such as an optical fiber, and a plastic optical fiber with a flat end face or a lens-shaped end face, therein is formed at a position corresponding to the surface of the surface optical device such that the surface optical device can be optically coupled to the light-transmission member inserted in the guide hole. The guide hole is formed in the thick layer by performing a patterning on the thick layer using photolithography to selectively harden the thick layer and developing the thick layer.

Abstract: An electromagnetic actuator comprising a stationary member, a movable member magnetically coupled with the stationary member with a gap therebetween, and a support member for displaceably supporting the movable member relative to the stationary member. Both the stationary member and the movable member have a core section carrying a coil wound around its periphery. As the coil of the stationary member and that of the movable member are energized with electric current, the movable member is attracted toward or repulsed from the stationary member. The electromagnetic actuator can be used for an optical scanner by providing a mirror or a lens on the movable member.