Patents by Inventor Fuyuki Ogaki

Fuyuki Ogaki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Cleaning device, polishing device, and device and method for calculating rotation speed of substrate in cleaning device
    Patent number: 11664252
    Abstract: A cleaning device includes: a plurality of rollers that hold a peripheral edge part of a substrate; a rotation driving unit that rotates the substrate by rotationally driving the plurality of rollers; a cleaning member that abuts on the substrate and cleans the substrate; a cleaning liquid supply nozzle that supplies a cleaning liquid to the substrate; a microphone that detects a sound generated when a notch of the peripheral edge part of the substrate hits the plurality of rollers; and a rotation speed calculation unit that calculates a rotation speed of the substrate on the basis of the sound detected by the microphone.
    Type: Grant
    Filed: December 21, 2020
    Date of Patent: May 30, 2023
    Assignee: EBARA CORPORATION
    Inventors: Michiaki Matsuda, Hisajiro Nakano, Fuyuki Ogaki, Yusuke Watanabe, Junji Kunisawa
  • CLEANING DEVICE, POLISHING DEVICE, AND DEVICE AND METHOD FOR CALCULATING ROTATION SPEED OF SUBSTRATE IN CLEANING DEVICE
    Publication number: 20220406633
    Abstract: A cleaning device includes: a plurality of rollers that hold a peripheral edge part of a substrate; a rotation driving unit that rotates the substrate by rotationally driving the plurality of rollers; a cleaning member that abuts on the substrate and cleans the substrate; a cleaning liquid supply nozzle that supplies a cleaning liquid to the substrate; a microphone that detects a sound generated when a notch of the peripheral edge part of the substrate hits the plurality of rollers; and a rotation speed calculation unit that calculates a rotation speed of the substrate on the basis of the sound detected by the microphone.
    Type: Application
    Filed: December 21, 2020
    Publication date: December 22, 2022
    Inventors: Michiaki MATSUDA, Hisajiro NAKANO, Fuyuki OGAKI, Yusuke WATANABE, Junji KUNISAWA
  • Check valve for vacuum sewage pipe and vacuum sewage system
    Patent number: 8028715
    Abstract: The present invention provides a check valve for use in a vacuum sewage pipe. The check valve includes a body having a sewage inlet and a sewage outlet to be coupled to the vacuum sewage pipe, a flap valve element disposed in the body and rotatably supported by a first shaft, and a closing mechanism. The closing mechanism can keep the flap valve element in a closed state so as to allow the flap valve element to function as a gate valve. The closing mechanism can also limit an opening degree of the flap valve element so as to allow the flap valve element to function as a check valve.
    Type: Grant
    Filed: October 19, 2006
    Date of Patent: October 4, 2011
    Assignee: Ebara Corporation
    Inventors: Osamu Shimizu, Yuji Hiroto, Keisuke Ikeda, Fuyuki Ogaki
  • CHECK VALVE FOR VACUUM SEWAGE PIPE AND VACUUM SEWAGE SYSTEM
    Publication number: 20080083464
    Abstract: The present invention provides a check valve for use in a vacuum sewage pipe. The check valve includes a body having a sewage inlet and a sewage outlet to be coupled to the vacuum sewage pipe, a flap valve element disposed in the body and rotatably supported by a shaft, and a closing mechanism. The closing mechanism can keep the flap valve element in a closed state so as to allow the flap valve element to function as a gate valve. The closing mechanism can also limit an opening degree of the flap valve element so as to allow the flap valve element to function as a check valve.
    Type: Application
    Filed: October 19, 2006
    Publication date: April 10, 2008
    Applicant: EBARA CORPORATION
    Inventors: Osamu Shimizu, Yuji Hiroto, Keisuke Ikeda, Fuyuki Ogaki