Patents by Inventor G. Vera Zhuang

G. Vera Zhuang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8797534
    Abstract: An apparatus to calibrate a polarizer in a polarized optical system at any angle of incidence. The apparatus decouples the polarization effect of the system from the polarization effect of the sample. The apparatus includes a substrate with a polarizer disposed on the surface. An indicator on the substrate indicates the polarization orientation of the polarizer, which is in a predetermined orientation with respect to the substrate.
    Type: Grant
    Filed: September 24, 2013
    Date of Patent: August 5, 2014
    Assignee: KLA-Tencor Corporation
    Inventors: Johannes D. de Veer, Leonid Poslavsky, G. Vera Zhuang, Shankar Krishnan
  • Publication number: 20140043608
    Abstract: An apparatus to calibrate a polarizer in a polarized optical system at any angle of incidence. The apparatus decouples the polarization effect of the system from the polarization effect of the sample. The apparatus includes a substrate with a polarizer disposed on the surface. An indicator on the substrate indicates the polarization orientation of the polarizer, which is in a predetermined orientation with respect to the substrate.
    Type: Application
    Filed: September 24, 2013
    Publication date: February 13, 2014
    Applicant: KLA-Tencor Corporation
    Inventors: Johannes D. de Veer, Leonid Poslavsky, G. Vera Zhuang, Shankar Krishnan
  • Publication number: 20120320377
    Abstract: A method to calibrate a polarizer in polarized optical system at any angle of incidence, by decoupling the calibration from a polarization effect of the system, by providing a calibration apparatus that includes a substrate having a polarizer disposed on a surface thereof, with an indicator on the substrate for indicating a polarization orientation of the polarizer, loading the calibration apparatus in the polarized optical system with the indicator in a desired position, determining an initial angle between the polarization orientation and a reference of the polarized optical system, acquiring spectra using the polarized optical system at a plurality of known angles between the polarization orientation and the reference of the polarized optical system, using the spectra to plot a curve indicating an angle of the polarizer in the polarized optical system, and when the angle of the polarizer is outside of a desired range, adjusting the angle of the polarizer, and repeating the steps of acquiring the spectra, a
    Type: Application
    Filed: June 20, 2011
    Publication date: December 20, 2012
    Applicant: KLA-TENCOR CORPORATION
    Inventors: Johannes D. de Veer, Leonid Poslavsky, G. Vera Zhuang, Shankar Krishnan