Patents by Inventor G. Morrison

G. Morrison has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Optical subassembly and projection objective in semiconductor lithography
    Publication number: 20070014037
    Abstract: An optical subassembly with an optical element, for example a mirror element (7), has an optical surface (9) and bearing points (12) arranged on the circumference. The optical element (7) is connected to a mount (13) at the bearing points (12) via connecting elements (14, 15, 16, 17, 18). Stress-decoupling cutouts, for example curved slots (11), are provided between the optical surface (9) and the bearing points (12).
    Type: Application
    Filed: December 3, 2003
    Publication date: January 18, 2007
    Inventors: Andreas Frommeyer, G. Morrison, Wolfgang Keller, Yim-Bun Kwan, Harald Kirchner, Willi Heintel