Patents by Inventor Günther Kummer

Günther Kummer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate holder and a device and a method for treating substrates
    Patent number: 9711388
    Abstract: A substrate holder having a plate element for receiving a substrate includes at least one recess in a first side and spacers in the at least one recess. At least one opening is fluidly connected to the recess and is connectable to an external gas delivery/exhaust unit. At least one notch or channel radially surrounds the recess. At least one opening is fluidly connected to the notch or channel and is connectable to an external gas delivery/exhaust unit. A circumferential web radially surrounds the recess and is located between the recess and the notch or channel. A first circumferential contact surface is formed on the upper side of the web and radially surrounds the recess, such that a substrate abutting against the first contact surface forms an enclosed chamber with the recess. A second circumferential contact surface radially surrounds the notch or channel.
    Type: Grant
    Filed: November 11, 2013
    Date of Patent: July 18, 2017
    Assignee: Centrotherm Photovoltaics AG
    Inventors: Johann Georg Reichart, Wilhelm Kegel, Günther Kummer, Reinhold Obst, Wilfried Lerch
  • SUBSTRATE HOLDER AND A DEVICE AND A METHOD FOR TREATING SUBSTRATES
    Publication number: 20150294893
    Abstract: A substrate holder having a plate element for receiving a substrate.
    Type: Application
    Filed: November 11, 2013
    Publication date: October 15, 2015
    Inventors: Johann Georg Reichart, Wilhelm Kegel, Günther Kummer, Reinhold Obst, Wilfried Lerch