Patents by Inventor G. Laurie Miller

G. Laurie Miller has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Eddy current system having an elongated core for in-situ profile measurement
    Patent number: 10105811
    Abstract: An eddy current monitoring system may include an elongated core. One or more coils may be coupled with the elongated core for producing an oscillating magnetic field that may couple with one or more conductive regions on a wafer. The core may be translated relative to the wafer to provide improved resolution while maintaining sufficient signal strength. An eddy current monitoring system may include a DC-coupled marginal oscillator for producing an oscillating magnetic field at a resonant frequency, where the resonant frequency may change as a result of changes to one or more conductive regions. Eddy current monitoring systems may be used to enable real-time profile control.
    Type: Grant
    Filed: August 10, 2011
    Date of Patent: October 23, 2018
    Assignee: Applied Materials, Inc.
    Inventors: G. Laurie Miller, Boguslaw A. Swedek, Manoocher Birang
  • Eddy Current System for In-Situ Profile Measurement
    Publication number: 20110294402
    Abstract: An eddy current monitoring system may include an elongated core. One or more coils may be coupled with the elongated core for producing an oscillating magnetic field that may couple with one or more conductive regions on a wafer. The core may be translated relative to the wafer to provide improved resolution while maintaining sufficient signal strength. An eddy current monitoring system may include a DC-coupled marginal oscillator for producing an oscillating magnetic field at a resonant frequency, where the resonant frequency may change as a result of changes to one or more conductive regions. Eddy current monitoring systems may be used to enable real-time profile control.
    Type: Application
    Filed: August 10, 2011
    Publication date: December 1, 2011
    Inventors: G. Laurie Miller, Boguslaw A. Swedek, Manoocher Birang
  • Eddy current apparatus and method for in-situ profile measurement
    Patent number: 7999540
    Abstract: An eddy current monitoring system may include an elongated core. One or more coils may be coupled with the elongated core for producing an oscillating magnetic field that may couple with one or more conductive regions on a wafer. The core may be translated relative to the wafer to provide improved resolution while maintaining sufficient signal strength. An eddy current monitoring system may include a DC-coupled marginal oscillator for producing an oscillating magnetic field at a resonant frequency, where the resonant frequency may change as a result of changes to one or more conductive regions. Eddy current monitoring systems may be used to enable real-time profile control.
    Type: Grant
    Filed: August 16, 2006
    Date of Patent: August 16, 2011
    Assignee: Applied Materials, Inc.
    Inventors: G. Laurie Miller, Boguslaw A. Swedek, Manoocher Birang
  • Eddy current system for in-situ profile measurement
    Patent number: 7112960
    Abstract: An eddy current monitoring system may include an elongated core. One or more coils may be coupled with the elongated core for producing an oscillating magnetic field that may couple with one or more conductive regions on a wafer. The core may be translated relative to the wafer to provide improved resolution while maintaining sufficient signal strength. An eddy current monitoring system may include a DC-coupled marginal oscillator for producing an oscillating magnetic field at a resonant frequency, where the resonant frequency may change as a result of changes to one or more conductive regions. Eddy current monitoring systems may be used to enable real-time profile control.
    Type: Grant
    Filed: July 31, 2003
    Date of Patent: September 26, 2006
    Assignee: Applied Materials, Inc.
    Inventors: G. Laurie Miller, Boguslaw A. Swedek, Manoocher Birang