Patents by Inventor Galen L. Pfeiffer

Galen L. Pfeiffer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System for implementing variable retarder capability in ellipsometer, polarimeter or the like systems
    Patent number: 7265835
    Abstract: A system for implementing Berek-type variable retarder plate tipping capability in two orthogonal directions via tipping about a single axis, in combination with a means for rotating the orientation of the axis, having application in ellipsometer and polarimeter and the like systems.
    Type: Grant
    Filed: March 14, 2006
    Date of Patent: September 4, 2007
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Craig M. Herzinger, Galen L. Pfeiffer
  • Spectroscopic ellipsometer and polarimeter systems
    Patent number: 7158231
    Abstract: A spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of detector elements, there being apertures before the stage for supporting a material system, and thereafter, the system being present in an environmental control chamber.
    Type: Grant
    Filed: November 1, 2003
    Date of Patent: January 2, 2007
    Assignee: J.A. Woollam Co., Inc.
    Inventors: John A. Woollam, Blaine D. Johs, Craig M. Herzinger, Ping He, Martin M. Liphardt, Galen L. Pfeiffer
  • System and method for setting and compensating errors in AOI and POI of a beam of EM radiation
    Patent number: 7136172
    Abstract: System and methodology for setting, and compensating detected errors between intended and realized Angle-of-Incidence (AOI) and Plane-Of-Incidence (POI) settings in ellipsometer and the like systems during analysis of sample characterizing data.
    Type: Grant
    Filed: June 2, 2004
    Date of Patent: November 14, 2006
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Blaine D. Johs, Christopher A. Goeden, Galen L. Pfeiffer, Martin M. Liphardt
  • Alignment of ellipsometer beam to sample surface
    Patent number: 7136162
    Abstract: Disclosed is a system and method of aligning, preferably by an automated procedure, a beam of electromagnetic radiation provided by a source thereof so that it approaches a sample at a specific location upon its surface, at a known angle, then reflects therefrom and enters a data detector.
    Type: Grant
    Filed: October 12, 2003
    Date of Patent: November 14, 2006
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Martin M. Liphardt, Craig M. Herzinger, Brian D. Guenther, Steven E. Green, Galen L. Pfeiffer, Ping He
  • Ellipsometer or polarimeter and the like system with beam chromatic shifting and directing means
    Patent number: 7099006
    Abstract: An electromagnetic beam chromatic shifting and directing means for use in reflectively directing a spectroscopic beam of electromagnetic radiation while de-emphasizing visual wavelength intensity and simultaneously emphasizing both IR and UV wavelength intensities, applied in ellipsometer or polarimeter and the like systems.
    Type: Grant
    Filed: July 7, 2003
    Date of Patent: August 29, 2006
    Assignee: J.A. Woollam Co., INC
    Inventors: Blaine D. Johs, Galen L. Pfeiffer, Jeffrey S. Hale, Christopher A. Goeden
  • Spectrophotometer, ellipsometer, polarimeter and the like systems
    Patent number: 6982792
    Abstract: Disclosed are improvements in ellipsometer and the like systems capable of operating in the Vacuum-Ultra-Violet (VUV) to Near Infrared (NIR) wavelength range, and methodology of use.
    Type: Grant
    Filed: February 28, 2003
    Date of Patent: January 3, 2006
    Assignee: J.A. Woollam Co. INC
    Inventors: John A. Woollam, Steven E. Green, Ping He, Blaine D. Johs, Craig M. Herzinger, Galen L. Pfeiffer, Brian D. Guenther, Martin M. Liphardt
  • System and method enabling simultaneous investigation of sample with two beams of electromagnetic radiation
    Patent number: 6937341
    Abstract: Disclosed are system and method for characterizing a system consisting of a fluid sample on a two sided stage, utilizing data obtained by applying, from both sides thereof, beams of electromagnetic radiation to a fluid coated surface in a containing cell volume. The beams can have the same or different wavelength content and/or polarization state, and can be applied at the same or different magnitude angles-of-incidence, and a third typically unpolarized beam can be applied at a normal angle-of-incidence.
    Type: Grant
    Filed: September 10, 2002
    Date of Patent: August 30, 2005
    Assignee: J. A. Woollam Co. Inc.
    Inventors: John A. Woollam, Galen L. Pfeiffer, Daniel W. Thompson, Blaine D. Johs, Craig M. Herzinger