Patents by Inventor G. Peng

G. Peng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Actively heated aluminum baffle component having improved particle performance and methods of use and manufacture thereof
    Publication number: 20070068629
    Abstract: An actively heated aluminum baffle component such as a thermal control plate or baffle ring of a showerhead electrode assembly of a plasma processing chamber has an exposed outer aluminum oxide layer which is formed by an electropolishing procedure. The exposed outer aluminum oxide layer minimizes defects and particles generated as a result of differential thermal stresses experienced by the aluminum component and outer aluminum oxide layer during plasma processing compared to an identically shaped component having a Type III anodized surface.
    Type: Application
    Filed: September 23, 2005
    Publication date: March 29, 2007
    Inventors: Hong Shih, G. Peng, Daxing Ren