Patents by Inventor Götz GÖRISCH

Götz GÖRISCH has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • MINI ROTATABLE SPUTTER DEVICES FOR SPUTTER DEPOSITION
    Publication number: 20160189939
    Abstract: A deposition apparatus and a method for depositing deposition material on a web is described. The deposition apparatus includes a first sputter device support defining a first axis for a first rotatable sputter device, a second sputter device support defining a second axis for a second rotatable sputter device, and a coating window. The first sputter device support and the second sputter device support are adapted for supporting the first rotatable sputter device and the second rotatable sputter device to provide at least a component of the deposition material to be deposited on the web over a coating drum. Further, the distance between the first axis and the second axis is smaller than 200 mm.
    Type: Application
    Filed: March 12, 2012
    Publication date: June 30, 2016
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Thomas DEPPISCH, Frank SCHNAPPENBERGER, Andreas LOPP, Annemarie FLOCK, Götz GÖRISCH