Patents by Inventor Gakuji Ohta

Gakuji Ohta has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate processing apparatus and substrate processing method
    Publication number: 20060075972
    Abstract: A substrate processing apparatus comprises a processing chamber; a susceptor on which a substrate to be processed is to be placed; and a heating unit disposed below the susceptor for heating the substrate to be processed placed on the susceptor. The susceptor and the heating unit are accommodated in the processing chamber, and in a state in which the susceptor and the heating unit are relatively rotated, the substrate to be processed is processed. At least the susceptor is lifted and lowered in the processing chamber, and a substrate to be processed lifting and lowering apparatus for lifting and lowering the substrate to be processed with respect to at least a portion of the susceptor is disposed in the processing chamber.
    Type: Application
    Filed: October 25, 2005
    Publication date: April 13, 2006
    Inventors: Seiyo Nakashima, Michiko Nishiwaki, Yukinori Aburatani, Satoshi Okada, Eisuke Nishitani, Kazuhiro Nakagomi, Kazuhito Ikeda, Kazuhiro Shimeno, Gakuji Ohta, Katsuhisa Kasanami
  • Substrate processing apparatus and substrate processing method
    Publication number: 20020017363
    Abstract: A substrate processing apparatus comprises a processing chamber; a susceptor on which a substrate to be processed is to be placed; and a heating unit disposed below the susceptor for heating the substrate to be processed placed on the susceptor. The susceptor and the heating unit are accommodated in the processing chamber, and in a state in which the susceptor and the heating unit are relatively rotated, the substrate to be processed is processed. At least the susceptor is lifted and lowered in the processing chamber, and a substrate to be processed lifting and lowering apparatus for lifting and lowering the substrate to be processed with respect to at least a portion of the susceptor is disposed in the processing chamber.
    Type: Application
    Filed: March 23, 2001
    Publication date: February 14, 2002
    Inventors: Seiyo Nakashima, Michiko Nishiwaki, Yukinori Aburatani, Satoshi Okada, Eisuke Nishitani, Kazuhiro Nakagomi, Kazuhito Ikeda, Kazuhiro Shimeno, Gakuji Ohta, Katsuhisa Kasanami