Patents by Inventor Gabor D. Szoboszlay

Gabor D. Szoboszlay has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Minimum force output control method for counter-mass with cable
    Patent number: 7366642
    Abstract: Embodiments of the invention relate to a cable force feedforward approach that takes into account the cable force in the counter-mass trajectory computation to reduce or eliminate vibration of the lens body caused by the cable force disturbance and corrective force exerted by the trim motors. In one embodiment, a method provides cable force feedforward control for a counter-mass of a stage with a cable connected to the counter-mass and using the cable force feedforward control to control one or more trim motors to produce a trim motor output force to be applied to the counter-mass, the counter-mass moving in response to a reaction force from movement of the stage.
    Type: Grant
    Filed: April 26, 2005
    Date of Patent: April 29, 2008
    Assignee: Nikon Corporation
    Inventors: Yi-Ping Hsin, Gabor D. Szoboszlay, Kazuhiro Hirano, Kazuo Masaki, Christopher B. Smith, Ryoichi Kawaguchi, Bausan Yuan